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Extract from the Register of European Patents

EP About this file: EP3994719

EP3994719 - METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  24.05.2024
Database last updated on 22.08.2024
FormerRequest for examination was made
Status updated on  08.04.2022
FormerThe international publication has been made
Status updated on  15.01.2021
Most recent event   Tooltip24.05.2024Application deemed to be withdrawnpublished on 26.06.2024  [2024/26]
Applicant(s)For all designated states
Entegris, Inc.
129 Concord Road
Billerica, MA 01821 / US
[2022/19]
Inventor(s)01 / SCOGGINS, Troy
579 Wild Wood Drive
Decatur, Texas 76234 / US
 [2022/19]
Representative(s)Greaves Brewster LLP
Copa House
Station Road
Cheddar, Somerset BS27 3AH / GB
[2022/19]
Application number, filing date20834923.301.07.2020
[2022/19]
WO2020US40526
Priority number, dateUS201962869651P02.07.2019         Original published format: US 201962869651 P
[2022/19]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2021003288
Date:07.01.2021
Language:EN
[2021/01]
Type: A1 Application with search report 
No.:EP3994719
Date:11.05.2022
Language:EN
The application published by WIPO in one of the EPO official languages on 07.01.2021 takes the place of the publication of the European patent application.
[2022/19]
Search report(s)International search report - published on:KR07.01.2021
(Supplementary) European search report - dispatched on:EP30.06.2023
ClassificationIPC:B23K26/36, B08B3/12, B08B7/00, B23K26/362, B23K103/00
[2023/31]
CPC:
B23K26/362 (EP,CN,KR); B08B7/0042 (EP,CN,KR,US); B23K26/40 (KR,US);
B08B3/12 (EP); B08B7/028 (KR,US); B23K26/1224 (KR,US);
H01J37/32862 (CN); H01L21/02098 (KR,US); H01L21/67069 (KR);
B23K2103/52 (EP,CN,KR); B23K2103/56 (EP,CN,KR) (-)
Former IPC [2022/19]H01L21/02, H01L21/67, C23C16/26, C23C16/40, B23K26/36, B08B3/12
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2022/19]
TitleGerman:VERFAHREN ZUR VERWENDUNG VON LASERENERGIE ZUR ENTFERNUNG VON PARTIKELN VON EINER OBERFLÄCHE[2022/19]
English:METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE[2022/19]
French:PROCÉDÉS D'UTILISATION DE L'ÉNERGIE LASER POUR ÉLIMINER DES PARTICULES D'UNE SURFACE[2022/19]
Entry into regional phase26.01.2022National basic fee paid 
26.01.2022Search fee paid 
26.01.2022Designation fee(s) paid 
26.01.2022Examination fee paid 
Examination procedure18.01.2022Amendment by applicant (claims and/or description)
26.01.2022Examination requested  [2022/19]
30.01.2024Application deemed to be withdrawn, date of legal effect  [2024/26]
20.02.2024Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2024/26]
Fees paidRenewal fee
21.07.2022Renewal fee patent year 03
20.07.2023Renewal fee patent year 04
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XI]US2011083696  (NASR WALEED [US], et al) [X] 1,8,9,14 * paragraphs [0014] - [0032]; figures 1-5; claims 9-14 * [I] 2-7,12,15;
 [XI]US8497449  (BUDD RICHARD W [US], et al) [X] 1,7,11,14 * column 1, line 15 - column 6, line 37; figures 1,2,3; claims 1, 5 *[I] 15;
 [XI]US9381548  (PETERSEN MARC JAMES [US], et al) [X] 1,6,12,14 * column 1, line 15 - column 7, line 43; figures 1,2 * [I] 2,4,5,8;
 [XI]CN109773340  (UNIV GUANGDONG TECHNOLOGY) [X] 1-3,5,6,8,10,12-14 * figures 1-3; claims 1-3 * [I] 4
International search[A]WO03022779  (FRAUNHOFER GES FORSCHUNG [DE], et al) [A] 1-16* See claims 2, 10, 26. *;
 [A]US2007251543  (SINGH MANDEEP [NL]) [A] 1-16 * See claims 1-11; and figures 1-8. *;
 [Y]KR100871451B  (SEMES CO LTD [KR]) [Y] 1-16 * See paragraphs [0002], [0020], [0033]-[0035]; and figure 2. *;
 [Y]KR20100083125  (RAVE LLC [US]) [Y] 10 * See paragraph [0007]. *;
 [Y]US2016083300  (IDE TAKAYUKI [JP], et al) [Y] 1-16 * See paragraphs [0022], [0033]; and figure 1. *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.