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Extract from the Register of European Patents

EP About this file: EP0150129

EP0150129 - Method and apparatus for lithographic rotate and repeat processing [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  12.04.1989
Database last updated on 14.09.2024
Most recent event   Tooltip15.08.2008Change - applicantpublished on 17.09.2008  [2008/38]
Applicant(s)For all designated states
Hewlett-Packard Company
3000 Hanover Street
Palo Alto, CA 94304-1112 / US
[N/P]
Former [2008/38]For all designated states
Hewlett-Packard Company
3000 Hanover Street
Palo Alto CA 94304-1112 / US
Former [1987/43]For all designated states
Hewlett-Packard Company
3000 Hanover Street
Palo Alto California 94304 / US
Former [1985/31]For all designated states
VARIAN ASSOCIATES, INC.
611 Hansen Way
Palo Alto, CA 94303 / US
Inventor(s)01 / Siddall, Graham J.
2887 Woodside Road
Woodside California 94062 / US
02 / Eaton, Steven Glen
380 Curtner Avenue
No. 1 Palo Alto California 94306 / US
03 / Kruger, James B.
164 Kelly Avenue
Half Moon Bay California 94019 / US
04 / Garrettson, Garrett A.
14495 Miranda Road
Los Altos California 94022 / US
05 / Neukermans, Armand P.
3510 Arbutus Avenue
Palo Alto California 94303 / US
[1985/31]
Representative(s)Colgan, Stephen James, et al
CARPMAELS & RANSFORD 43 Bloomsbury Square
London WC1A 2RA / GB
[N/P]
Former [1988/03]Colgan, Stephen James, et al
CARPMAELS & RANSFORD 43 Bloomsbury Square
London WC1A 2RA / GB
Former [1986/50]Cline, Roger Ledlie
EDWARD EVANS & CO. Chancery House 53-64 Chancery Lane
London WC2A 1SD / GB
Former [1985/31]Cline, Roger Ledlie
STANLEY, POPPLEWELL, POOLE 57 Lincoln's Inn Fields
London WC2A 3LS / GB
Application number, filing date85300440.623.01.1985
[1985/31]
Priority number, dateUS1984057352424.01.1984         Original published format: US 573524
[1985/31]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0150129
Date:31.07.1985
Language:EN
[1985/31]
Type: A3 Search report 
No.:EP0150129
Date:21.08.1985
Language:EN
[1985/34]
Type: B1 Patent specification 
No.:EP0150129
Date:15.06.1988
Language:EN
[1988/24]
Search report(s)(Supplementary) European search report - dispatched on:EP20.06.1985
ClassificationIPC:G03B41/00
[1985/31]
CPC:
G03F7/70425 (EP,US); G03F7/70433 (EP,US)
Designated contracting statesDE,   FR,   GB,   NL [1985/31]
TitleGerman:Verfahren und Vorrichtung für die repetitive und rotative lithographische Behandlung[1985/31]
English:Method and apparatus for lithographic rotate and repeat processing[1985/31]
French:Procédé et appareil pour le traitement lithographique répétitif et rotatif[1985/31]
File destroyed:12.06.1999
Examination procedure21.02.1986Examination requested  [1986/17]
24.03.1987Despatch of communication of intention to grant (Approval: )
16.12.1987Communication of intention to grant the patent
16.01.1988Fee for grant paid
16.01.1988Fee for publishing/printing paid
Opposition(s)16.03.1989No opposition filed within time limit [1989/22]
Fees paidRenewal fee
14.01.1987Renewal fee patent year 03
18.01.1988Renewal fee patent year 04
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Documents cited:Search[X]US3181419  (KNAUP DAVID R, et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.