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EP4419728
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EP About this file: EP4419728
| EP4419728 - TILTED PVD SOURCE WITH ROTATING PEDESTAL [Right-click to bookmark this link] | Status | Request for examination was made Status updated on 26.07.2024 Database last updated on 19.10.2024 | |
| Former | The international publication has been made Status updated on 05.05.2023 | Most recent event Tooltip | 26.07.2024 | Publication in section I.1 EP Bulletin | published on 28.08.2024 [2024/35] | 26.07.2024 | Request for examination filed | published on 28.08.2024 [2024/35] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | [2024/35] | Inventor(s) | 01 /
PENMETHSA, Harish Santa Clara, California 95054 / US | 02 /
YANG, Hong S. Santa Clara, California 95054 / US | 03 /
PALANISAMY, Suresh Coimbatore, 641004 / IN | [2024/35] | Representative(s) | Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [2024/35] | Application number, filing date | 22884228.2 | 24.08.2022 | [2024/35] | WO2022US41405 | Priority number, date | US202117507252 | 21.10.2021 Original published format: US202117507252 | [2024/35] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2023069190 | Date: | 27.04.2023 | Language: | EN | [2023/17] | Type: | A1 Application with search report | No.: | EP4419728 | Date: | 28.08.2024 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.04.2023 takes the place of the publication of the European patent application. | [2024/35] | Search report(s) | International search report - published on: | KR | 27.04.2023 | Classification | IPC: | C23C14/35, C23C14/50, H01J37/34 | [2024/35] | CPC: |
H01J37/3423 (EP,KR,US);
C23C14/351 (KR,US);
H01J37/3455 (EP,KR,US);
C23C14/3407 (EP,KR,US);
C23C14/352 (EP,KR,US);
C23C14/505 (EP,KR,US);
C23C14/54 (KR,US);
H01J37/3405 (EP,KR,US);
H01J37/3408 (EP,KR);
H01J37/3417 (EP,KR,US);
H01J37/3435 (EP,KR,US);
H01J37/345 (EP,KR);
H01J37/3497 (EP,KR,US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2024/35] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | KH | Not yet paid | MA | Not yet paid | MD | Not yet paid | TN | Not yet paid | Title | German: | GENEIGTE PVD-QUELLE MIT ROTIERENDEM SOCKEL | [2024/35] | English: | TILTED PVD SOURCE WITH ROTATING PEDESTAL | [2024/35] | French: | SOURCE DE PVD INCLINÉE AVEC SOCLE ROTATIF | [2024/35] | Entry into regional phase | 21.03.2024 | National basic fee paid | 21.03.2024 | Search fee paid | 21.03.2024 | Designation fee(s) paid | 21.03.2024 | Examination fee paid | Examination procedure | 21.03.2024 | Examination requested [2024/35] | Fees paid | Renewal fee | 21.03.2024 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]WO0222300 (TOSOH SMD INC [US], et al); | [Y]US2003102208 (FU JIANMING [US]); | [Y]US2004140205 (FU JIANMING [US], et al); | [Y]US2007048992 (HOSOKAWA AKIHIRO [US], et al); | [A]CN208701195U (ULVAC VACUUM TECH SUZHOU CO LTD); | [Y]US2020335331 (XIAO WEN [SG], et al) |