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EP3764164
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EP About this file: EP3764164
| EP3764164 - METHOD FOR CONTROLLING A LITHOGRAPHIC APPARATUS AND ASSOCIATED APPARATUSES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.11.2021 Database last updated on 15.06.2024 | |
| Former | The application has been published Status updated on 11.12.2020 | Most recent event Tooltip | 19.11.2021 | Application deemed to be withdrawn | published on 22.12.2021 [2021/51] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2021/02] | Inventor(s) | 01 /
STAALS, Frank P.O. Box 324 5500 AH Veldhoven / NL | 02 /
VAN GORP, Simon Hendrik Celine P.O. Box 324 5500 AH Veldhoven / NL | [2021/02] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2021/02] | Application number, filing date | 19185785.3 | 11.07.2019 | [2021/02] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3764164 | Date: | 13.01.2021 | Language: | EN | [2021/02] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 05.02.2020 | Classification | IPC: | G03F7/20 | [2021/02] | CPC: |
G03F7/70483 (EP);
G03F7/70525 (EP);
G03F7/70625 (EP);
G03F7/70633 (EP);
G03F7/70641 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/02] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | VERFAHREN ZUR STEUERUNG EINER LITHOGRAFISCHEN VORRICHTUNG UND ZUGEHÖRIGE VORRICHTUNGEN | [2021/02] | English: | METHOD FOR CONTROLLING A LITHOGRAPHIC APPARATUS AND ASSOCIATED APPARATUSES | [2021/02] | French: | PROCÉDÉ DE COMMANDE D'UN APPAREIL LITHOGRAPHIQUE ET APPAREILS ASSOCIÉS | [2021/02] | Examination procedure | 14.07.2021 | Application deemed to be withdrawn, date of legal effect [2021/51] | 03.08.2021 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2021/51] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.07.2021 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]WO2019110261 (ASML NETHERLANDS BV [NL]) [X] 1-11,14 * paragraphs [0044] - [0061]; figure 6 * [I] 12,13,15; | [A]WO2016142169 (ASML NETHERLANDS BV [NL]) [A] 1-15 * paragraphs [0039] - [0041]; figures 6,7 *; | [A]EP3291007 (ASML NETHERLANDS BV [NL]) [A] 1-15 * paragraphs [0091] - [0093] * | by applicant | US2006033921 | US2010201963 | US2006066855 | WO2009078708 | WO2009106279 | US2011027704 | US2011043791 | US2011102753 | US2012044470 | US2012123581 | US2013258310 | US2013271740 | WO2013178422 | WO2009148976 |