EP3994719 - METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 24.05.2024 Database last updated on 22.08.2024 | |
Former | Request for examination was made Status updated on 08.04.2022 | ||
Former | The international publication has been made Status updated on 15.01.2021 | Most recent event Tooltip | 24.05.2024 | Application deemed to be withdrawn | published on 26.06.2024 [2024/26] | Applicant(s) | For all designated states Entegris, Inc. 129 Concord Road Billerica, MA 01821 / US | [2022/19] | Inventor(s) | 01 /
SCOGGINS, Troy 579 Wild Wood Drive Decatur, Texas 76234 / US | [2022/19] | Representative(s) | Greaves Brewster LLP Copa House Station Road Cheddar, Somerset BS27 3AH / GB | [2022/19] | Application number, filing date | 20834923.3 | 01.07.2020 | [2022/19] | WO2020US40526 | Priority number, date | US201962869651P | 02.07.2019 Original published format: US 201962869651 P | [2022/19] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2021003288 | Date: | 07.01.2021 | Language: | EN | [2021/01] | Type: | A1 Application with search report | No.: | EP3994719 | Date: | 11.05.2022 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.01.2021 takes the place of the publication of the European patent application. | [2022/19] | Search report(s) | International search report - published on: | KR | 07.01.2021 | (Supplementary) European search report - dispatched on: | EP | 30.06.2023 | Classification | IPC: | B23K26/36, B08B3/12, B08B7/00, B23K26/362, B23K103/00 | [2023/31] | CPC: |
B23K26/362 (EP,CN,KR);
B08B7/0042 (EP,CN,KR,US);
B23K26/40 (KR,US);
B08B3/12 (EP);
B08B7/028 (KR,US);
B23K26/1224 (KR,US);
H01J37/32862 (CN);
H01L21/02098 (KR,US);
H01L21/67069 (KR);
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Former IPC [2022/19] | H01L21/02, H01L21/67, C23C16/26, C23C16/40, B23K26/36, B08B3/12 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2022/19] | Title | German: | VERFAHREN ZUR VERWENDUNG VON LASERENERGIE ZUR ENTFERNUNG VON PARTIKELN VON EINER OBERFLÄCHE | [2022/19] | English: | METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE | [2022/19] | French: | PROCÉDÉS D'UTILISATION DE L'ÉNERGIE LASER POUR ÉLIMINER DES PARTICULES D'UNE SURFACE | [2022/19] | Entry into regional phase | 26.01.2022 | National basic fee paid | 26.01.2022 | Search fee paid | 26.01.2022 | Designation fee(s) paid | 26.01.2022 | Examination fee paid | Examination procedure | 18.01.2022 | Amendment by applicant (claims and/or description) | 26.01.2022 | Examination requested [2022/19] | 30.01.2024 | Application deemed to be withdrawn, date of legal effect [2024/26] | 20.02.2024 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2024/26] | Fees paid | Renewal fee | 21.07.2022 | Renewal fee patent year 03 | 20.07.2023 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US2011083696 (NASR WALEED [US], et al) [X] 1,8,9,14 * paragraphs [0014] - [0032]; figures 1-5; claims 9-14 * [I] 2-7,12,15; | [XI]US8497449 (BUDD RICHARD W [US], et al) [X] 1,7,11,14 * column 1, line 15 - column 6, line 37; figures 1,2,3; claims 1, 5 *[I] 15; | [XI]US9381548 (PETERSEN MARC JAMES [US], et al) [X] 1,6,12,14 * column 1, line 15 - column 7, line 43; figures 1,2 * [I] 2,4,5,8; | [XI]CN109773340 (UNIV GUANGDONG TECHNOLOGY) [X] 1-3,5,6,8,10,12-14 * figures 1-3; claims 1-3 * [I] 4 | International search | [A]WO03022779 (FRAUNHOFER GES FORSCHUNG [DE], et al) [A] 1-16* See claims 2, 10, 26. *; | [A]US2007251543 (SINGH MANDEEP [NL]) [A] 1-16 * See claims 1-11; and figures 1-8. *; | [Y]KR100871451B (SEMES CO LTD [KR]) [Y] 1-16 * See paragraphs [0002], [0020], [0033]-[0035]; and figure 2. *; | [Y]KR20100083125 (RAVE LLC [US]) [Y] 10 * See paragraph [0007]. *; | [Y]US2016083300 (IDE TAKAYUKI [JP], et al) [Y] 1-16 * See paragraphs [0022], [0033]; and figure 1. * |