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Extract from the Register of European Patents

EP About this file: EP3743539

EP3743539 - EVAPORATOR FOR EVAPORATING A SOURCE MATERIAL, MATERIAL DEPOSITION SOURCE, DEPOSITION APPARATUS AND METHODS THEREFOR [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  19.01.2024
Database last updated on 15.06.2024
FormerRequest for examination was made
Status updated on  30.10.2020
FormerThe international publication has been made
Status updated on  03.08.2019
Formerunknown
Status updated on  06.02.2018
Most recent event   Tooltip18.05.2024New entry: Reply to examination report 
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, California 95054 / US
[2020/49]
Inventor(s)01 / ARMSTRONG, Claire
Kirchbergstr. 10
63755 Alzenau / DE
02 / SCHNAPPENBERGER, Frank
Heppenberg 19
63867 Johannesberg / DE
03 / DEPPISCH, Thomas
An den Bornwiesen 11
63743 Aschaffenburg / DE
04 / DIEGUEZ-CAMPO, Jose Manuel
Hergerswiesenweg 11
63457 Hanau / DE
05 / MAURISCHAT, Anja
Mühlstr. 13
63768 Hösbach / DE
06 / SCHLÄFER, Susanne
Die Spitzenwiesen 19
63654 Büdingen / DE
 [2020/49]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2020/49]
Application number, filing date18701455.023.01.2018
[2020/49]
WO2018EP51540
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019145014
Date:01.08.2019
Language:EN
[2019/31]
Type: A1 Application with search report 
No.:EP3743539
Date:02.12.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 01.08.2019 takes the place of the publication of the European patent application.
[2020/49]
Search report(s)International search report - published on:EP01.08.2019
ClassificationIPC:C23C14/24, C23C14/26, C23C14/12, C23C14/56
[2020/49]
CPC:
C23C14/243 (EP); C23C14/12 (EP); C23C14/26 (EP);
C23C14/562 (EP)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/49]
TitleGerman:VERDAMPFER ZUM VERDAMPFEN EINES QUELLENMATERIALS, MATERIALABSCHEIDUNGSQUELLE, ABSCHEIDUNGSVORRICHTUNG UND VERFAHREN DAFÜR[2020/49]
English:EVAPORATOR FOR EVAPORATING A SOURCE MATERIAL, MATERIAL DEPOSITION SOURCE, DEPOSITION APPARATUS AND METHODS THEREFOR[2020/49]
French:ÉVAPORATEUR POUR L'ÉVAPORATION D'UN MATÉRIAU SOURCE, SOURCE DE DÉPÔT DE MATÉRIAU, APPAREIL DE DÉPÔT ET PROCÉDÉS S'Y RAPPORTANT[2020/49]
Entry into regional phase21.08.2020National basic fee paid 
21.08.2020Designation fee(s) paid 
21.08.2020Examination fee paid 
Examination procedure21.08.2020Examination requested  [2020/49]
21.08.2020Date on which the examining division has become responsible
23.02.2021Amendment by applicant (claims and/or description)
22.01.2024Despatch of a communication from the examining division (Time limit: M04)
16.05.2024Reply to a communication from the examining division
Fees paidRenewal fee
21.08.2020Renewal fee patent year 03
25.01.2021Renewal fee patent year 04
25.01.2022Renewal fee patent year 05
25.01.2023Renewal fee patent year 06
25.01.2024Renewal fee patent year 07
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[X]JPH04236769  (ULVAC CORP) [X] 1-6,11,12,14,15 * paragraph [0007]; figures 1,3 *;
 [XY]US2004042770  (CHOE YUN SOO [KR], et al) [X] 1-4,9,10,14 * paragraphs [0036] , [0038]; figure 5 * * paragraph [0046] * * paragraph [0039] * * paragraph [0059] * [Y] 13;
 [A]US2010173067  (UKIGAYA NOBUTAKA [JP], et al) [A] 1* paragraph [0099]; figure 7 *;
 [Y]WO2017033053  (FLISOM AG [CH], et al) [Y] 13 * paragraph [0025]; figure 1 *;
 [X]US2017175250  (HU HAIBING [CN]) [X] 1,7,8 * figure 2 * * paragraph [0031] *;
 [X]WO2017128471  (SHENZHEN CHINA STAR OPTOELECT [CN]) [X] 1,2,4,9,10,14 * paragraph [0033]; figure 2 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.