EP3834285 - PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS [Right-click to bookmark this link] | Status | Grant of patent is intended Status updated on 28.07.2024 Database last updated on 22.08.2024 | |
Former | Request for examination was made Status updated on 14.05.2021 | ||
Former | The international publication has been made Status updated on 15.02.2020 | Most recent event Tooltip | 28.07.2024 | New entry: Communication of intention to grant a patent | Applicant(s) | For all designated states Eagle Harbor Technologies, Inc. 169 Western Ave. W. Suite 263 Seattle, WA 98119 / US | [2021/24] | Inventor(s) | 01 /
SLOBODOV, Ilia c/o EAGLE HARBOR TECHNOLOGIES, INC. 169 Western Ave W, Suite 263 Seattle, Washington 98119 / US | 02 /
ZIEMBA, Timothy c/o EAGLE HARBOR TECHNOLOGIES, INC. 169 Western Ave W, Suite 263 Seattle, Washington 98119 / US | 03 /
MILLER, Kenneth c/o EAGLE HARBOR TECHNOLOGIES, INC. 169 Western Ave W, Suite 263 Seattle, Washington 98119 / US | 04 /
PRAGER, James c/o EAGLE HARBOR TECHNOLOGIES, INC. 169 Western Ave W, Suite 263 Seattle, Washington 98119 / US | [2021/24] | Representative(s) | Haseltine Lake Kempner LLP One Portwall Square Portwall Lane Bristol BS1 6BH / GB | [N/P] |
Former [2021/24] | Haseltine Lake Kempner LLP Redcliff Quay 120 Redcliff Street Bristol BS1 6HU / GB | Application number, filing date | 19848258.0 | 09.08.2019 | [2021/24] | WO2019US46067 | Priority number, date | US201862717523P | 10.08.2018 Original published format: US 201862717523 P | US201862774078P | 30.11.2018 Original published format: US 201862774078 P | US201962789523P | 08.01.2019 Original published format: US 201962789523 P | US201962789526P | 08.01.2019 Original published format: US 201962789526 P | [2021/24] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2020033931 | Date: | 13.02.2020 | Language: | EN | [2020/07] | Type: | A1 Application with search report | No.: | EP3834285 | Date: | 16.06.2021 | Language: | EN | The application published by WIPO in one of the EPO official languages on 13.02.2020 takes the place of the publication of the European patent application. | [2021/24] | Search report(s) | International search report - published on: | US | 13.02.2020 | (Supplementary) European search report - dispatched on: | EP | 15.06.2022 | Classification | IPC: | H01J37/32, H03K3/53, H03K3/57, H02M3/335, H02M3/00, // H02M1/088 | [2024/29] | CPC: |
H01J37/32128 (EP,KR,US);
H01J37/32431 (EP,KR,US);
H02M3/01 (EP,KR);
H02M3/33571 (EP,KR);
H02M3/33573 (EP,KR);
H03K3/53 (EP);
|
Former IPC [2022/29] | H01J37/32, H03K3/53, H03K3/57, H02M3/335 | ||
Former IPC [2021/24] | H03K3/57 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/24] | Title | German: | PLASMAMANTELSTEUERUNG FÜR HF-PLASMAREAKTOREN | [2021/24] | English: | PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS | [2021/24] | French: | COMMANDE DE GAINE DE PLASMA POUR RÉACTEURS À PLASMA RF | [2021/24] | Entry into regional phase | 11.01.2021 | National basic fee paid | 11.01.2021 | Search fee paid | 11.01.2021 | Designation fee(s) paid | 11.01.2021 | Examination fee paid | Examination procedure | 11.01.2021 | Examination requested [2021/24] | 09.01.2023 | Amendment by applicant (claims and/or description) | 29.07.2024 | Communication of intention to grant the patent | Fees paid | Renewal fee | 22.11.2021 | Renewal fee patent year 03 | 31.08.2022 | Renewal fee patent year 04 | 25.08.2023 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.08.2021 | 03   M06   Fee paid on   22.11.2021 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]US5656123 (SALIMIAN SIAMAK [US], et al) [Y] 4 * ; figures 1 and 2; column 5, line 37-65; column 6, lines 19-45. *; | [XY]US6059935 (SPENCE PAUL D [US]) [X] 1, 6 * ; figures 7-9; column 4, line 37-54; column 8, line 31-46; column 9, line 16- column 10, line 44; column 11, line 17- column 12, line 28. * [Y] 2-5, 7; | [Y]US6238387 (MILLER III SCOTT A [US]) [Y] 3, 5 * ; figure 6; column 11, lines 24-51. *; | [Y]US8575843 (MOORE CAMERON A [US], et al) [Y] 2 * ; figures 14 and 15; column 17, line 39-column 19, line 2. *; | [Y]US2017366173 (MILLER KENNETH E [US], et al) [Y] 7* ; figures 12-14D; paragraphs [0044, 0045, 0073, 0078, 0079]. * |