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Extract from the Register of European Patents

EP About this file: EP3878803

EP3878803 - MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  18.03.2022
Database last updated on 11.09.2024
FormerThe application has been published
Status updated on  13.08.2021
Most recent event   Tooltip01.06.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Hansastr. 27c
80686 München / DE
[2022/16]
Former [2021/37]For all designated states
FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V.
Hansastraße 27c
80686 München / DE
Inventor(s)01 / SCHENK, Harald
c/o Fraunhofer-Institut für Photonische
Mikrosysteme IPMS, Maria-Reiche-Str. 2
01109 Dresden / DE
02 / CONRAD, Holger
c/o Fraunhofer-Institut für Photonische
Mikrosysteme IPMS, Maria-Reiche-Str. 2
01109 Dresden / DE
03 / GAUDET, Matthieu
c/o Fraunhofer-Institut für Photonische
Mikrosysteme IPMS, Maria-Reiche-Str. 2
01109 Dresden / DE
04 / SCHIMMANZ, Klaus
c/o Fraunhofer-Institut für Photonische
Mikrosysteme IPMS, Maria-Reiche-Str. 2
01109 Dresden / DE
05 / LANGA, Sergiu
c/o Fraunhofer-Institut für Photonische
Mikrosysteme IPMS, Maria-Reiche-Str. 2
01109 Dresden / DE
06 / KAISER, Bert
c/o Fraunhofer-Institut für Photonische
Mikrosysteme IPMS, Maria-Reiche-Str. 2
01109 Dresden / DE
 [2021/37]
Representative(s)König, Andreas Rudolf, et al
Schoppe, Zimmermann, Stöckeler
Zinkler, Schenk & Partner mbB
Patentanwälte
Radlkoferstraße 2
81373 München / DE
[2021/37]
Application number, filing date21168755.314.06.2016
[2021/37]
Priority number, dateDE20151021091915.06.2015         Original published format: DE102015210919
[2021/37]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report 
No.:EP3878803
Date:15.09.2021
Language:DE
[2021/37]
Search report(s)(Supplementary) European search report - dispatched on:EP11.08.2021
ClassificationIPC:B81C1/00, H04R9/02, H04R23/00, H04R19/00, H04R17/00, H04R15/00
[2021/37]
CPC:
B81C1/00182 (EP); H04R19/005 (EP,KR,US); B81B3/0021 (EP,US);
B81C1/00142 (US); B81C1/0015 (US); B81C1/00158 (KR,US);
H04R15/00 (EP,US); H04R17/00 (EP,US); H04R23/002 (EP,US);
H04R9/02 (EP,US); B81B2201/0257 (EP,KR,US); B81B2201/032 (EP);
B81B2201/036 (US); B81B2201/054 (EP); B81B2203/0109 (US);
B81B2203/0118 (US); B81B2203/0127 (US); B81B2203/0136 (US);
B81B2203/0172 (EP); B81B2203/019 (US); B81B2203/051 (EP,KR,US);
H04R1/023 (EP,US); H04R1/08 (EP,US); H04R2201/003 (EP,KR,US);
H04R2499/11 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2022/16]
Former [2021/37]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:MEMS-WANDLER ZUM INTERAGIEREN MIT EINEM VOLUMENSTROM EINES FLUIDS[2021/37]
English:MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID[2021/37]
French:CONVERTISSEUR MEMS PERMETTANT D'INTERAGIR AVEC UN DÉBIT VOLUMIQUE D'UN FLUIDE[2021/37]
Examination procedure15.03.2022Amendment by applicant (claims and/or description)
15.03.2022Examination requested  [2022/16]
15.03.2022Date on which the examining division has become responsible
Parent application(s)   TooltipEP16729884.3  / EP3308555
Fees paidRenewal fee
16.04.2021Renewal fee patent year 03
16.04.2021Renewal fee patent year 04
16.04.2021Renewal fee patent year 05
16.04.2021Renewal fee patent year 06
31.03.2022Renewal fee patent year 07
31.03.2023Renewal fee patent year 08
31.05.2024Renewal fee patent year 09
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Documents cited:Search[XAI]US2012018244  (ROBERT PHILIPPE [FR]) [X] 1,2,8,9,12 * figures 2A-2C, 6 * * paragraph [0076] - paragraph [0157] * [A] 3-7,10,11,14-16 [I] 13;
 [XAI]WO03056691  (ABB RESEARCH LTD [CH], et al) [X] 1,2 * figures 1-4 * * page 5, line 9 - page 6, line 30 * * page 9, line 11 - line 19 * [A] 3-12,14-16 [I] 13;
 [A]DE102012223605  (BOSCH GMBH ROBERT [DE]) [A] 1-16 * figures 1a, 1b,3a, 3b * * paragraphs [0025] , [0 26] , [0 30] *
by applicantUS7803281
 EP2264058
    - "Bi-directional Electrostatic Microspeaker with Two Large-Deflection Flexible Membranes Actuated by Single/Dual Electrodes", ROBERTS, ROBERT C. et al., Sensors, IEEE, (20050000), pages 284 - 287
    - REHDER, J.ROMBACH, P.HANSEN, O., "Magnetic flux generator for balanced membrane loudspeaker", Sensors and Actuators A: Physical, (20020000), vol. 97, no. 8, doi:10.1016/S0924-4247(01)00828-7, pages 61 - 67, XP004361583

DOI:   http://dx.doi.org/10.1016/S0924-4247(01)00828-7
    - "A novel micromachined loudspeaker topology", NERI, F.DI FAZIO, F.CRESCENZI, R.BALUCANI, M., 61 st Conf. on Electronic Components and Technology, ECTC, IEEE, (20110000), pages 1221 - 1227
    - "CMOS-MEMS Acoustic Devices", NEUMANN, J. J.GABRIEL, K. J. et al., Advanced Micro and Nanosystems, Wiley-VCH Verlag, (20050000), vol. 2
    - SCHENK, H. et al., "A resonantly excited 2D-micro-scanning-mirror with large deflection", Sensors and Actuators A, (20010000), vol. 89, doi:10.1016/S0924-4247(00)00529-X, pages 104 - 111, XP004317252

DOI:   http://dx.doi.org/10.1016/S0924-4247(00)00529-X
    - ROSA, M. A. et al., "A novel external electrode configuration for the electrostatic actuation of MEMS based devices", J. Micromech. Microeng., (20040000), doi:10.1088/0960-1317/14/4/003, pages 446 - 451, XP020069645

DOI:   http://dx.doi.org/10.1088/0960-1317/14/4/003
    - KUMAR, V.SHARMA, N. N., "Design and Validation of Silicon-on-Insulator Based U Shaped thermal Microactuator", Int. J. Materials, Mechanics and Manufacturing, (20140000), vol. 2, no. 1, pages 86 - 91
    - CHENG, MING-CHENG et al., "A lilicon microspeaker for hearing instruments", J. Micromech. Microeng., (20040000), vol. 14, doi:10.1088/0960-1317/14/7/004, pages 859 - 866, XP020069702

DOI:   http://dx.doi.org/10.1088/0960-1317/14/7/004
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