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Extract from the Register of European Patents

EP About this file: EP4130874

EP4130874 - MASK BLANK AND METHOD FOR PRODUCING TRANSFER MASK [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  06.01.2023
Database last updated on 03.08.2024
FormerThe international publication has been made
Status updated on  02.10.2021
Most recent event   Tooltip22.05.2024The date on which the examining division becomes responsible, has been established 
22.05.2024Amendment by applicant 
Applicant(s)For all designated states
HOYA CORPORATION
6-10-1 Nishi-Shinjuku
Shinjuku-ku
Tokyo 160-8347 / JP
For all designated states
Toppan Photomask Co., Ltd.
3-19-26, Shibaura
Minato-ku
Tokyo 108-8539 / JP
[2023/06]
Inventor(s)01 / MAEDA, Hitoshi
c/o HOYA CORPORATION, 6-10-1 Nishi-Shinjuku,
Shinjuku-ku
Tokyo 160-8347 / JP
02 / TANIGUCHI, Kazutake
c/o HOYA CORPORATION, 6-10-1 Nishi-Shinjuku,
Shinjuku-ku
Tokyo 160-8347 / JP
03 / MATSUI, Kazuaki
c/o TOPPAN PRINTING CO., LTD., 1-5-1, Taito,
Taito-ku
Tokyo 110-8560 / JP
04 / YONEMARU, Naoto
c/o TOPPAN PRINTING CO., LTD., 1-5-1, Taito,
Taito-ku
Tokyo 110-8560 / JP
 [2023/06]
Representative(s)Vossius & Partner Patentanwälte Rechtsanwälte mbB
Siebertstraße 3
81675 München / DE
[2023/06]
Application number, filing date21774076.016.02.2021
[2023/06]
WO2021JP05627
Priority number, dateJP2020005094623.03.2020         Original published format: JP 2020050946
[2023/06]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2021192734
Date:30.09.2021
Language:JA
[2021/39]
Type: A1 Application with search report 
No.:EP4130874
Date:08.02.2023
Language:EN
[2023/06]
Search report(s)International search report - published on:JP30.09.2021
(Supplementary) European search report - dispatched on:EP28.03.2024
ClassificationIPC:G03F1/32, G03F1/80, H01L21/3065, G03F1/38, G03F1/48
[2024/18]
CPC:
G03F1/32 (EP,KR,US); G03F1/38 (EP); G03F1/48 (EP);
G03F1/50 (US); G03F1/54 (US); G03F1/80 (EP,KR,US);
H01L21/3065 (US) (-)
Former IPC [2023/06]G03F1/32, G03F1/80, H01L21/3065
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/06]
TitleGerman:MASKENROHLING UND VERFAHREN ZUR HERSTELLUNG EINER TRANSFERMASKE[2023/06]
English:MASK BLANK AND METHOD FOR PRODUCING TRANSFER MASK[2023/06]
French:EBAUCHE DE MASQUE ET PROCÉDÉ DE PRODUCTION D'UN MASQUE DE TRANSFERT[2023/06]
Entry into regional phase31.08.2022Translation filed 
29.09.2022National basic fee paid 
29.09.2022Search fee paid 
29.09.2022Designation fee(s) paid 
29.09.2022Examination fee paid 
Examination procedure29.09.2022Examination requested  [2023/06]
21.05.2024Amendment by applicant (claims and/or description)
21.05.2024Date on which the examining division has become responsible
Fees paidRenewal fee
29.09.2022Renewal fee patent year 03
22.02.2024Renewal fee patent year 04
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US2017168384  (SHISHIDO HIROAKI [JP], et al)
International search[A]JP2016188958  (HOYA CORP) [A] 1-10 * , paragraphs [0041], [0048], [0059], [0063], [0076], [0079], [0100], [0104], [0117], [0126], [0128]-[0141], fig. 1, 2, 10-12 *;
 [A]JP2016212322  (HOYA CORP) [A] 1-10 * , paragraphs [0047]-[0061], [0120]-[0137], fig. 1, 3 *;
 [A]JP2017058703  (HOYA CORP) [A] 1-10* , paragraphs [0041], [0042], [0045], [0049], fig. 2 *;
 [A]JP2017223905  (TOPPAN PRINTING CO LTD) [A] 1-10 * , paragraphs [0020], [0022]-[0025], fia. 1 (b) *;
 [A]JP2019179106  (TOPPAN PRINTING CO LTD) [A] 1-10 * , paragraphs [0021], [0022], [0029], [0031], fig. 1 *;
 [A]JP2020020868  (TOPPAN PRINTING CO LTD) [A] 1-10 * , paragraphs [0016], [0019]-[0026], [0028], [0029], fig. 2 *
by applicantJP4989800B
 JP2016188958
 JP6234898B
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.