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Extract from the Register of European Patents

EP About this file: EP3938841

EP3938841 - A METHOD AND APPARATUS FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  23.02.2024
Database last updated on 12.10.2024
FormerThe patent has been granted
Status updated on  17.03.2023
FormerGrant of patent is intended
Status updated on  21.11.2022
FormerRequest for examination was made
Status updated on  17.12.2021
FormerThe international publication has been made
Status updated on  18.09.2020
Formerunknown
Status updated on  15.02.2020
Most recent event   Tooltip03.10.2024Lapse of the patent in a contracting state
New state(s): MC		published on 06.11.2024 [2024/45]
Applicant(s)For all designated states
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven / NL
[2022/03]
Inventor(s)01 / AKHSSAY, Mhamed
P.O. Box 324
5500 AH Veldhoven / NL
02 / VAN BOKHOVEN, Laurentius, Johannes, Adrianus
P.O. Box 324
5500 AH Veldhoven / NL
 [2023/16]
Former [2022/03]01 / AKHSSAY, Mhamed
5500 AH Veldhoven / NL
02 / VAN BOKHOVEN, Laurentius, Johannes, Adrianus
5500 AH Veldhoven / NL
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[2022/03]
Application number, filing date20703250.910.02.2020
[2022/03]
WO2020EP53292
Priority number, dateEP2019016215412.03.2019         Original published format: EP 19162154
EP2019016460722.03.2019         Original published format: EP 19164607
[2022/03]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2020182386
Date:17.09.2020
Language:EN
[2020/38]
Type: A1 Application with search report 
No.:EP3938841
Date:19.01.2022
Language:EN
The application published by WIPO in one of the EPO official languages on 17.09.2020 takes the place of the publication of the European patent application.
[2022/03]
Type: B1 Patent specification 
No.:EP3938841
Date:19.04.2023
Language:EN
[2023/16]
Search report(s)International search report - published on:EP17.09.2020
ClassificationIPC:G03F7/20
[2022/03]
CPC:
G03F7/70891 (EP,IL,KR,US); G03F7/705 (EP,IL,KR); G03F7/706 (IL,US);
G03F7/70258 (EP,IL,KR); G03F7/70504 (US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2022/03]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:VERFAHREN UND SYSTEM ZUR VORHERSAGE VON ABERRATIONEN IN EINEM PROJEKTIONSSYSTEM[2022/03]
English:A METHOD AND APPARATUS FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM[2022/03]
French:PROCÉDÉ ET APPAREIL DE PRÉDICTION D'ABERRATIONS DANS UN SYSTÈME DE PROJECTION[2022/03]
Entry into regional phase03.08.2021National basic fee paid 
03.08.2021Designation fee(s) paid 
03.08.2021Examination fee paid 
Examination procedure03.08.2021Examination requested  [2022/03]
03.08.2021Date on which the examining division has become responsible
22.11.2022Communication of intention to grant the patent
08.03.2023Fee for grant paid
08.03.2023Fee for publishing/printing paid
08.03.2023Receipt of the translation of the claim(s)
Opposition(s)22.01.2024No opposition filed within time limit [2024/13]
Fees paidRenewal fee
24.02.2022Renewal fee patent year 03
23.02.2023Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAL19.04.2023
AT19.04.2023
CZ19.04.2023
DK19.04.2023
EE19.04.2023
ES19.04.2023
FI19.04.2023
HR19.04.2023
IT19.04.2023
LT19.04.2023
LV19.04.2023
MC19.04.2023
NL19.04.2023
PL19.04.2023
RO19.04.2023
RS19.04.2023
SE19.04.2023
SI19.04.2023
SK19.04.2023
SM19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
[2024/45]
Former [2024/26]AL19.04.2023
AT19.04.2023
CZ19.04.2023
DK19.04.2023
EE19.04.2023
ES19.04.2023
FI19.04.2023
HR19.04.2023
IT19.04.2023
LT19.04.2023
LV19.04.2023
NL19.04.2023
PL19.04.2023
RO19.04.2023
RS19.04.2023
SE19.04.2023
SI19.04.2023
SK19.04.2023
SM19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2024/10]AL19.04.2023
AT19.04.2023
CZ19.04.2023
DK19.04.2023
EE19.04.2023
ES19.04.2023
FI19.04.2023
HR19.04.2023
LT19.04.2023
LV19.04.2023
NL19.04.2023
PL19.04.2023
RO19.04.2023
RS19.04.2023
SE19.04.2023
SK19.04.2023
SM19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2024/08]AL19.04.2023
AT19.04.2023
ES19.04.2023
FI19.04.2023
HR19.04.2023
LT19.04.2023
LV19.04.2023
NL19.04.2023
PL19.04.2023
RS19.04.2023
SE19.04.2023
SK19.04.2023
SM19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2024/03]AL19.04.2023
AT19.04.2023
ES19.04.2023
FI19.04.2023
HR19.04.2023
LT19.04.2023
LV19.04.2023
NL19.04.2023
PL19.04.2023
RS19.04.2023
SE19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2024/01]AL19.04.2023
AT19.04.2023
ES19.04.2023
HR19.04.2023
LT19.04.2023
LV19.04.2023
NL19.04.2023
PL19.04.2023
RS19.04.2023
SE19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2023/51]AL19.04.2023
AT19.04.2023
ES19.04.2023
HR19.04.2023
NL19.04.2023
PL19.04.2023
RS19.04.2023
SE19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2023/50]AL19.04.2023
AT19.04.2023
ES19.04.2023
NL19.04.2023
PL19.04.2023
SE19.04.2023
NO19.07.2023
GR20.07.2023
IS19.08.2023
PT21.08.2023
Former [2023/48]AT19.04.2023
ES19.04.2023
NL19.04.2023
SE19.04.2023
NO19.07.2023
PT21.08.2023
Former [2023/46]ES19.04.2023
NL19.04.2023
PT21.08.2023
Former [2023/43]NL19.04.2023
Cited inInternational search[A]EP1513017  (ASML NETHERLANDS BV [NL]);
 [A]WO2018184783  (ASML NETHERLANDS BV [NL]);
by applicantUS2013050674
 WO2013056941
 WO2017207512
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.