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Extract from the Register of European Patents

EP About this file: EP0021140

EP0021140 - Ion source in a vacuum chamber and method for its operation [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  20.06.1984
Database last updated on 21.08.2024
Most recent event   Tooltip07.03.1997Lapse of the patent in a contracting statepublished on 23.04.1997 [1997/17]
Applicant(s)For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
[N/P]
Former [1981/01]For all designated states
International Business Machines Corporation
Old Orchard Road
Armonk, N.Y. 10504 / US
Inventor(s)01 / Harper, James McKell Edwin
507 Elizabeth Road
Yorktown Hgts, N.Y.10598 / US
02 / Kaufman, Harold Richard
401 Spinnaker Lane
Fort Collins Colorado 80525 / US
[1981/01]
Representative(s)Rudack, Günter Otto
IBM Corporation Säumerstrasse 4
CH-8803 Rüschlikon / CH
[N/P]
Former [1981/13]Rudack, Günter O., Dipl.-Ing.
IBM Corporation Säumerstrasse 4
CH-8803 Rüschlikon / CH
Former [1981/01]Aepli, Leo B., Dipl.-Ing.
Säumerstrasse 4
CH-8803 Rüschlikon/ZH / CH
Application number, filing date80103077.603.06.1980
[1981/01]
Priority number, dateUS1979005349129.06.1979         Original published format: US 53491
[1981/01]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report 
No.:EP0021140
Date:07.01.1981
Language:DE
[1981/01]
Type: B1 Patent specification 
No.:EP0021140
Date:24.08.1983
Language:DE
[1983/34]
Search report(s)(Supplementary) European search report - dispatched on:EP16.10.1980
ClassificationIPC:H01J27/00, H01L21/302
[1981/01]
CPC:
H01J37/08 (EP,US); H01J27/14 (EP,US); H01J37/3056 (EP,US)
Designated contracting statesDE,   FR,   GB [1981/01]
TitleGerman:Ionenquelle in einer Vakuumkammer und Verfahren zum Betrieb derselben[1981/01]
English:Ion source in a vacuum chamber and method for its operation[1981/01]
French:Source ionique dans une chambre sous vide et procédé pour son fonctionnement[1981/01]
Examination procedure23.01.1981Examination requested  [1981/14]
15.02.1982Despatch of a communication from the examining division (Time limit: M04)
01.06.1982Reply to a communication from the examining division
24.08.1982Despatch of communication of intention to grant (Approval: )
15.11.1982Communication of intention to grant the patent
23.11.1982Fee for grant paid
23.11.1982Fee for publishing/printing paid
Opposition(s)25.05.1984No opposition filed within time limit [1984/34]
Fees paidRenewal fee
23.06.1982Renewal fee patent year 03
21.06.1983Renewal fee patent year 04
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:SearchUS3156090  [ ] (KAUFMAN HAROLD R);
 CH441532  [ ] (HALBLEITERWERK FRANKFURT ODER [DE]);
 US3355615  [ ] (LE BIHAN RAYMOND, et al);
 US3660715  [ ] (POST RICHARD F);
 GB1298490  [ ] (KUREHA CHEMICAL IND CO LTD [JP]);
 US3744247  [ ] (MARGOSIAN P, et al);
 GB1359707  [ ] (THOMSON CSF);
 FR2218652  [ ] (THOMSON CSF [FR]);
 GB1466786  [ ] (CALIFORNIA LINEAR CIRCUITS INC);
 DE2625870  [ ] (SIEMENS AG);
 GB1513218  [ ] (SIEMENS AG)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.