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Extract from the Register of European Patents

EP About this file: EP3483924

EP3483924 - APPARATUS AND METHOD FOR PROCESSING A SURFACE OF A SUBSTRATE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  11.11.2022
Database last updated on 15.06.2024
FormerThe patent has been granted
Status updated on  03.12.2021
FormerGrant of patent is intended
Status updated on  27.06.2021
FormerRequest for examination was made
Status updated on  22.11.2019
FormerThe application has been published
Status updated on  12.04.2019
Most recent event   Tooltip14.06.2024Lapse of the patent in a contracting state
New state(s): TR		published on 17.07.2024 [2024/29]
Applicant(s)For all designated states
Ebara Corporation
11-1 Haneda
Asahi-cho
Ohta-ku
Tokyo 144-8510 / JP
[N/P]
Former [2019/20]For all designated states
Ebara Corporation
11-1 Haneda Asahi-cho Ohta-ku
Tokyo 144-8510 / JP
Inventor(s)01 / ISHII, Yu
EBARA CORPORATION
11-1, Haneda Asahi-cho, Ota-ku
Tokyo, 144-8510 / JP
02 / UCHIYAMA, Keisuke
EBARA CORPORATION
11-1, Haneda Asahi-cho, Ota-ku
Tokyo, 144-8510 / JP
 [2019/20]
Representative(s)Klang, Alexander H.
Wagner & Geyer Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5
80538 München / DE
[2022/01]
Former [2019/20]Klang, Alexander H.
Wagner & Geyer Gewürzmühlstrasse 5
80538 München / DE
Application number, filing date18205424.709.11.2018
[2019/20]
Priority number, dateJP2017021790613.11.2017         Original published format: JP 2017217906
[2019/20]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3483924
Date:15.05.2019
Language:EN
[2019/20]
Type: B1 Patent specification 
No.:EP3483924
Date:05.01.2022
Language:EN
[2022/01]
Search report(s)(Supplementary) European search report - dispatched on:EP17.04.2019
ClassificationIPC:H01L21/67, B24B37/10, B24B55/12, B08B1/00, B24B9/06, B24B21/00, B24B37/30, B24B37/04, H01L21/304, B24B21/06, // H01L21/687, B24B41/06, B24B1/00
[2021/28]
CPC:
B24B1/00 (EP,US); H01L21/67028 (KR); H01L21/0209 (US);
B24B21/004 (EP,US); B24B21/06 (EP,US); B24B37/105 (EP,US);
B24B41/06 (EP,US); B24B9/065 (EP,US); H01L21/02041 (KR);
H01L21/027 (KR); H01L21/304 (KR); H01L21/67046 (EP,US);
H01L21/67092 (KR); H01L21/67132 (KR); H01L21/67259 (KR);
H01L21/6838 (KR,US); H01L21/68728 (EP,US) (-)
Former IPC [2019/20]H01L21/67, B24B37/10, B24B55/12, B08B1/00, B24B9/06, B24B21/00, B24B37/30, B24B37/04, H01L21/304, B24B21/06, // H01L21/687
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/52]
Former [2019/20]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:VORRICHTUNG UND VERFAHREN ZUR BEHANDLUNG EINER OBERFLÄCHE EINES SUBSTRATS[2019/20]
English:APPARATUS AND METHOD FOR PROCESSING A SURFACE OF A SUBSTRATE[2019/20]
French:APPAREIL ET MÉTHODE POUR TRAITER UNE SURFACE D'UN SUBSTRAT[2019/20]
Examination procedure15.11.2019Amendment by applicant (claims and/or description)
15.11.2019Examination requested  [2019/52]
15.11.2019Date on which the examining division has become responsible
28.06.2021Communication of intention to grant the patent
26.10.2021Fee for grant paid
26.10.2021Fee for publishing/printing paid
26.10.2021Receipt of the translation of the claim(s)
Opposition(s)06.10.2022No opposition filed within time limit [2022/50]
Fees paidRenewal fee
26.11.2020Renewal fee patent year 03
26.11.2021Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU09.11.2018
AL05.01.2022
AT05.01.2022
CY05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
IT05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
MK05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
TR05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
[2024/29]
Former [2024/27]HU09.11.2018
AL05.01.2022
AT05.01.2022
CY05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
IT05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
MK05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2024/21]HU09.11.2018
AL05.01.2022
AT05.01.2022
CY05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
IT05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2024/18]HU09.11.2018
AL05.01.2022
AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
IT05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2023/35]AL05.01.2022
AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
IT05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2023/31]AL05.01.2022
AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2023/10]AL05.01.2022
AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2023/01]AL05.01.2022
AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/49]AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/48]AT05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/47]AT05.01.2022
DK05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/46]AT05.01.2022
DK05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/42]AT05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/39]AT05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
PT05.05.2022
Former [2022/36]AT05.01.2022
ES05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
PT05.05.2022
Former [2022/35]ES05.01.2022
HR05.01.2022
LT05.01.2022
NL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
PT05.05.2022
Former [2022/34]ES05.01.2022
LT05.01.2022
NL05.01.2022
NO05.04.2022
PT05.05.2022
Former [2022/33]LT05.01.2022
NL05.01.2022
NO05.04.2022
Former [2022/30]NL05.01.2022
Documents cited:Search[A]JPS61203643  (MITSUBISHI ELECTRIC CORP) [A] 1-10 * abstract *;
 [A]JPH0810721  (CASIO COMPUTER CO LTD) [A] 1-10 * abstract *;
 [A]US2002045348  (ARAI KAZUHISA [JP]) [A] 1-10* abstract *;
 [A]US2004106363  (ISHII YOU [JP], et al) [A] 1-10 * abstract *;
 [A]US2013074873  (KITAGAWA HIROAKI [JP], et al) [A] 1-10 * abstract *;
 [A]US2013213437  (ISHII YU [JP], et al) [A] 1-10 * abstract *;
 US2015000055  [ ] (TOGAWA TETSUJI [JP], et al) [ ] * abstract * * paragraphs [0137] - [0150] *;
 [AD]JP2015012200  (EBARA CORP) [AD] 1-10 * abstract *;
 [A]JP2017188695  (EBARA CORP) [A] 1-10 * abstract * * paragraph [0048] *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.