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EP4333564
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EP About this file: EP4333564
| EP4333564 - SPUTTERING DEVICE [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 02.02.2024 Database last updated on 24.08.2024 | |
| Former | The international publication has been made Status updated on 05.11.2022 | Most recent event Tooltip | 05.07.2024 | Change: Validation states | published on 07.08.2024 [2024/32] | 05.07.2024 | Change - extension states | published on 07.08.2024 [2024/32] | Applicant(s) | For all designated states EMD Corporation 2426-1, Mikami, Yasu-shi Shiga 520-2323 / JP | For all designated states Osaka Research Institute of Industrial Science and Technology 7-1, Ayumino 2-chome Izumi-shi, Osaka 594-1157 / JP | For all designated states Ogawa, Soichi 7-18-7 Kariguchidai Tarumi-ku Kobe-shi, Hyogo 655-0049 / JP | [2024/10] | Inventor(s) | 01 /
EBE, Akinori Yasu-shi, Shiga 520-2323 / JP | 02 /
KONDO, Yusuke Izumi-shi, Osaka 594-1157 / JP | 03 /
KAKEHI, Yoshiharu Izumi-shi, Osaka 594-1157 / JP | 04 /
SATOH, Kazuo Izumi-shi, Osaka 594-1157 / JP | 05 /
IKUHARA, Shiro Ritto-shi, Shiga 520-3045 / JP | 06 /
IWASAKI, Shinichi Ritto-shi, Shiga 520-3045 / JP | 07 /
OGAWA, Soichi Kobe-shi, Hyogo 655-0049 / JP | [2024/10] | Representative(s) | Hoeger, Stellrecht & Partner Patentanwälte mbB Uhlandstrasse 14c 70182 Stuttgart / DE | [2024/10] | Application number, filing date | 22795770.1 | 26.04.2022 | [2024/10] | WO2022JP18834 | Priority number, date | JP20210077125 | 30.04.2021 Original published format: JP 2021077125 | [2024/10] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2022230857 | Date: | 03.11.2022 | Language: | JA | [2022/44] | Type: | A1 Application with search report | No.: | EP4333564 | Date: | 06.03.2024 | Language: | EN | [2024/10] | Search report(s) | International search report - published on: | JP | 03.11.2022 | Classification | IPC: | H05H1/46, C23C14/34, C23C14/35 | [2024/10] | CPC: |
H01J37/3417 (EP);
H01J37/3435 (KR,US);
H01J37/3402 (US);
C23C14/34 (EP);
C23C14/3407 (EP,KR);
C23C14/35 (EP);
C23C14/352 (EP,KR,US);
H01J37/3211 (US);
H01J37/345 (EP,US);
H01J37/3461 (KR)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2024/10] | Title | German: | SPUTTERVORRICHTUNG | [2024/10] | English: | SPUTTERING DEVICE | [2024/10] | French: | DISPOSITIF DE PULVÉRISATION CATHODIQUE | [2024/10] | Entry into regional phase | 12.10.2023 | Translation filed | 12.10.2023 | National basic fee paid | 12.10.2023 | Search fee paid | 12.10.2023 | Designation fee(s) paid | 12.10.2023 | Examination fee paid | Examination procedure | 12.10.2023 | Examination requested [2024/10] | Fees paid | Renewal fee | 26.02.2024 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [AY]JPH01298154 (TOMINAGA KIKUO); | [AY]JPH07238371 (CANON KK); | [YAX]JP2018053272 (SCREEN HOLDINGS CO LTD) | by applicant | JP2008127582 |