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EP3635375
European procedure
Extract from the Register of European Patents
EP About this file: EP3635375
| EP3635375 - METHODS AND APPARATUS FOR POLARIZED RETICLE INSPECTION [Right-click to bookmark this link] | Status | The patent has been granted Status updated on 12.01.2024 Database last updated on 16.07.2024 | |
| Former | Grant of patent is intended Status updated on 06.09.2023 | ||
| Former | Examination is in progress Status updated on 18.02.2022 | ||
| Former | Request for examination was made Status updated on 13.03.2020 | ||
| Former | The international publication has been made Status updated on 12.01.2019 | Most recent event Tooltip | 12.07.2024 | Lapse of the patent in a contracting state New state(s): LT, NO | published on 14.08.2024 [2024/33] | Applicant(s) | For all designated states Kla-Tencor Corporation One Technology Drive Milpitas, California 95035 / US | [2020/16] | Inventor(s) | 01 /
HUANG, Haifeng 2997 Rivers Bend Circle Livermore California 94550 / US | 02 /
SHI, Rui-Fang 19842 Portal Plaza Cupertino California 95014 / US | 03 /
KVAMME, Damon 16816 Frank Avenue Los Gatos California 95032 / US | 04 /
KELKAR, Amrish 15 Hawthorne Way Apt 209 San Jose California 95110 / US | [2020/16] | Representative(s) | FRKelly Waterways House Grand Canal Quay Dublin D02 PD39 / IE | [2024/07] |
| Former [2020/16] | FRKelly 27 Clyde Road Dublin D04 F838 / IE | Application number, filing date | 18827850.1 | 29.06.2018 | [2020/16] | WO2018US40433 | Priority number, date | US201762528038P | 01.07.2017 Original published format: US 201762528038 P | US201715795089 | 26.10.2017 Original published format: US201715795089 | [2020/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2019010093 | Date: | 10.01.2019 | Language: | EN | [2019/02] | Type: | A1 Application with search report | No.: | EP3635375 | Date: | 15.04.2020 | Language: | EN | The application published by WIPO in one of the EPO official languages on 10.01.2019 takes the place of the publication of the European patent application. | [2020/16] | Type: | B1 Patent specification | No.: | EP3635375 | Date: | 14.02.2024 | Language: | EN | [2024/07] | Search report(s) | International search report - published on: | KR | 10.01.2019 | (Supplementary) European search report - dispatched on: | EP | 01.02.2021 | Classification | IPC: | G01N21/88, G02B27/28 | [2020/16] | CPC: |
G01N21/21 (EP,US);
G01N21/8806 (KR);
G01N21/956 (EP,US);
G02B27/283 (KR);
G02B27/286 (KR);
G01N2021/8848 (KR);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2020/16] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | VERFAHREN UND VORRICHTUNG ZUR POLARISIERTEN RETIKELINSPEKTION | [2020/16] | English: | METHODS AND APPARATUS FOR POLARIZED RETICLE INSPECTION | [2020/16] | French: | PROCÉDÉS ET APPAREIL D'INSPECTION RÉTICULAIRE POLARISÉE | [2020/16] | Entry into regional phase | 06.01.2020 | National basic fee paid | 06.01.2020 | Search fee paid | 06.01.2020 | Designation fee(s) paid | 06.01.2020 | Examination fee paid | Examination procedure | 06.01.2020 | Examination requested [2020/16] | 17.08.2021 | Amendment by applicant (claims and/or description) | 17.02.2022 | Despatch of a communication from the examining division (Time limit: M04) | 15.06.2022 | Reply to a communication from the examining division | 07.09.2023 | Communication of intention to grant the patent | 08.01.2024 | Fee for grant paid | 08.01.2024 | Fee for publishing/printing paid | 08.01.2024 | Receipt of the translation of the claim(s) | Fees paid | Renewal fee | 29.06.2020 | Renewal fee patent year 03 | 28.06.2021 | Renewal fee patent year 04 | 27.06.2022 | Renewal fee patent year 05 | 27.06.2023 | Renewal fee patent year 06 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | LT | 14.02.2024 | NO | 14.05.2024 | IS | 14.06.2024 | [2024/33] |
| Former [2024/32] | IS | 14.06.2024 | Documents cited: | Search | [XI]US2004125375 (SOME DANIEL [IL]) [X] 1,9 * the whole document * [I] 3,8,15; | [A]US2005264813 (GIAKOS GEORGE [US]) [A] 1,9 * paragraphs [0036] - [0039]; figure 1 *; | [A]US2014204202 (OGAWA RIKI [JP], et al) [A] 1,9* paragraphs [0070] - [0074]; figure 9 *; | [A]US2016154229 (MILNER THOMAS E [US], et al) [A] 1,9 * paragraphs [0059] - [0063]; figure 1 * | International search | [A]US2004125375 (SOME DANIEL [IL]) [A] 1-20 * See paragraphs [0028]-[0052] and figures 1-7. *; | [A]US2005264813 (GIAKOS GEORGE [US]) [A] 1-20 * See paragraphs [0036]-[0038], [0066]-[0071] and figures 1, 6. *; | [A]US2012314202 (DANYLUK STEVEN [US], et al) [A] 1-20* See paragraphs [0124]-[0127], claim 1, and figures 15, 35. *; | [A]US2014268149 (ZAVISLAN JAMES M [US], et al) [A] 1-20 * See paragraphs [0034]-[0054] and figures 2A-5. *; | [A]US2016154229 (MILNER THOMAS E [US], et al) [A] 1-20 * See paragraphs [0059]-[0071] and figures 1-3b. * | by applicant | US2004125375 | US7351980 |