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Extract from the Register of European Patents

EP About this file: EP3973566

EP3973566 - SIXNY AS A NUCLEATION LAYER FOR SICXOY [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  25.02.2022
Database last updated on 11.09.2024
FormerThe international publication has been made
Status updated on  27.11.2020
Most recent event   Tooltip28.05.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
Lam Research Corporation
4650 Cushing Parkway
Fremont, CA 94538 / US
[2022/13]
Inventor(s)01 / YUAN, Guangbi
15990 SW Catbird Lane
Beaverton, Oregon 97007 / US
02 / GONG, Bo
16003 SW Windrow Lane
Sherwood, Oregon 97140 / US
03 / NARKEVICIUTE, Ieva
1070 Fremont Street
Menlo Park, California 94025 / US
04 / VARADARAJAN, Bhadri
16675 SW Hart Road
Beaverton, Oregon 97007 / US
05 / LAI, Fengyuan
8900 SW Sweek Drive, Apt. 1727
Tualatin, Oregon 97062 / US
06 / MCKERROW, Andrew
2640 Palisades Crest Drive
Lake Oswego, Oregon 97034 / US
 [2022/13]
Representative(s)Mewburn Ellis LLP
Aurora Building
Counterslip
Bristol BS1 6BX / GB
[2022/13]
Application number, filing date20809415.105.05.2020
[2022/13]
WO2020US31516
Priority number, dateUS201962850343P20.05.2019         Original published format: US 201962850343 P
[2022/13]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2020236425
Date:26.11.2020
Language:EN
[2020/48]
Type: A1 Application with search report 
No.:EP3973566
Date:30.03.2022
Language:EN
The application published by WIPO in one of the EPO official languages on 26.11.2020 takes the place of the publication of the European patent application.
[2022/13]
Search report(s)International search report - published on:KR26.11.2020
(Supplementary) European search report - dispatched on:EP24.04.2023
ClassificationIPC:H01L21/02, C23C16/02, C23C16/32, C23C16/455, C23C16/46
[2023/21]
CPC:
H01L21/02126 (EP,CN,US); H01L21/02304 (EP,KR,US); H01L21/022 (CN,KR,US);
C23C16/45536 (EP,US); C23C16/0272 (EP,US); C23C16/30 (CN);
C23C16/325 (EP,KR,US); C23C16/345 (CN,KR,US); C23C16/466 (EP,US);
C23C16/50 (CN,KR,US); H01L21/02167 (EP,CN,US); H01L21/0217 (CN,KR,US);
H01L21/02274 (EP,CN,KR,US); H01L21/0228 (CN,US) (-)
Former IPC [2022/13]H01L21/02, C23C16/34, C23C16/32, C23C16/50
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2022/13]
TitleGerman:SIXNY ALS EINE NUKLEIERUNGSSCHICHT FÜR SICXOY[2022/13]
English:SIXNY AS A NUCLEATION LAYER FOR SICXOY[2022/13]
French:SIXNY UTILISÉ EN TANT QUE COUCHE DE NUCLÉATION POUR SICXOY[2022/13]
Entry into regional phase22.11.2021National basic fee paid 
22.11.2021Search fee paid 
22.11.2021Designation fee(s) paid 
22.11.2021Examination fee paid 
Examination procedure22.11.2021Examination requested  [2022/13]
17.11.2023Amendment by applicant (claims and/or description)
Fees paidRenewal fee
27.05.2022Renewal fee patent year 03
30.05.2023Renewal fee patent year 04
28.05.2024Renewal fee patent year 05
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competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XI]US6764952  (YU JENGYI [US], et al) [X] 1-5,7-15 * columns 3-7; figures 1-6 * [I] 6;
 [XI]US2006046479  (RAJAGOPALAN NAGARAJAN [US], et al) [X] 1-5,7-15 * paragraphs [0023] - [0125]; figure 3 *[I] 6
International search[A]US2013330935  (VARADARAJAN BHADRI [US])[A] 1-20;
 [A]KR101779097B  [A] 1-20;
 [A]US2018323055  (WOODRUFF JACOB HUFFMAN [US], et al) [A] 1-20;
 [A]JP2018182322  (LAM RES CORP) [A] 1-20;
 [A]WO2018213018  (ASM IP HOLDING BV [NL]) [A] 1-20
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.