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Extract from the Register of European Patents

EP About this file: EP3946748

EP3946748 - A FLUID HANDLING STRUCTURE AND METHOD FOR A GAS PHASE DEPOSITION APPARATUS [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  07.01.2022
Database last updated on 30.10.2024
FormerThe international publication has been made
Status updated on  02.10.2020
Formerunknown
Status updated on  07.04.2020
Most recent event   Tooltip28.03.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Anna van Buerenplein 1
2595 DA 's-Gravenhage / NL
[2022/06]
Inventor(s)01 / OLIESLAGERS, Ruud
c/o TNO
IP & Contracting Anna van Buerenplein 1
2595 DA 's-Gravenhage / NL
02 / SMELTINK, Jeroen Anthonius
c/o TNO
IP & Contracting Anna van Buerenplein 1
2595 DA 's-Gravenhage / NL
[N/P]
Former [2022/06]01 / OLIESLAGERS, Ruud
2595 DA 's-Gravenhage / NL
02 / SMELTINK, Jeroen Anthonius
2595 DA 's-Gravenhage / NL
Representative(s)V.O.
P.O. Box 87930
2508 DH Den Haag / NL
[2022/06]
Application number, filing date20714718.224.03.2020
[2022/06]
WO2020NL50196
Priority number, dateEP2019016520726.03.2019         Original published format: EP 19165207
[2022/06]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2020197387
Date:01.10.2020
Language:EN
[2020/40]
Type: A1 Application with search report 
No.:EP3946748
Date:09.02.2022
Language:EN
The application published by WIPO in one of the EPO official languages on 01.10.2020 takes the place of the publication of the European patent application.
[2022/06]
Search report(s)International search report - published on:EP01.10.2020
ClassificationIPC:B05B1/26, B05B7/00, C23C16/455
[2022/06]
CPC:
B05B7/0012 (EP,KR); B05B1/267 (EP,KR); C23C16/45578 (US);
C23C16/45502 (EP,KR); C23C16/45551 (EP,KR); C23C16/45557 (US);
C23C16/45563 (EP,KR) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2022/06]
TitleGerman:FLUIDHANDHABUNGSSTRUKTUR UND VERFAHREN FÜR EINE GASPHASENABSCHEIDUNGSVORRICHTUNG[2022/06]
English:A FLUID HANDLING STRUCTURE AND METHOD FOR A GAS PHASE DEPOSITION APPARATUS[2022/06]
French:STRUCTURE DE MANIPULATION DE FLUIDE ET PROCÉDÉ POUR UN APPAREIL DE DÉPÔT EN PHASE GAZEUSE[2022/06]
Entry into regional phase29.09.2021National basic fee paid 
29.09.2021Designation fee(s) paid 
29.09.2021Examination fee paid 
Examination procedure29.09.2021Amendment by applicant (claims and/or description)
29.09.2021Examination requested  [2022/06]
29.09.2021Date on which the examining division has become responsible
Fees paidRenewal fee
25.03.2022Renewal fee patent year 03
23.03.2023Renewal fee patent year 04
27.03.2024Renewal fee patent year 05
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[A]EP0377311  (PROTEC EQUIPMENT COMPANY LIMIT [GB]) [A] 1 * figure 1 *;
 [IA]US2010116210  (KATO HITOSHI [JP], et al) [I] 1-7,11-13,15 * figures 7, 8, 9 * * paragraph [0076] * * paragraph [0079] - paragraph [0080] * * paragraph [0087] - paragraph [0088] * * paragraph [0090] * [A] 8-10,14;
 [A]EP3214205  (TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP [JP]) [A] 1,12 * figure 2 * * paragraph [0036] - paragraph [0042] *;
 [A]US2018216227  (MAZLOUT LAZHAR [US]) [A] 1,2,8-12,14,15 * figures 1, 3, 4 * * paragraph [0021] - paragraph [0022] * * paragraph [0025] - paragraph [0026] * * paragraph [0033] - paragraph [0034] *;
 [A]  - ANUJ SHUKLA ET AL, "Flow and thermal characteristics of jet impingement: comprehensive review", INTERNATIONAL JOURNEY OF HEAT AND TECHNOLOGY, (20170330), vol. 35, no. 1, doi:10.18280/ijht.350121, ISSN 0392-8764, pages 153 - 166, XP055626734 [A] 8-11,14 * figure 2 * * 6. COMPUTATIONAL DOMAIN AND BOUNDARY CONDITIONS; page 160 - page 161 *

DOI:   http://dx.doi.org/10.18280/ijht.350121
 [T]  - BAYDAR E ET AL, "An experimental investigation on flow structures of confined and unconfined impinging air jets", HEAT AND MASS TRANSFER ; WÄRMEUND STOFFÜBERTRAGUNG, SPRINGER, BERLIN, DE, (20060201), vol. 42, no. 4, doi:10.1007/S00231-005-0021-6, ISSN 1432-1181, pages 338 - 346, XP019330432 [T] * the whole document *

DOI:   http://dx.doi.org/10.1007/s00231-005-0021-6
 [T]  - ALDABBAGH L B Y ET AL, "Effect of jet-to-plate spacing in laminar array jets impinging", HEAT AND MASS TRANSFER ; WÄRMEUND STOFFÜBERTRAGUNG, SPRINGER, BERLIN, DE, (20060315), vol. 43, no. 3, doi:10.1007/S00231-006-0109-7, ISSN 1432-1181, pages 265 - 273, XP019458432 [T] * the whole document *

DOI:   http://dx.doi.org/10.1007/s00231-006-0109-7
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.