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EP0233333
European procedure
Extract from the Register of European Patents
EP About this file: EP0233333
| EP0233333 - Method of treating photoresists [Right-click to bookmark this link] | Status | Opposition rejected Status updated on 06.12.1996 Database last updated on 29.03.2025 | Most recent event Tooltip | 19.09.2008 | Change - representative | published on 22.10.2008 [2008/43] | Applicant(s) | For all designated states USHIO DENKI Asahi-Tokai Building 19 No. 6-1, 2-chome Ote-machi Chiyoda-ku Tokyo, 100 / JP | [1987/35] | Inventor(s) | 01 /
Tanaka, Kazuya USHIO DENKI 6409 motoishikawa-cho Midori-ku Yokohama-shi Kanagawa / JP | 02 /
Ueki, Kazuyoshi USHIO DENKI 6409 motoishikawa-cho Midori-ku Yokohama-shi Kanagawa / JP | 03 /
Suzuki, Hiroko USHIO DENKI 6409 motoishikawa-cho Midori-ku Yokohama-shi Kanagawa / JP | 04 /
Mimura, Yoshiki USHIO DENKI 6409 motoishikawa-cho Midori-ku Yokohama-shi Kanagawa / JP | 05 /
Suzuki, Shinji USHIO DENKI 6409 motoishikawa-cho Midori-ku Yokohama-shi Kanagawa / JP | 06 /
Sugioka, Shinji USHIO DENKI 6409 motoishikawa-cho Midori-ku Yokohama-shi Kanagawa / JP | [1987/35] | Representative(s) | Lang, Friedrich, et al Lang & Tomerius Patentanwaltspartnerschaft mbB Rosa-Bavarese-Strasse 5 80639 München / DE | [N/P] |
| Former [2008/43] | Lang, Friedrich, et al Lang & Tomerius Patentanwälte Landsberger Strasse 300 80687 München / DE | ||
| Former [1995/34] | Lang, Friedrich, Dipl.-Ing., et al Patentanwälte Weber & Heim Irmgardstrasse 3 D-81479 München / DE | ||
| Former [1995/33] | Lang, Friedrich, Dipl.-Ing. Patentanwälte Weber & Heim Hofbrunnstrasse 36 D-81479 München / DE | ||
| Former [1988/28] | Betten, Jürgen, Dipl.-Ing. Betten & Resch Patentanwälte Reichenbachstrasse 19 D-80469 München / DE | ||
| Former [1987/35] | Betten, Jürgen Dipl.-Ing. Betten & Gleiss Patentanwälte Reichenbachstrasse 19 D-8000 München 5 / DE | Application number, filing date | 86116308.7 | 25.11.1986 | [1987/35] | Priority number, date | JP19860028774 | 14.02.1986 Original published format: JP 2877486 | [1987/35] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0233333 | Date: | 26.08.1987 | Language: | EN | [1987/35] | Type: | A3 Search report | No.: | EP0233333 | Date: | 24.02.1988 | Language: | EN | [1988/08] | Type: | B1 Patent specification | No.: | EP0233333 | Date: | 10.02.1993 | Language: | EN | [1993/06] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.01.1988 | Classification | IPC: | G03F7/26 | [1987/35] | CPC: |
G03F7/2022 (EP)
| Designated contracting states | DE, GB, NL [1987/35] | Title | German: | Photolack-Behandlungsverfahren | [1987/35] | English: | Method of treating photoresists | [1987/35] | French: | Procédé de traitement de photoréserves | [1987/35] | Examination procedure | 24.07.1988 | Examination requested [1988/42] | 25.09.1990 | Despatch of a communication from the examining division (Time limit: M06) | 21.03.1991 | Reply to a communication from the examining division | 16.07.1991 | Despatch of a communication from the examining division (Time limit: M04) | 21.11.1991 | Reply to a communication from the examining division | 28.04.1992 | Despatch of communication of intention to grant (Approval: Yes) | 12.08.1992 | Communication of intention to grant the patent | 28.09.1992 | Fee for grant paid | 28.09.1992 | Fee for publishing/printing paid | Opposition(s) | Opponent(s) | 01
08.11.1993
17.12.1993
ADMISSIBLE FUSION SYSTEM CORPORATION 7600 Standish Place Rockville, Maryland 20855 / US Opponent's representative Prinz, Egon Prinz & Partner Manzingerweg 7 81241 München / DE | [N/P] |
| Former [1994/02] | |||
| Opponent(s) | 01
08.11.1993
17.12.1993
ADMISSIBLE FUSION SYSTEM CORPORATION 7600 Standish Place Rockville, Maryland 20855 / US Opponent's representative Prinz, Egon Prinz & Partner Manzingerweg 7 D-81241 München / DE | 17.01.1994 | Invitation to proprietor to file observations on the notice of opposition | 09.03.1995 | Date of oral proceedings | 24.03.1995 | Despatch of minutes of oral proceedings | 05.11.1996 | Date of despatch of rejection of opposition | 23.11.1996 | Legal effect of rejection of opposition [1997/04] | Appeal following opposition | 26.05.1995 | Appeal received No. T0480/95 | 27.07.1995 | Statement of grounds filed | 05.11.1996 | Result of appeal procedure: maintenance in unamended form | Fees paid | Renewal fee | 18.11.1988 | Renewal fee patent year 03 | 27.11.1989 | Renewal fee patent year 04 | 30.11.1990 | Renewal fee patent year 05 | 28.11.1991 | Renewal fee patent year 06 | 27.11.1992 | Renewal fee patent year 07 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | GB | 25.11.1995 | NL | 01.06.1996 | [1997/51] |
| Former [1996/47] | GB | 25.11.1995 | Documents cited: | Search | [Y]GB2143961 | [Y] - MICROELECTRONIC ENGINEERING, vol. 3, no. 1/4, December 1985, pages 329-337, Elsevier Science Publishers B.V., North-Holland, Amsterdam, NL; A. GUTMANN et al.: "Thermal stability and etching resistance of formaldehyde- and deep UV-hardened photoresists" | [Y] - SOLID STATE TECHNOLOGY, vol. 27, no. 7, July 1984, pages 45-46, Port Washington, New York, US; "Photoresist stabilization system" | [A] - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 26, no. 2, July 1983, pages 656-657, New York, US; F. MARTINET: "Control of resist-hardening process in a barrel plasma etcher system" | [A] - JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 29, no. 6, June 1982, pages 1379-1382, Princeton, New Jersey, US; R. ALLEN et al.: "Deep U.V. hardening of positive photoresist patterns" |