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EP0175933
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EP About this file: EP0175933
| EP0175933 - Scanning lens system without deflection defects for corpuscular beam treatment of material [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 10.07.1990 Database last updated on 15.06.2024 | Most recent event Tooltip | 07.07.2007 | Change - inventor | published on 08.08.2007 [2007/32] | Applicant(s) | For all designated states SIEMENS AKTIENGESELLSCHAFT Werner-von-Siemens-Str. 1 DE-80333 München / DE | [N/P] |
| Former [1986/14] | For all designated states SIEMENS AKTIENGESELLSCHAFT Wittelsbacherplatz 2 D-80333 München / DE | Inventor(s) | 01 /
Plies, Erich, Dr. Dipl.Phys. Deisenhofenerstrasse 79 c D-8000 München 90 / DE | 02 /
Kuck, Gerd, Dr. Dipl.-Phys. Alfred-Schmidt-Strasse 37/IV D-8000 München 70 / DE | [1986/14] | Application number, filing date | 85110602.1 | 23.08.1985 | [1986/14] | Priority number, date | DE19843434776 | 21.09.1984 Original published format: DE 3434776 | [1986/14] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | EP0175933 | Date: | 02.04.1986 | Language: | DE | [1986/14] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.02.1986 | Classification | IPC: | H01J37/153, H01J37/04, H01J37/30 | [1986/14] | CPC: |
H01J37/147 (EP,US);
H01J37/153 (EP,US);
H01J37/3007 (EP,US)
| Designated contracting states | DE, FR, GB, NL [1986/14] | Title | German: | Rasterlinsen-System ohne Ablenkfarbfehler zur Materialbearbeitung mit Korpuskularstrahlen | [1986/14] | English: | Scanning lens system without deflection defects for corpuscular beam treatment of material | [1986/14] | French: | Système de lentilles à balayage sans défauts de déviation pour traitement de matériaux par faisceaux corpusculaires | [1986/14] | File destroyed: | 13.06.1996 | Examination procedure | 05.09.1985 | Examination requested [1986/14] | 17.03.1988 | Despatch of a communication from the examining division (Time limit: M06) | 26.09.1988 | Reply to a communication from the examining division | 02.01.1989 | Despatch of a communication from the examining division (Time limit: M02) | 06.03.1989 | Reply to a communication from the examining division | 26.04.1989 | Despatch of communication of intention to grant (Approval: Yes) | 07.11.1989 | Communication of intention to grant the patent | 20.02.1990 | Application deemed to be withdrawn, date of legal effect [1990/35] | 28.03.1990 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [1990/35] | Fees paid | Renewal fee | 26.08.1987 | Renewal fee patent year 03 | 30.08.1988 | Renewal fee patent year 04 | Penalty fee | Additional fee for renewal fee | 31.08.1989 | 05 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JP56078051 ; | [A]DD126382 ; | [A]FR2415348 (ZEISS JENA VEB CARL [DD]); | [A]DE2937004 (FRAUNHOFER GES FORSCHUNG); | [YP]US4475044 (KURODA KATSUHIRO [JP], et al) | [Y] - PROCEEDINGS OF THE SYMPOSIUM ON ELECTRON AND ION BEAM SCIENCE AND TECHNOLOGY, 8th international conference, Band 78, Nr. 5, Seiten 32-43, Princeton, New Jersey, US; W. STICKEL et al.: "Optics of a variable shaped electron beam column" | [A] - PATENTS ABSTRACTS OF JAPAN, Band 5, Nr. 141 (E-73)[813], 5. September 1981; & JP-A-56 078051 (NIPPON DENSHI K.K.) 26.6.1981, & JP56078051 A 00000000 |