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Extract from the Register of European Patents

EP About this file: EP3920210

EP3920210 - BIASABLE FLUX OPTIMIZER/COLLIMATOR FOR PVD SPUTTER CHAMBER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.04.2024
Database last updated on 19.10.2024
FormerThe patent has been granted
Status updated on  28.04.2023
FormerGrant of patent is intended
Status updated on  06.12.2022
FormerRequest for examination was made
Status updated on  10.06.2022
FormerThe application has been published
Status updated on  05.11.2021
Most recent event   Tooltip02.08.2024Lapse of the patent in a contracting state
New state(s): BE		published on 04.09.2024  [2024/36]
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
[2021/49]
Inventor(s)01 / RIKER, Martin Lee
Milpitas, 95035 / US
02 / ZHANG, Fuhong
San Jose, 95123 / US
03 / INFANTE, Anthony
San Mateo, 94403 / US
04 / WANG, Zheng
Mountain View, 94040 / US
 [2021/49]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2021/49]
Application number, filing date21188409.327.09.2016
[2021/49]
Priority number, dateUS201562246967P27.10.2015         Original published format: US 201562246967 P
[2021/49]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP3920210
Date:08.12.2021
Language:EN
[2021/49]
Type: B1 Patent specification 
No.:EP3920210
Date:31.05.2023
Language:EN
[2023/22]
Search report(s)(Supplementary) European search report - dispatched on:EP27.10.2021
ClassificationIPC:H01L21/285, H01L21/768, C23C14/16, H01J37/34, H01J37/32
[2021/49]
CPC:
H01J37/3447 (EP,KR,US); C23C14/3407 (CN); C23C14/046 (US);
C23C14/35 (CN,KR); C23C14/542 (CN); H01J37/32403 (EP,KR,US);
H01J37/32477 (EP,KR,US); H01J37/34 (EP,US); H01J37/347 (EP,KR,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2022/28]
Former [2021/49]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  RS,  SE,  SI,  SK,  SM,  TR 
TitleGerman:VORSPANNBARER FLUSSOPTIMIERER/KOLLIMATOR FÜR PVD-SPUTTERKAMMER[2022/43]
English:BIASABLE FLUX OPTIMIZER/COLLIMATOR FOR PVD SPUTTER CHAMBER[2021/49]
French:DISPOSITIF D'OPTIMISATION/COLLIMATEUR DE FLUX POUVANT ÊTRE POLARISÉ POUR CHAMBRE DE PULVÉRISATION PVD[2021/49]
Former [2021/49]VORSPANNBARER FLUSSOPTIMIERER/KOLLIMATOR FÜR PVDSPUTTERKAMMER
Examination procedure02.06.2022Amendment by applicant (claims and/or description)
02.06.2022Examination requested  [2022/28]
02.06.2022Date on which the examining division has become responsible
07.12.2022Communication of intention to grant the patent
17.04.2023Fee for grant paid
17.04.2023Fee for publishing/printing paid
17.04.2023Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP16860473.4  / EP3369108
Divisional application(s)EP23175161.1  / EP4235744
Opposition(s)01.03.2024No opposition filed within time limit [2024/19]
Fees paidRenewal fee
29.07.2021Renewal fee patent year 03
29.07.2021Renewal fee patent year 04
29.07.2021Renewal fee patent year 05
21.09.2021Renewal fee patent year 06
21.09.2022Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT31.05.2023
CZ31.05.2023
DK31.05.2023
EE31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
IT31.05.2023
LT31.05.2023
LV31.05.2023
MC31.05.2023
NL31.05.2023
PL31.05.2023
RO31.05.2023
RS31.05.2023
SE31.05.2023
SI31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
GB27.09.2023
IE27.09.2023
LU27.09.2023
BE30.09.2023
CH30.09.2023
IS30.09.2023
PT02.10.2023
[2024/36]
Former [2024/35]AT31.05.2023
CZ31.05.2023
DK31.05.2023
EE31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
IT31.05.2023
LT31.05.2023
LV31.05.2023
MC31.05.2023
NL31.05.2023
PL31.05.2023
RO31.05.2023
RS31.05.2023
SE31.05.2023
SI31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
GB27.09.2023
IE27.09.2023
LU27.09.2023
CH30.09.2023
IS30.09.2023
PT02.10.2023
Former [2024/33]AT31.05.2023
CZ31.05.2023
DK31.05.2023
EE31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
IT31.05.2023
LT31.05.2023
LV31.05.2023
MC31.05.2023
NL31.05.2023
PL31.05.2023
RO31.05.2023
RS31.05.2023
SE31.05.2023
SI31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
GB27.09.2023
IE27.09.2023
LU27.09.2023
IS30.09.2023
PT02.10.2023
Former [2024/28]AT31.05.2023
CZ31.05.2023
DK31.05.2023
EE31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
IT31.05.2023
LT31.05.2023
LV31.05.2023
MC31.05.2023
NL31.05.2023
PL31.05.2023
RO31.05.2023
RS31.05.2023
SE31.05.2023
SI31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
LU27.09.2023
IS30.09.2023
PT02.10.2023
Former [2024/27]AT31.05.2023
CZ31.05.2023
DK31.05.2023
EE31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
IT31.05.2023
LT31.05.2023
LV31.05.2023
NL31.05.2023
PL31.05.2023
RO31.05.2023
RS31.05.2023
SE31.05.2023
SI31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
LU27.09.2023
IS30.09.2023
PT02.10.2023
Former [2024/10]AT31.05.2023
CZ31.05.2023
DK31.05.2023
EE31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
LT31.05.2023
LV31.05.2023
NL31.05.2023
PL31.05.2023
RO31.05.2023
RS31.05.2023
SE31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
PT02.10.2023
Former [2024/08]AT31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
LT31.05.2023
LV31.05.2023
NL31.05.2023
PL31.05.2023
RS31.05.2023
SE31.05.2023
SK31.05.2023
SM31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
Former [2024/03]AT31.05.2023
ES31.05.2023
FI31.05.2023
HR31.05.2023
LT31.05.2023
LV31.05.2023
NL31.05.2023
PL31.05.2023
RS31.05.2023
SE31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
Former [2024/01]AT31.05.2023
ES31.05.2023
HR31.05.2023
LT31.05.2023
LV31.05.2023
NL31.05.2023
PL31.05.2023
RS31.05.2023
SE31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
Former [2023/52]AT31.05.2023
ES31.05.2023
HR31.05.2023
NL31.05.2023
PL31.05.2023
RS31.05.2023
SE31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
Former [2023/51]AT31.05.2023
ES31.05.2023
HR31.05.2023
PL31.05.2023
RS31.05.2023
SE31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
Former [2023/50]AT31.05.2023
ES31.05.2023
PL31.05.2023
SE31.05.2023
NO31.08.2023
GR01.09.2023
IS30.09.2023
Former [2023/48]AT31.05.2023
ES31.05.2023
SE31.05.2023
NO31.08.2023
Former [2023/46]ES31.05.2023
Documents cited:Search[A]WO9313542  (MATERIALS RESEARCH CORP [US]);
 [A]US5650052  (EDELSTEIN SERGIO [US], et al);
 [A]US2009308739  (RIKER MARTIN LEE [US], et al);
 [AP]WO2016085805  (APPLIED MATERIALS INC [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.