EP3827110 - AXISYMMETRIC MATERIAL DEPOSITION FROM PLASMA ASSISTED BY ANGLED GAS FLOW [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 24.02.2023 Database last updated on 03.09.2024 | |
Former | Request for examination was made Status updated on 30.04.2021 | ||
Former | The international publication has been made Status updated on 24.04.2020 | Most recent event Tooltip | 24.02.2023 | Application deemed to be withdrawn | published on 29.03.2023 [2023/13] | Applicant(s) | For all designated states Diamond Foundry Inc. 965 Terminal Way San Carlos, CA 94070 / US | [2021/22] | Inventor(s) | 01 /
SCHOLZ, Jeremy c/o Diamond Foundry Inc. 965 Terminal Way San Carlos, California 94070 / US | [2021/22] | Representative(s) | FRKelly Waterways House Grand Canal Quay Dublin D02 PD39 / IE | [N/P] |
Former [2021/22] | FRKelly 27 Clyde Road Dublin D04 F838 / IE | Application number, filing date | 19874180.3 | 25.09.2019 | [2021/22] | WO2019US52855 | Priority number, date | US201816163969 | 18.10.2018 Original published format: US201816163969 | [2021/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2020081203 | Date: | 23.04.2020 | Language: | EN | [2020/17] | Type: | A1 Application with search report | No.: | EP3827110 | Date: | 02.06.2021 | Language: | EN | The application published by WIPO in one of the EPO official languages on 23.04.2020 takes the place of the publication of the European patent application. | [2021/22] | Search report(s) | International search report - published on: | US | 23.04.2020 | (Supplementary) European search report - dispatched on: | EP | 17.03.2022 | Classification | IPC: | C23C16/27, H01J37/32, C23C16/455, C23C16/511, C30B25/10, C30B29/04 | [2022/16] | CPC: |
C23C16/511 (EP);
C23C16/274 (US);
C23C16/45502 (EP);
C23C16/45563 (EP,US);
C23C16/45589 (US);
C30B25/105 (EP);
C30B25/186 (US);
C30B25/20 (US);
C30B29/04 (EP,US);
|
Former IPC [2021/22] | C23C16/27, H01J37/32 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/22] | Title | German: | AXISYMMETRISCHE MATERIALABSCHEIDUNG AUS PLASMA MIT UNTERSTÜTZUNG DURCH EINEN ABGEWINKELTEN GASSTROM | [2021/22] | English: | AXISYMMETRIC MATERIAL DEPOSITION FROM PLASMA ASSISTED BY ANGLED GAS FLOW | [2021/22] | French: | DÉPÔT DE MATÉRIAU AXISYMÉTRIQUE À PARTIR D'UN PLASMA ASSISTÉ PAR FLUX DE GAZ ORIENTÉ | [2021/22] | Entry into regional phase | 25.02.2021 | National basic fee paid | 25.02.2021 | Search fee paid | 25.02.2021 | Designation fee(s) paid | 25.02.2021 | Examination fee paid | Examination procedure | 25.02.2021 | Amendment by applicant (claims and/or description) | 25.02.2021 | Examination requested [2021/22] | 18.10.2022 | Application deemed to be withdrawn, date of legal effect [2023/13] | 08.11.2022 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2023/13] | Fees paid | Renewal fee | 31.08.2021 | Renewal fee patent year 03 | 19.07.2022 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US2005000429 (NEUBERGER WOLFGANG [MY], et al) [X] 1,8,9,13,15* paragraphs [0022] , [0042] , [0044] , [0045] , [0047]; figures 1,2,6 * | International search | [YA]US6645343 (WILD CHRISTOF [DE], et al) [Y] 23, 24 * , col 4 Ins 6-14, 52-60 *[A] 14, 15; | [YA]US2014230729 (BRANDON JOHN ROBERT [GB], et al) [Y] 19-21 * , paras [0072], [0082]. [0103] * [A] 14, 15; | [XYA]US2015030786 (COE STEVEN EDWARD [GB], et al) [X] 1-9, 12, 13, 16-18, 22 * , FIGS. 1; para [0026], [0036], [0041], [0049], [0056], [0059]. [0062]-[0065], [0068], [0091] * [Y] 10, 11, 19-21, 23, 24 [A] 14, 15; | [YA]US9017481 (PETTINGER FRED [US], et al) [Y] 10 * , col. 4 49-55, col. 5 Ins 4-11 * [A] 14, 15; | [YA]US2016163513 (LUBOMIRSKY DMITRY [US]) [Y] 11 * , paras [0026], [0037]. [0054] * [A] 14, 15 |