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Extract from the Register of European Patents

EP About this file: EP3596546

EP3596546 - A SENSOR MARK [Right-click to bookmark this link]
Former [2020/04]A SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK
[2020/50]
StatusNo opposition filed within time limit
Status updated on  11.02.2022
Database last updated on 17.09.2024
FormerThe patent has been granted
Status updated on  05.03.2021
FormerGrant of patent is intended
Status updated on  15.12.2020
FormerRequest for examination was made
Status updated on  20.12.2019
FormerThe international publication has been made
Status updated on  22.09.2018
Formerunknown
Status updated on  24.02.2018
Most recent event   Tooltip10.05.2024Lapse of the patent in a contracting state
New state(s): HU		published on 12.06.2024  [2024/24]
Applicant(s)For all designated states
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven / NL
[2020/04]
Inventor(s)01 / KLUGKIST, Joost André
P.O. Box 324
5500 AH Veldhoven / NL
02 / BANINE, Vadim Yevgenyevich
P.O. Box 324
5500 AH Veldhoven / NL
03 / BECKERS, Johan Franciscus Maria
P.O. Box 324
5500 AH Veldhoven / NL
04 / JAMBUNATHAN, Madhusudhanan
P.O. Box 324
5500 AH Veldhoven / NL
05 / NASALEVICH, Maxim Aleksandrovich
P.O. Box 324
5500 AH Veldhoven / NL
06 / NIKIPELOV, Andrey
P.O. Box 324
5500 AH Veldhoven / NL
07 / STAS, Roland Johannes Wilhelmus
P.O. Box 324
5500 AH Veldhoven / NL
08 / VLES, David Ferdinand
P.O. Box 324
5500 AH Veldhoven / NL
09 / WELTERS, Wilhelmus Jacobus Johannes
P.O. Box 324
5500 AH Veldhoven / NL
10 / WRICKE, Sandro
P.O. Box 324
5500 AH Veldhoven / NL
 [2020/04]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[2021/14]
Former [2020/04]Verhoeven, Johannes Theodorus Maria
ASML Netherlands B.V.
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
Application number, filing date18704983.815.02.2018
[2020/04]
WO2018EP53761
Priority number, dateEP2017016105815.03.2017         Original published format: EP 17161058
EP2017017655419.06.2017         Original published format: EP 17176554
EP2017018323426.07.2017         Original published format: EP 17183234
[2020/04]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2018166738
Date:20.09.2018
Language:EN
[2018/38]
Type: A1 Application with search report 
No.:EP3596546
Date:22.01.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 20.09.2018 takes the place of the publication of the European patent application.
[2020/04]
Type: B1 Patent specification 
No.:EP3596546
Date:07.04.2021
Language:EN
[2021/14]
Search report(s)International search report - published on:EP20.09.2018
ClassificationIPC:G03F7/20, G03F9/00, G01J1/42
[2020/04]
CPC:
G03F7/7085 (EP,US); G01J1/429 (EP,US); G01J1/4257 (EP);
G03F7/70341 (EP); G03F7/7095 (EP); G03F9/7007 (EP);
G03F9/7076 (EP) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/04]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:SENSORMARKIERUNG[2020/50]
English:A SENSOR MARK[2020/50]
French:REPÈRE DE CAPTEUR[2020/50]
Former [2020/04]SENSORMARKIERUNG UND VERFAHREN ZUR HERSTELLUNG EINER SENSORMARKIERUNG
Former [2020/04]A SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK
Former [2020/04]REPÈRE DE CAPTEUR, ET PROCÉDÉ DE FABRICATION D'UN REPÈRE DE CAPTEUR
Entry into regional phase20.08.2019National basic fee paid 
20.08.2019Designation fee(s) paid 
20.08.2019Examination fee paid 
Examination proceduredeletedDeletion: Application deemed to be withdrawn, date of legal effect  [2020/04]
20.08.2019Examination requested  [2020/04]
20.08.2019Date on which the examining division has become responsible
29.10.2019Despatch of communication that the application is deemed to be withdrawn, reason: filing fee / search fee not paid in time  [2020/04]
26.05.2020Amendment by applicant (claims and/or description)
16.12.2020Communication of intention to grant the patent
23.02.2021Fee for grant paid
23.02.2021Fee for publishing/printing paid
23.02.2021Receipt of the translation of the claim(s)
Opposition(s)10.01.2022No opposition filed within time limit [2022/11]
Request for further processing for:12.11.2019Request for further processing filed
12.11.2019Full payment received (date of receipt of payment)
Request granted
21.11.2019Decision despatched
Fees paidRenewal fee
24.02.2020Renewal fee patent year 03
25.02.2021Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU15.02.2018
AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
MK07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
[2024/24]
Former [2024/23]AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
MK07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2024/20]AL07.04.2021
AT07.04.2021
CY07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/44]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
MC07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/36]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
IT07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/29]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SI07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/26]AL07.04.2021
AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/23]AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/10]AT07.04.2021
CZ07.04.2021
DK07.04.2021
EE07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
PT09.08.2021
IS22.12.2021
Former [2022/09]AT07.04.2021
CZ07.04.2021
DK07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RO07.04.2021
RS07.04.2021
SE07.04.2021
SK07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/08]AT07.04.2021
CZ07.04.2021
DK07.04.2021
ES07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2022/07]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
SM07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2021/52]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
PL07.04.2021
RS07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2021/51]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
RS07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
IS07.08.2021
PT09.08.2021
Former [2021/50]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
PT09.08.2021
Former [2021/49]AT07.04.2021
FI07.04.2021
HR07.04.2021
LT07.04.2021
LV07.04.2021
NL07.04.2021
SE07.04.2021
BG07.07.2021
NO07.07.2021
GR08.07.2021
Former [2021/46]AT07.04.2021
FI07.04.2021
LT07.04.2021
NL07.04.2021
BG07.07.2021
Cited inInternational search[A]EP1500982  (ASML NETHERLANDS BV [NL]) [A] 1-15 * paragraphs [0034] - [0041]; figure 1 *;
 [A]EP2264528  (ASML NETHERLANDS BV [NL]) [A] 1-15 * paragraphs [0106] - [0113]; figures 13-15 *;
 [A]US2008164415  (KIERSE OLIVER [IE], et al) [A] 1-15 * paragraphs [0024] - [0026]; figure 4 *;
 [A]US2006163453  (HYNES EAMON [IE], et al) [A] 1 * paragraph [0019]; figure 1 *
by applicantUS5296891
 US5523193
 US5229872
 EP1420298
 US2004207824
 US2010045949
 US2007243397
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.