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Extract from the Register of European Patents

EP About this file: EP3834285

EP3834285 - PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS [Right-click to bookmark this link]
StatusGrant of patent is intended
Status updated on  28.07.2024
Database last updated on 22.08.2024
FormerRequest for examination was made
Status updated on  14.05.2021
FormerThe international publication has been made
Status updated on  15.02.2020
Most recent event   Tooltip28.07.2024New entry: Communication of intention to grant a patent 
Applicant(s)For all designated states
Eagle Harbor Technologies, Inc.
169 Western Ave. W.
Suite 263
Seattle, WA 98119 / US
[2021/24]
Inventor(s)01 / SLOBODOV, Ilia
c/o EAGLE HARBOR TECHNOLOGIES, INC.
169 Western Ave W, Suite 263
Seattle, Washington 98119 / US
02 / ZIEMBA, Timothy
c/o EAGLE HARBOR TECHNOLOGIES, INC.
169 Western Ave W, Suite 263
Seattle, Washington 98119 / US
03 / MILLER, Kenneth
c/o EAGLE HARBOR TECHNOLOGIES, INC.
169 Western Ave W, Suite 263
Seattle, Washington 98119 / US
04 / PRAGER, James
c/o EAGLE HARBOR TECHNOLOGIES, INC.
169 Western Ave W, Suite 263
Seattle, Washington 98119 / US
 [2021/24]
Representative(s)Haseltine Lake Kempner LLP
One Portwall Square
Portwall Lane
Bristol BS1 6BH / GB
[N/P]
Former [2021/24]Haseltine Lake Kempner LLP
Redcliff Quay
120 Redcliff Street
Bristol BS1 6HU / GB
Application number, filing date19848258.009.08.2019
[2021/24]
WO2019US46067
Priority number, dateUS201862717523P10.08.2018         Original published format: US 201862717523 P
US201862774078P30.11.2018         Original published format: US 201862774078 P
US201962789523P08.01.2019         Original published format: US 201962789523 P
US201962789526P08.01.2019         Original published format: US 201962789526 P
[2021/24]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2020033931
Date:13.02.2020
Language:EN
[2020/07]
Type: A1 Application with search report 
No.:EP3834285
Date:16.06.2021
Language:EN
The application published by WIPO in one of the EPO official languages on 13.02.2020 takes the place of the publication of the European patent application.
[2021/24]
Search report(s)International search report - published on:US13.02.2020
(Supplementary) European search report - dispatched on:EP15.06.2022
ClassificationIPC:H01J37/32, H03K3/53, H03K3/57, H02M3/335, H02M3/00, // H02M1/088
[2024/29]
CPC:
H01J37/32128 (EP,KR,US); H01J37/32431 (EP,KR,US); H02M3/01 (EP,KR);
H02M3/33571 (EP,KR); H02M3/33573 (EP,KR); H03K3/53 (EP);
H03K3/57 (EP,KR); H02M1/088 (EP,KR) (-)
Former IPC [2022/29]H01J37/32, H03K3/53, H03K3/57, H02M3/335
Former IPC [2021/24]H03K3/57
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2021/24]
TitleGerman:PLASMAMANTELSTEUERUNG FÜR HF-PLASMAREAKTOREN[2021/24]
English:PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS[2021/24]
French:COMMANDE DE GAINE DE PLASMA POUR RÉACTEURS À PLASMA RF[2021/24]
Entry into regional phase11.01.2021National basic fee paid 
11.01.2021Search fee paid 
11.01.2021Designation fee(s) paid 
11.01.2021Examination fee paid 
Examination procedure11.01.2021Examination requested  [2021/24]
09.01.2023Amendment by applicant (claims and/or description)
29.07.2024Communication of intention to grant the patent
Fees paidRenewal fee
22.11.2021Renewal fee patent year 03
31.08.2022Renewal fee patent year 04
25.08.2023Renewal fee patent year 05
Penalty fee
Additional fee for renewal fee
31.08.202103   M06   Fee paid on   22.11.2021
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[Y]US5656123  (SALIMIAN SIAMAK [US], et al) [Y] 4 * ; figures 1 and 2; column 5, line 37-65; column 6, lines 19-45. *;
 [XY]US6059935  (SPENCE PAUL D [US]) [X] 1, 6 * ; figures 7-9; column 4, line 37-54; column 8, line 31-46; column 9, line 16- column 10, line 44; column 11, line 17- column 12, line 28. * [Y] 2-5, 7;
 [Y]US6238387  (MILLER III SCOTT A [US]) [Y] 3, 5 * ; figure 6; column 11, lines 24-51. *;
 [Y]US8575843  (MOORE CAMERON A [US], et al) [Y] 2 * ; figures 14 and 15; column 17, line 39-column 19, line 2. *;
 [Y]US2017366173  (MILLER KENNETH E [US], et al) [Y] 7* ; figures 12-14D; paragraphs [0044, 0045, 0073, 0078, 0079]. *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.