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EP4163869
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EP About this file: EP4163869
| EP4163869 - SEM IMAGE ALIGNMENT [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 16.02.2024 Database last updated on 12.07.2024 | |
| Former | The application has been published Status updated on 10.03.2023 | Most recent event Tooltip | 16.02.2024 | Application deemed to be withdrawn | published on 20.03.2024 [2024/12] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2023/15] | Inventor(s) | 01 /
KOOIMAN, Marleen 5500 AH Veldhoven / NL | [2023/15] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [2023/15] | Application number, filing date | 21202040.8 | 11.10.2021 | [2023/15] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP4163869 | Date: | 12.04.2023 | Language: | EN | [2023/15] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 15.07.2022 | Classification | IPC: | G06T7/00, G06T7/37 | [2023/15] | CPC: |
G06T7/0004 (EP);
G06T7/37 (EP);
G06T2207/10061 (EP);
G06T2207/20056 (EP);
G06T2207/30148 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2023/15] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | AUSRICHTUNG EINES SEM-BILDES | [2023/15] | English: | SEM IMAGE ALIGNMENT | [2023/15] | French: | ALIGNEMENT D'IMAGE SEM | [2023/15] | Examination procedure | 13.10.2023 | Application deemed to be withdrawn, date of legal effect [2024/12] | 07.11.2023 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2024/12] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.10.2023 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XAI]EP3789826 (ASML NETHERLANDS BV [NL]) [X] 1,2,5,10,11,14,15 * paragraphs [0002] , [0005] , [0041] - [0046] * [A] 3,6-9,12[I] 4; | [XAI] - TAO FEI ET AL, "Wafer Image Registration Based on Hough Transform", APPLIED MECHANICS AND MATERIALS, (20130701), vol. 333-335, doi:10.4028/www.scientific.net/AMM.333-335.1038, pages 1038 - 1042, XP055939201 [X] 1,7,8,10 * abstract * * figures 1,3-7 * * page 1039 - page 1041 * * Table 1 * [A] 2-6,9,11,12 [I] 14,15 DOI: http://dx.doi.org/10.4028/www.scientific.net/AMM.333-335.1038 |