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Extract from the Register of European Patents

EP About this file: EP4332279

EP4332279 - MULTILAYER STRUCTURE, SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING MULTILAYER STRUCTURE [Right-click to bookmark this link]
StatusRequest for examination was made
Status updated on  02.02.2024
Database last updated on 14.06.2024
FormerThe international publication has been made
Status updated on  05.11.2022
Most recent event   Tooltip08.05.2024Amendment by applicant 
Applicant(s)For all designated states
SHIN-ETSU CHEMICAL CO., LTD.
4-1, Marunouchi 1 chome
Chiyoda-ku
Tokyo 1000005 / JP
[2024/10]
Inventor(s)01 / WATABE, Takenori
Annaka-shi, Gunma 379-0195 / JP
02 / HASHIGAMI, Hiroshi
Annaka-shi, Gunma 379-0195 / JP
03 / SAKATSUME, Takahiro
Annaka-shi, Gunma 379-0195 / JP
 [2024/10]
Representative(s)Sonnenhauser, Thomas Martin
Wuesthoff & Wuesthoff
Patentanwälte und Rechtsanwalt PartG mbB
Schweigerstraße 2
81541 München / DE
[N/P]
Former [2024/10]Sonnenhauser, Thomas Martin
Wuesthoff & Wuesthoff
Patentanwälte PartG mbB
Schweigerstraße 2
81541 München / DE
Application number, filing date22795493.030.03.2022
[2024/10]
WO2022JP15911
Priority number, dateJP2021007665728.04.2021         Original published format: JP 2021076657
[2024/10]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2022230577
Date:03.11.2022
Language:JA
[2022/44]
Type: A1 Application with search report 
No.:EP4332279
Date:06.03.2024
Language:EN
[2024/10]
Search report(s)International search report - published on:JP03.11.2022
ClassificationIPC:C30B29/16, C23C16/40, C30B25/18, H01L21/205, H01L21/208
[2024/10]
CPC:
C23C16/40 (EP); C30B25/18 (EP,KR); C23C16/4486 (EP);
C30B29/16 (EP,KR); H01L21/0242 (EP,KR); H01L21/02428 (KR);
H01L21/0243 (EP); H01L21/02483 (EP); H01L21/02488 (EP);
H01L21/02565 (EP,KR); H01L21/02587 (EP); H01L21/0262 (EP,KR);
H01L21/02628 (EP); H01L21/02433 (EP) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2024/10]
Extension statesBANot yet paid
MENot yet paid
Validation statesKHNot yet paid
MANot yet paid
MDNot yet paid
TNNot yet paid
TitleGerman:MEHRSCHICHTIGE STRUKTUR, HALBLEITERBAUELEMENT UND VERFAHREN ZUR HERSTELLUNG EINER MEHRSCHICHTIGEN STRUKTUR[2024/10]
English:MULTILAYER STRUCTURE, SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING MULTILAYER STRUCTURE[2024/10]
French:STRUCTURE MULTICOUCHE, DISPOSITIF À SEMI-CONDUCTEUR ET PROCÉDÉ DE PRODUCTION DE STRUCTURE MULTICOUCHE[2024/10]
Entry into regional phase24.10.2023Translation filed 
24.10.2023National basic fee paid 
24.10.2023Search fee paid 
24.10.2023Designation fee(s) paid 
24.10.2023Examination fee paid 
Examination procedure24.10.2023Examination requested  [2024/10]
07.05.2024Amendment by applicant (claims and/or description)
Fees paidRenewal fee
24.10.2023Renewal fee patent year 03
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[Y]JP2013028480  (UNIV KOCHI TECHNOLOGY) [Y] 1-17* paragraphs [0001], [0010]-[0050] *;
 [Y]JP2015039033  (SAINT GOBAIN CERAMICS) [Y] 1-17 * claims 1, 2, 4, 9, paragraphs [0001], [0007], [0014], [0015], [0018], [0054], [0057] *;
 [Y]JP2021024184  (SHINETSU CHEMICAL CO) [Y] 1-17 * paragraphs [0001]-[0003] *
by applicantJP2013028480
 JP2015199649
    - "Electrical Conductive Corundum-Structured a-Ga O Thin Films on Sapphire with Tin-Doping Grown by Spray-Assisted Mist Chemical Vapor Deposition", Japanese Journal of Applied Physics, (20120000), vol. 51, page 070203
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.