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Extract from the Register of European Patents

EP About this file: EP0144943

EP0144943 - Process using plasma for forming conductive through-holes through a dielectric layer [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  13.04.1991
Database last updated on 31.08.2024
Most recent event   Tooltip07.03.1997Lapse of the patent in a contracting statepublished on 23.04.1997 [1997/17]
Applicant(s)For all designated states
E. I. du Pont de Nemours and Company
1007 Market Street
Wilmington, DE 19898 / US
[N/P]
Former [1985/25]For all designated states
E.I. DU PONT DE NEMOURS AND COMPANY
1007 Market Street
Wilmington Delaware 19898 / US
Inventor(s)01 / Johnson, Daniel David
Box 222
Yorklyn Delaware 19736 / US
[1985/25]
Representative(s)dompatent von Kreisler Selting Werner - Partnerschaft von Patent- und Rechtsanwälten mbB
Deichmannhaus am Dom
Bahnhofsvorplatz 1
50667 Köln / DE
[N/P]
Former [1985/25]Werner, Hans-Karsten, Dr., et al
Patentanwälte Von Kreisler-Selting-Werner Postfach 10 22 41
D-50462 Köln / DE
Application number, filing date84114614.501.12.1984
[1985/25]
Priority number, dateUS1983055830905.12.1983         Original published format: US 558309
[1985/25]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0144943
Date:19.06.1985
Language:EN
[1985/25]
Type: A3 Search report 
No.:EP0144943
Date:22.10.1986
Language:EN
[1986/43]
Type: B1 Patent specification 
No.:EP0144943
Date:13.06.1990
Language:EN
[1990/24]
Search report(s)(Supplementary) European search report - dispatched on:EP02.09.1986
ClassificationIPC:H05K3/42
[1985/25]
CPC:
H05K3/4084 (EP,US); H05K3/0041 (EP,US); H05K3/0055 (EP,US);
H05K2201/0394 (EP,US); H05K2201/0397 (EP,US); H05K2201/09509 (EP,US);
H05K2203/0554 (EP,US); H05K2203/1184 (EP,US); H05K2203/1572 (EP,US);
Y10T29/49167 (EP,US) (-)
Designated contracting statesBE,   DE,   FR,   GB,   IT,   NL [1985/25]
TitleGerman:Plasmaverfahren zur Herstellung leitfähiger durchgehender Löcher durch eine dielektrische Schicht[1985/32]
English:Process using plasma for forming conductive through-holes through a dielectric layer[1985/25]
French:Procédé utilisant un plasma pour former des trous conducteurs à travers une couche diélectrique[1985/32]
Examination procedure27.03.1987Examination requested  [1987/22]
16.02.1989Despatch of a communication from the examining division (Time limit: M04)
27.05.1989Reply to a communication from the examining division
15.09.1989Despatch of communication of intention to grant (Approval: Yes)
15.12.1989Communication of intention to grant the patent
06.03.1990Fee for grant paid
06.03.1990Fee for publishing/printing paid
Opposition(s)14.03.1991No opposition filed within time limit [1991/23]
Fees paidRenewal fee
19.12.1986Renewal fee patent year 03
15.12.1987Renewal fee patent year 04
28.12.1988Renewal fee patent year 05
22.12.1989Renewal fee patent year 06
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Documents cited:Search[A]US3364300  (BRADHAM III ALLEN C);
 [AD]US3969815  (HACKE HANS-JURGEN, et al);
 [A]US4012307  (PHILLIPS EUGENE);
 [A]US4357203  (ZELEZ JOSEPH)
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 20, no. 3, August 1977, page 1024, IBM Corp., New York, US; J.S. LOGAN et al.: "SiO barrier layer for lift-off process"
 [A]  - XEROX DISCLOSURE JOURNAL, vol. 7, no. 4, July/August 1982, page 221; H.R. THOMAS et al.: "Insulating layers for metal cross-overs from polyparaxylylene"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.