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EP0196531
European procedure
Extract from the Register of European Patents
EP About this file: EP0196531
| EP0196531 - Method for indirectly determining the intensity distribution of pulsed particle beams produced in a particle beam measuring instrument [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 16.11.1991 Database last updated on 03.09.2024 | Most recent event Tooltip | 16.11.1991 | No opposition filed within time limit | published on 08.01.1992 [1992/02] | Applicant(s) | For all designated states ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Klausnerring 1a 85551 Heimstetten / DE | [N/P] |
| Former [1990/04] | For all designated states ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Klausnerring 1a D-85551 Kirchheim / DE | ||
| Former [1986/41] | For all designated states SIEMENS AKTIENGESELLSCHAFT Wittelsbacherplatz 2 D-80333 München / DE | Inventor(s) | 01 /
Plies, Erich, Dr. rer. nat. Deisenhofener Strasse 79 c D-8000 München 90 / DE | [1986/41] | Representative(s) | Tetzner, Volkmar Anwaltskanzlei Dr. Tetzner Van-Gogh-Strasse 3 81479 München / DE | [N/P] |
| Former [1990/04] | Tetzner, Volkmar, Dr.-Ing. Dr. jur. Van-Gogh-Strasse 3 D-81479 München / DE | Application number, filing date | 86103565.7 | 17.03.1986 | [1986/41] | Priority number, date | DE19853511372 | 28.03.1985 Original published format: DE 3511372 | [1986/41] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | EP0196531 | Date: | 08.10.1986 | Language: | DE | [1986/41] | Type: | B1 Patent specification | No.: | EP0196531 | Date: | 16.01.1991 | Language: | DE | [1991/03] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 18.08.1986 | Classification | IPC: | G01R31/305 | [1991/03] | CPC: |
G01R31/305 (EP,US)
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| Former IPC [1986/41] | G01R31/28 | Designated contracting states | DE, FR, GB, IT, NL [1986/41] | Title | German: | Verfahren zur indirekten Bestimmung der Intensitätsverteilung der in einem Korpuskularstrahl-Messgerät erzeugten Korpuskularstrahlpulse | [1986/41] | English: | Method for indirectly determining the intensity distribution of pulsed particle beams produced in a particle beam measuring instrument | [1986/41] | French: | Procédé pour déterminer indirectement la distribution de l'intensité d'impulsions de faisceaux de particules créés dans un appareil de mesure à faisceau de particules | [1986/41] | Examination procedure | 07.04.1987 | Examination requested [1987/23] | 11.10.1989 | Despatch of a communication from the examining division (Time limit: M04) | 07.02.1990 | Reply to a communication from the examining division | 13.06.1990 | Despatch of communication of intention to grant (Approval: Yes) | 19.07.1990 | Communication of intention to grant the patent | 27.09.1990 | Fee for grant paid | 27.09.1990 | Fee for publishing/printing paid | Opposition(s) | 17.10.1991 | No opposition filed within time limit [1992/02] | Fees paid | Renewal fee | 25.03.1988 | Renewal fee patent year 03 | 28.03.1989 | Renewal fee patent year 04 | 23.03.1990 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US3857090 (CHICK D) | [A] - THE REVIEW OF SCIENTIFIC INSTRUMENTS, Band 42, Nr. 2, Februar 1971, Seiten 251-255, New York, US; G.Y. ROBINSON: "Stroboscopic scanning electron microscopy at gigahertz frequencies" | [A] - JOURNAL OF ELECTRON MICROSCOPY, Band 27, Nr. 4, 1978, Seiten 247-252, Tokyo, JP; KATSUMI URA et al.: "Picosecond pulse stroboscopic scanning electron microscope" |