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Extract from the Register of European Patents

EP About this file: EP3729068

EP3729068 - A METHOD FOR MANUFACTURING A FLUID SENSOR DEVICE AND A FLUID SENSOR DEVICE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  22.09.2023
Database last updated on 11.04.2026
FormerThe patent has been granted
Status updated on  14.10.2022
FormerGrant of patent is intended
Status updated on  24.07.2022
FormerRequest for examination was made
Status updated on  25.09.2020
FormerThe international publication has been made
Status updated on  29.06.2019
Formerunknown
Status updated on  28.01.2019
Most recent event   Tooltip27.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 30.10.2024  [2024/44]
Applicant(s)For all designated states
Imec VZW
Kapeldreef 75
3001 Leuven / BE
[2020/44]
Inventor(s)01 / HUMBERT, Aurelie
c/o IMEC VZW Patent Department Kapeldreef 75
3001 Leuven / BE
02 / SEVERI, Simone
c/o Patent Department IMEC VZW Kapeldreef 75
3001 Leuven / BE
 [2020/44]
Representative(s)AWA Sweden AB
Box 5117
200 71 Malmö / SE
[2022/46]
Former [2020/44]AWA Sweden AB
P.O. Box 5117
200 71 Malmö / SE
Application number, filing date18836232.119.12.2018
[2020/44]
WO2018EP85864
Priority number, dateEP2017021042022.12.2017         Original published format: EP 17210420
[2020/44]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019121931
Date:27.06.2019
Language:EN
[2019/26]
Type: A1 Application with search report 
No.:EP3729068
Date:28.10.2020
Language:EN
The application published by WIPO in one of the EPO official languages on 27.06.2019 takes the place of the publication of the European patent application.
[2020/44]
Type: B1 Patent specification 
No.:EP3729068
Date:16.11.2022
Language:EN
[2022/46]
Search report(s)International search report - published on:EP27.06.2019
ClassificationIPC:G01N27/414, H01L21/762
[2020/44]
CPC:
G01N27/4145 (EP,US); H10P90/1914 (EP,US); G01N27/4146 (EP,US);
G01N27/4148 (US); H10W10/181 (EP,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/44]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINER FLUIDSENSORVORRICHTUNG UND FLUIDSENSORVORRICHTUNG[2020/44]
English:A METHOD FOR MANUFACTURING A FLUID SENSOR DEVICE AND A FLUID SENSOR DEVICE[2020/44]
French:PROCÉDÉ DE FABRICATION D'UN DISPOSITIF DE DÉTECTION DE FLUIDE ET DISPOSITIF DE DÉTECTION DE FLUIDE[2022/32]
Former [2020/44]PROCÉDÉ DE FABRICATION D'UN DISPOSITIF DE CAPTEUR DE FLUIDE ET DISPOSITIF DE CAPTEUR DE FLUIDE
Entry into regional phase08.07.2020National basic fee paid 
08.07.2020Designation fee(s) paid 
08.07.2020Examination fee paid 
Examination procedure08.07.2020Examination requested  [2020/44]
08.07.2020Date on which the examining division has become responsible
25.01.2021Amendment by applicant (claims and/or description)
25.07.2022Communication of intention to grant the patent
05.10.2022Fee for grant paid
05.10.2022Fee for publishing/printing paid
05.10.2022Receipt of the translation of the claim(s)
Opposition(s)17.08.2023No opposition filed within time limit [2023/43]
Fees paidRenewal fee
17.12.2020Renewal fee patent year 03
16.12.2021Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU19.12.2018
AL16.11.2022
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Cited inInternational search[YA] US2012161333  (THUAIRE AURELIE et al.) [Y] 1-11,13,14 * figures 1-6 * * paragraphs [0109] , [0107] - [0137] - [0144] , [0147] *[A] 12
 [XA] US2015268189  (RIGANTE SARA et al.) [X] 14 * figures 1-16 * * paragraphs [0086] , [0111] , [0130] - [0135] - [0289] *[A] 1-13
 [YA] US2010066348  (MERZ MATTHIAS et al.) [Y] 13 * figure 9 * * paragraphs [0126] - [0135] *[A] 14
 [A] DE10254158  (INFINEON TECHNOLOGIES AG et al.) [A] 1-14 * figures 1-9 * * paragraphs [0053] - [0061] *
 [YA]   RIGANTE S ET AL: "Low power finfet ph-sensor with high-sensitivity voltage readout", 2013 PROCEEDINGS OF THE EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC), IEEE, 16 September 2013 (2013-09-16), pages 350 - 353, XP032596950, DOI: 10.1109/ESSDERC.2013.6818890 [Y] 1-11,13,14 * abstract * * page 350, column left, paragraph 3 - column right, paragraph 4 * * page 351, column left, paragraph 4 - column right, paragraph 2 * [A] 12

DOI:   http://dx.doi.org/10.1109/ESSDERC.2013.6818890
 [A]   TAKEUCHI H ET AL: "Thermal Budget Limits of Quarter-Micrometer Foundry CMOS for Post-Processing MEMS Devices", IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE SERVICE CENTER, PISACATAWAY, NJ, US, vol. 52, no. 9, 2 September 2005 (2005-09-02), pages 2081 - 2086, XP011138322, ISSN: 0018-9383, DOI: 10.1109/TED.2005.854287 [A] 1-14 * abstract *

DOI:   http://dx.doi.org/10.1109/TED.2005.854287
 [A]   M. SENGUPTA ET AL: "Effects of Rapid Thermal Annealing Temperature on Performances of Nanoscale FinFETs", JSTS:JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, vol. 9, no. 4, 30 December 2009 (2009-12-30), pages 266 - 272, XP055472188, ISSN: 1598-1657, DOI: 10.5573/JSTS.2009.9.4.266 [A] 1-14 * abstract * * page 268, column left, paragraph 1 *

DOI:   http://dx.doi.org/10.5573/JSTS.2009.9.4.266
 [A]   MOHTASHIM MANSOOR ET AL: "An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications", SENSORS, vol. 16, no. 11, 4 November 2016 (2016-11-04), pages 1608, XP055411629, DOI: 10.3390/s16111608 [A] 1-14 * abstract * * page 4, paragraph 3 *

DOI:   http://dx.doi.org/10.3390/s16111608
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