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Extract from the Register of European Patents

EP About this file: EP3712927

EP3712927 - PLASMA ETCHING METHOD USING FARADAY CAGE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  16.12.2022
Database last updated on 30.07.2024
FormerThe patent has been granted
Status updated on  07.01.2022
FormerGrant of patent is intended
Status updated on  06.10.2021
FormerRequest for examination was made
Status updated on  21.08.2020
FormerThe international publication has been made
Status updated on  06.07.2019
Most recent event   Tooltip14.06.2024Lapse of the patent in a contracting state
New state(s): MC		published on 17.07.2024  [2024/29]
Applicant(s)For all designated states
LG CHEM, LTD.
128, Yeoui-daero
Yeongdeungpo-gu
Seoul 07336 / KR
[2020/39]
Inventor(s)01 / HER, Eun Kyu
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
02 / JANG, Song Ho
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
03 / KIM, Chung Wan
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
04 / SHIN, Bu Gon
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
05 / PARK, Jeong Ho
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
06 / YOON, Jung Hwan
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
07 / CHOO, So Young
LG Chem Research Park, 188, Munji-ro Yuseong-gu
Daejeon 34122 / KR
 [2020/39]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2020/39]
Application number, filing date18895871.414.12.2018
[2020/39]
WO2018KR15930
Priority number, dateKR2017017930026.12.2017         Original published format: KR 20170179300
[2020/39]
Filing languageKO
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2019132345
Date:04.07.2019
Language:KO
[2019/27]
Type: A1 Application with search report 
No.:EP3712927
Date:23.09.2020
Language:EN
[2020/39]
Type: B1 Patent specification 
No.:EP3712927
Date:09.02.2022
Language:EN
[2022/06]
Search report(s)International search report - published on:KR04.07.2019
(Supplementary) European search report - dispatched on:EP22.10.2020
ClassificationIPC:H01L21/3065, H01L21/3213, H01J37/32, G02B5/18
[2020/48]
CPC:
H01J37/32651 (EP,US); H01L21/3065 (EP,KR); B29C33/3842 (US);
G02B27/0081 (EP); G02B27/0172 (EP); G02B5/1814 (EP);
G02B5/1857 (EP); H01J37/32357 (EP); H01J37/32422 (EP);
H01J37/32449 (US); H01L21/311 (EP); H01L21/31116 (KR);
H01L21/3213 (EP); H01L21/32136 (KR); B29L2011/0075 (US);
G02B5/1871 (EP); G02B6/0038 (US); G02B6/0065 (US);
H01J2237/334 (US) (-)
Former IPC [2020/39]H01L21/3065, H01L21/3213, H01L21/311
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2020/39]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:PLASMAÄTZVERFAHREN UNTER VERWENDUNG EINES FARADAY-KÄFIGS[2020/39]
English:PLASMA ETCHING METHOD USING FARADAY CAGE[2020/39]
French:PROCÉDÉ DE GRAVURE PAR PLASMA UTILISANT UNE CAGE DE FARADAY[2020/39]
Entry into regional phase18.06.2020Translation filed 
18.06.2020National basic fee paid 
18.06.2020Search fee paid 
18.06.2020Designation fee(s) paid 
18.06.2020Examination fee paid 
Examination procedure18.06.2020Examination requested  [2020/39]
14.04.2021Amendment by applicant (claims and/or description)
19.11.2021Communication of intention to grant the patent
30.12.2021Fee for grant paid
30.12.2021Fee for publishing/printing paid
30.12.2021Receipt of the translation of the claim(s)
Opposition(s)10.11.2022No opposition filed within time limit [2023/03]
Fees paidRenewal fee
22.12.2020Renewal fee patent year 03
22.12.2021Renewal fee patent year 04
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU14.12.2018
AL09.02.2022
AT09.02.2022
CY09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
IT09.02.2022
LT09.02.2022
LV09.02.2022
MC09.02.2022
MK09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SI09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
[2024/29]
Former [2024/27]HU14.12.2018
AL09.02.2022
AT09.02.2022
CY09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
IT09.02.2022
LT09.02.2022
LV09.02.2022
MK09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SI09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2024/25]HU14.12.2018
AL09.02.2022
AT09.02.2022
CY09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
IT09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SI09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2024/21]AL09.02.2022
AT09.02.2022
CY09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
IT09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SI09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2023/35]AL09.02.2022
AT09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
IT09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SI09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2023/10]AL09.02.2022
AT09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SI09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2023/01]AL09.02.2022
AT09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2022/49]AT09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SK09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2022/48]AT09.02.2022
CZ09.02.2022
DK09.02.2022
EE09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2022/47]AT09.02.2022
DK09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RO09.02.2022
RS09.02.2022
SE09.02.2022
SM09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2022/46]AT09.02.2022
DK09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RS09.02.2022
SE09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2022/42]AT09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RS09.02.2022
SE09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
IS09.06.2022
PT09.06.2022
Former [2022/39]AT09.02.2022
ES09.02.2022
FI09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RS09.02.2022
SE09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
PT09.06.2022
Former [2022/36]AT09.02.2022
ES09.02.2022
HR09.02.2022
LT09.02.2022
LV09.02.2022
NL09.02.2022
PL09.02.2022
RS09.02.2022
SE09.02.2022
BG09.05.2022
NO09.05.2022
GR10.05.2022
PT09.06.2022
Former [2022/35]ES09.02.2022
HR09.02.2022
LT09.02.2022
NL09.02.2022
RS09.02.2022
SE09.02.2022
BG09.05.2022
NO09.05.2022
PT09.06.2022
Former [2022/34]ES09.02.2022
LT09.02.2022
NL09.02.2022
NO09.05.2022
PT09.06.2022
Former [2022/33]LT09.02.2022
NO09.05.2022
Documents cited:Search[A]WO2013147966  (HARVARD COLLEGE [US]) [A] 1-15 * abstract * * paragraphs [0005] , [0006] , [0043] , [0045] , [0048] - [0055] *;
 [A]US2015037597  (KIM CHANG-KOO [KR], et al) [A] 1-15 * abstract * * paragraphs [0002] , [0007] , [0013] , [0014] , [0049] - [0074] - [0094] , [0095] *;
 [A]US9659797  (BURCKEL DAVID BRUCE [US], et al) [A] 1-15 * abstract * * column 1, lines 13-62 ** column 4, line 36 - column 7, line 56 *
International search[A]KR100281241B  (HERMES INC.) [A] 1-16 * See page 7 and figure 4. *;
 [A]KR101409387B  (AJOU UNIV IND ACAD COOP FOUND [KR]) [A] 1-16* See paragraphs [0033]-[0038]. *;
 [YA]KR101576205B  (SAMSUNG ELECTRONICS CO., LTD.) [Y] 1-12, 16 * See paragraphs [0032], [0035], [0041], [0043], [0072], [0075] and figures 2, 17, 18. * [A] 13-15;
 [Y]KR101690828B  (TOKYO ELECTRON LIMITED) [Y] 1-12, 16 * See paragraph [0080] and figure 26. *;
 [Y]JP6115300B  (TOPPAN PRINTING CO., LTD.) [Y] 11, 12, 16 * See paragraphs [0047], [0062]. *
ExaminationUS2016035539
by applicantKR101131101B
 KR20170179300
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.