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Extract from the Register of European Patents

EP About this file: EP4268267

EP4268267 - METHOD FOR REMOVING UPPER PART OF SACRIFICIAL LAYER, AND SACRIFICIAL SOLUTION AND ACIDIC AQUEOUS SOLUTION USED THEREFOR [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  29.09.2023
Database last updated on 20.07.2024
FormerThe international publication has been made
Status updated on  02.07.2022
Formerunknown
Status updated on  24.01.2022
Most recent event   Tooltip05.03.2024Change - representative 
Applicant(s)For all designated states
Merck Patent GmbH
Frankfurter Strasse 250
64293 Darmstadt / DE
[2023/44]
Inventor(s)01 / SEKITO, Takashi
Kakegawa-shi Shizuoka 437--1412 / JP
02 / NAGAHARA, Tatsuro
Kakegawa-shi Shizuoka 437--1412 / JP
 [2023/44]
Representative(s)Merck Patent Association
Merck Patent GmbH
64271 Darmstadt / DE
[N/P]
Application number, filing date21843620.220.12.2021
[2023/44]
WO2021EP86725
Priority number, dateJP2020021319123.12.2020         Original published format: JP 2020213191
[2023/44]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2022136235
Date:30.06.2022
Language:EN
[2022/26]
Type: A1 Application with search report 
No.:EP4268267
Date:01.11.2023
Language:EN
The application published by WIPO in one of the EPO official languages on 30.06.2022 takes the place of the publication of the European patent application.
[2023/44]
Search report(s)International search report - published on:EP30.06.2022
ClassificationIPC:H01L21/02, H01L21/311, H01L21/027, H01L21/033
[2023/44]
CPC:
H01L21/02118 (EP,KR); H01L21/31133 (EP,KR); C08F212/08 (KR);
C08F212/24 (KR); C08F220/18 (KR); C08F220/30 (KR);
C08G61/02 (KR); G03F7/004 (KR); G03F7/32 (KR);
H01L21/02282 (EP,KR); H01L21/0273 (EP); H01L21/0337 (EP);
H01L21/30604 (KR); H01L21/3081 (KR); H01L21/3086 (KR);
H01L21/31053 (KR); H01L21/31058 (KR); Y02P20/55 (EP) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2023/44]
TitleGerman:VERFAHREN ZUM ENTFERNEN DES OBEREN TEILS EINER OPFERSCHICHT UND OPFERLÖSUNG UND SAURE WÄSSRIGE LÖSUNG DAFÜR[2023/44]
English:METHOD FOR REMOVING UPPER PART OF SACRIFICIAL LAYER, AND SACRIFICIAL SOLUTION AND ACIDIC AQUEOUS SOLUTION USED THEREFOR[2023/44]
French:PROCÉDÉ DE RETRAIT DE PARTIE SUPÉRIEURE DE COUCHE SACRIFICIELLE, ET SOLUTION SACRIFICIELLE ET SOLUTION AQUEUSE ACIDE UTILISÉES À CET EFFET[2023/44]
Entry into regional phase20.06.2023National basic fee paid 
20.06.2023Designation fee(s) paid 
20.06.2023Examination fee paid 
Examination procedure20.06.2023Examination requested  [2023/44]
20.06.2023Date on which the examining division has become responsible
05.02.2024Amendment by applicant (claims and/or description)
Fees paidRenewal fee
15.11.2023Renewal fee patent year 03
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Cited inInternational search[XA]US2009274980  (KANG YOOL [KR], et al) [X] 10,11 * paragraphs [0022] - [0097]; figures 1-3 * [A] 1-9,12-15;
 [YA]US2010015550  (LIU WEIHONG [US], et al) [Y] 14 * paragraphs [0015] - [0087]; figures 1-4 * [A] 1-13,15;
 [XA]US2012273924  (MATSUDA TOMOKI [JP], et al) [X] 10,11 * the whole document *[A] 1-9,12-15;
 [A]US2015140825  (DEVILLIERS ANTON J [US]) [A] 1-15 * paragraphs [0022] - [0038]; figures 1-11 *;
 [XYI]US2016049306  (KOH CHA-WON [KR], et al) [X] 1,3-5,10-13,15 * paragraphs [0041] - [0010]; figures 1,2 * [Y] 14 [I] 2,6-9
by applicantWO03015183
    - "Development of EUVL material and process for 16 nm half pitch", TECHNICAL REVIEW
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.