EP3764390 - METHOD OF FORMING SPACERS OF A TRANSISTOR [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 06.09.2024 Database last updated on 09.09.2024 | |
Former | The patent has been granted Status updated on 29.09.2023 | ||
Former | Grant of patent is intended Status updated on 23.05.2023 | ||
Former | Request for examination was made Status updated on 11.12.2020 | Most recent event Tooltip | 06.09.2024 | No opposition filed within time limit | published on 09.10.2024 [2024/41] | Applicant(s) | For all designated states Commissariat à l'Energie Atomique et aux Energies Alternatives Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | For all designated states Centre National de la Recherche Scientifique 3, rue Michel-Ange 75016 Paris / FR | For all designated states Université Grenoble Alpes 621 avenue Centrale 38400 Saint-Martin-d'Hères / FR | [2023/44] |
Former [2021/02] | For all designated states Commissariat à l'Energie Atomique et aux Energies Alternatives Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | ||
For all designated states Centre National de la Recherche Scientifique 3 rue Michel-Ange 75016 Paris / FR | |||
For all designated states Université Grenoble Alpes 621 avenue Centrale 38400 Saint-Martin-d'Hères / FR | Inventor(s) | 01 /
POSSEME, Nicolas CEA GRENOBLE 17 rue des Martyrs 38054 GRENOBLE Cedex 9 / FR | 02 /
BONVALOT, Marceline 8 Allée du Gatier 38320 EYBENS / FR | 03 /
CHAKER, Ahmad 7 Rue Adrien Ricard 38000 GRENOBLE / FR | 04 /
VALLEE, Christophe 50 Rue du Martel 38660 LE TOUVET / FR | [2021/02] | Representative(s) | Hautier IP 20, rue de la Liberté 06000 Nice / FR | [N/P] |
Former [2021/02] | Hautier, Nicolas Cabinet Hautier 20, rue de la Liberté 06000 Nice / FR | Application number, filing date | 20185199.5 | 10.07.2020 | [2021/02] | Priority number, date | FR20190007836 | 11.07.2019 Original published format: FR 1907836 | [2021/02] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | EP3764390 | Date: | 13.01.2021 | Language: | FR | [2021/02] | Type: | B1 Patent specification | No.: | EP3764390 | Date: | 01.11.2023 | Language: | FR | [2023/44] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 07.12.2020 | Classification | IPC: | H01L21/311, H01L29/66 | [2021/02] | CPC: |
H01L21/31116 (EP);
H01L21/28123 (US);
H01L21/02112 (US);
H01L21/02126 (US);
H01L21/02164 (US);
H01L21/02167 (US);
H01L21/0217 (US);
H01L21/02274 (US);
H01L21/0228 (US);
H01L21/31111 (US);
H01L21/31155 (US);
H01L29/6653 (US);
H01L29/6656 (US);
H01L29/66795 (EP);
H01L29/0649 (US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2021/02] | Title | German: | VERFAHREN ZUR BILDUNG VON ABSTANDHALTERN FÜR EINEN TRANSISTOR | [2021/02] | English: | METHOD OF FORMING SPACERS OF A TRANSISTOR | [2021/02] | French: | PROCÉDÉ DE FORMATION D'ESPACEURS D'UN TRANSISTOR | [2021/02] | Examination procedure | 10.07.2020 | Examination requested [2021/02] | 07.07.2021 | Amendment by applicant (claims and/or description) | 24.05.2023 | Communication of intention to grant the patent | 20.09.2023 | Fee for grant paid | 20.09.2023 | Fee for publishing/printing paid | 20.09.2023 | Receipt of the translation of the claim(s) | Opposition(s) | 02.08.2024 | No opposition filed within time limit [2024/41] | Fees paid | Renewal fee | 19.07.2022 | Renewal fee patent year 03 | 21.07.2023 | Renewal fee patent year 04 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 01.11.2023 | CZ | 01.11.2023 | DK | 01.11.2023 | EE | 01.11.2023 | ES | 01.11.2023 | HR | 01.11.2023 | IT | 01.11.2023 | LT | 01.11.2023 | LV | 01.11.2023 | NL | 01.11.2023 | PL | 01.11.2023 | RS | 01.11.2023 | SE | 01.11.2023 | SK | 01.11.2023 | SM | 01.11.2023 | BG | 01.02.2024 | NO | 01.02.2024 | GR | 02.02.2024 | IS | 01.03.2024 | PT | 01.03.2024 | [2024/36] |
Former [2024/35] | AT | 01.11.2023 | |
CZ | 01.11.2023 | ||
DK | 01.11.2023 | ||
EE | 01.11.2023 | ||
ES | 01.11.2023 | ||
HR | 01.11.2023 | ||
LT | 01.11.2023 | ||
LV | 01.11.2023 | ||
NL | 01.11.2023 | ||
PL | 01.11.2023 | ||
RS | 01.11.2023 | ||
SE | 01.11.2023 | ||
SM | 01.11.2023 | ||
BG | 01.02.2024 | ||
NO | 01.02.2024 | ||
GR | 02.02.2024 | ||
IS | 01.03.2024 | ||
PT | 01.03.2024 | ||
Former [2024/34] | AT | 01.11.2023 | |
DK | 01.11.2023 | ||
EE | 01.11.2023 | ||
ES | 01.11.2023 | ||
HR | 01.11.2023 | ||
LT | 01.11.2023 | ||
LV | 01.11.2023 | ||
NL | 01.11.2023 | ||
PL | 01.11.2023 | ||
RS | 01.11.2023 | ||
SE | 01.11.2023 | ||
SM | 01.11.2023 | ||
BG | 01.02.2024 | ||
NO | 01.02.2024 | ||
GR | 02.02.2024 | ||
IS | 01.03.2024 | ||
PT | 01.03.2024 | ||
Former [2024/33] | AT | 01.11.2023 | |
DK | 01.11.2023 | ||
ES | 01.11.2023 | ||
HR | 01.11.2023 | ||
LT | 01.11.2023 | ||
LV | 01.11.2023 | ||
NL | 01.11.2023 | ||
PL | 01.11.2023 | ||
RS | 01.11.2023 | ||
SE | 01.11.2023 | ||
SM | 01.11.2023 | ||
BG | 01.02.2024 | ||
NO | 01.02.2024 | ||
GR | 02.02.2024 | ||
IS | 01.03.2024 | ||
PT | 01.03.2024 | ||
Former [2024/26] | AT | 01.11.2023 | |
ES | 01.11.2023 | ||
HR | 01.11.2023 | ||
LT | 01.11.2023 | ||
LV | 01.11.2023 | ||
NL | 01.11.2023 | ||
PL | 01.11.2023 | ||
RS | 01.11.2023 | ||
SE | 01.11.2023 | ||
BG | 01.02.2024 | ||
NO | 01.02.2024 | ||
GR | 02.02.2024 | ||
IS | 01.03.2024 | ||
PT | 01.03.2024 | ||
Former [2024/23] | AT | 01.11.2023 | |
ES | 01.11.2023 | ||
LT | 01.11.2023 | ||
NL | 01.11.2023 | ||
BG | 01.02.2024 | ||
GR | 02.02.2024 | ||
IS | 01.03.2024 | ||
PT | 01.03.2024 | ||
Former [2024/21] | LT | 01.11.2023 | |
NL | 01.11.2023 | ||
BG | 01.02.2024 | ||
GR | 02.02.2024 | ||
IS | 01.03.2024 | ||
Former [2024/20] | GR | 02.02.2024 | |
IS | 01.03.2024 | Documents cited: | Search | [A]EP2876677 (COMMISSARIAT ENERGIE ATOMIQUE [FR]) [A] 1-15* figure - *; | [A]EP3174092 (COMMISSARIAT L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES [FR]) [A] 1-15 * the whole document * | by applicant | FR3000601 | FR3023971 |