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EP3886138
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EP About this file: EP3886138
| EP3886138 - FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 05.08.2022 Database last updated on 15.06.2024 | |
| Former | The application has been published Status updated on 27.08.2021 | Most recent event Tooltip | 05.08.2022 | Application deemed to be withdrawn | published on 07.09.2022 [2022/36] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2021/39] | Inventor(s) | 01 /
VAN SOEST, Jurgen P.O. Box 324 5500 AH Veldhoven / NL | 02 /
BERGLUND, Gun Sara Mari P.O. Box P.O. Box 324 5500 AH Veldhoven / NL | 03 /
HUANG FOEN CHUNG, Robert Wong Joek Meu P.O. Box P.O. Box 324 5500 AH Veldhoven / NL | 04 /
MARTINEZ NEGRETE GASQUE, Diego P.O. Box 324 5500 AH Veldhoven / NL | 05 /
DINU GURTLER, Laura P.O. Box P.O. Box 324 5500 AH Veldhoven / NL | [2021/39] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2021/39] | Application number, filing date | 20165312.8 | 24.03.2020 | [2021/39] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP3886138 | Date: | 29.09.2021 | Language: | EN | [2021/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.09.2020 | Classification | IPC: | H01J37/02, H01J37/28 | [2021/39] | CPC: |
H01J37/28 (EP);
H01J37/026 (EP);
H01J2237/0044 (EP);
H01J2237/0048 (EP);
H01J2237/061 (EP);
H01J2237/2817 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/39] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | FLUTSÄULE, WERKZEUG FÜR GELADENE TEILCHEN UND VERFAHREN ZUM FLUTEN EINER PROBE MIT GELADENEN TEILCHEN | [2021/39] | English: | FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE | [2021/39] | French: | COLONNE D'INONDATION, OUTIL DE PARTICULES CHARGÉES ET PROCÉDÉ D'INONDATION DE PARTICULES CHARGÉES D'UN ÉCHANTILLON | [2021/39] | Examination procedure | 30.03.2022 | Application deemed to be withdrawn, date of legal effect [2022/36] | 21.04.2022 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2022/36] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.03.2022 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [I]US7488938 (GUBBENS ALEXANDER JOZEF [US], et al) [I] 1-10,15 * column 2, line 50 - column 3, line 4; figure 1 * * column 3, line 67 - column 4; figure 2 *; | [Y]WO2019025188 (ASML NETHERLANDS BV [NL], et al) [Y] 1-15 * paragraphs [0007] - [0011] - [0032] - [0043] - [0046] - [0064] - [0070] - [0083]; figure - *; | [Y]EP3370247 (FEI CO [US]) [Y] 1-15 * paragraph [0020]; figures 1, 2a; claim 1 * | [Y] - SAITO K ET AL, "A 100-kV, 100-A/cm/sup 2/ electron optical system for the EB-X3 X-ray mask writer", MICROPROCESSES AND NANOTECHNOLOGY CONFERENCE, 2000 INTERNATIONAL JULY 11-13, 2000, PISCATAWAY, NJ, USA,IEEE, (20000711), doi:10.1109/IMNC.2000.872682, ISBN 978-4-89114-004-5, pages 166 - 167, XP032400504 [Y] 1-15 * the whole document * DOI: http://dx.doi.org/10.1109/IMNC.2000.872682 |