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Extract from the Register of European Patents

EP About this file: EP0252478

EP0252478 - Co-base alloy sputter target and process of manufacturing thereof [Right-click to bookmark this link]
StatusPatent revoked
Status updated on  05.07.1996
Database last updated on 15.07.2024
Most recent event   Tooltip17.04.2015Change - lapse in a contracting state
State(s) deleted from list of lapses: CH, LI
published on 20.05.2015  [2015/21]
Applicant(s)For all designated states
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
2500, Hagizono Chigasaki-shi
Kanagawa-ken / JP
[N/P]
Former [1988/33]For all designated states
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
2500, Hagizono
Chigasaki-shi Kanagawa-ken / JP
Former [1988/02]For all designated states
NIHON SHINKU GIJUTSU KABUSHIKI KAISHA also trading as ULVAC CORPORATION
2500, Hagizono
Chigasaki-shi Kanagawa-ken / JP
Inventor(s)01 / Nakamura, Kyuzo
No. 672-20, Yachimata Ho Yachimata-machi
Inba-gun Chiba-ken / JP
02 / Ota, Yoshifumi
No. 129, Yachimata Ni Yachimata-machi
Inba-gun Chiba-ken / JP
03 / Yamada, Taiki
No. 1-1-5-502, Hashikadai
Narita-shi Chiba-ken / JP
04 / Ishikawa, Michio
No. 106-352, Yachimata Ni Yachimata-machi
Inba-gun Chiba-ken / JP
05 / Tani, Noriaki Umenosato-Ryo
No. 617-2, Asahi Aza Umenosato Yachimata-machi
Inba-gun Chiba-ken / JP
06 / Higuchi, Yasushi Umenosato-Ryo
No. 617-2, Asahi Aza Umenosato Yachimata-machi
Inba-gun Chiba-ken / JP
[1993/40]
Former [1988/02]01 / Nakamura, Kyuzo
No. 672-20, Yachimata Ho Yachimata-machi
Inba-gun Chiba-ken / JP
02 / Ota, Yoshifumi
No. 129, Yachimata Ni Yachimata-machi
Inba-gun Chiba-ken / JP
03 / Yamada, Taiki
No. 1-1-5-502, Hashikadai
Narita-shi Chiba-ken / JP
04 / Ishikawa, Michio
No. 106-352, Yachimata Ni Yachimata-machi
Inba-gun Chiba-ken / JP
05 / Tani, Noriaki Umenosato-Ryo
No. 617-2, Asahi Aza Umenosato Yachimata-machi
Inba-gun Chiba-ken / JP
06 / HIguchi, Yasushi Umenosato-Ryo
No. 617-2, Asahi Aza Umenosato Yachimata-machi
Inba-gun Chiba-ken / JP
Representative(s)Schmidt-Evers, Jürgen, et al
Mitscherlich PartmbB
Patent- und Rechtsanwälte
Postfach 33 06 09
80066 München / DE
[N/P]
Former [1988/02]Schmidt-Evers, Jürgen, Dipl.-Ing., et al
Patentanwälte Mitscherlich & Partner Postfach 33 06 09
D-80066 München / DE
Application number, filing date87109731.706.07.1987
[1988/02]
Priority number, dateJP1986015875508.07.1986         Original published format: JP 15875586
[1988/02]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0252478
Date:13.01.1988
Language:EN
[1988/02]
Type: A3 Search report 
No.:EP0252478
Date:24.08.1988
Language:EN
[1988/34]
Type: B1 Patent specification 
No.:EP0252478
Date:06.10.1993
Language:EN
[1993/40]
Search report(s)(Supplementary) European search report - dispatched on:EP06.07.1988
ClassificationIPC:C23C14/34, C22F1/10
[1988/02]
CPC:
C23C14/3414 (EP,US); C22F1/10 (EP,US)
Designated contracting statesBE,   CH,   DE,   FR,   GB,   LI,   NL [1988/02]
TitleGerman:Target aus Kobalt-Basis für Kathodenzerstäubung und Verfahren zu seiner Herstellung[1988/02]
English:Co-base alloy sputter target and process of manufacturing thereof[1988/02]
French:Cible à base de cobalt pour dépôt par pulvérisation et procédé de sa fabrication[1988/02]
Examination procedure19.01.1989Examination requested  [1989/13]
28.05.1991Despatch of a communication from the examining division (Time limit: M06)
26.11.1991Reply to a communication from the examining division
25.09.1992Despatch of communication of intention to grant (Approval: Yes)
15.01.1993Communication of intention to grant the patent
20.04.1993Fee for grant paid
20.04.1993Fee for publishing/printing paid
Opposition(s)Opponent(s)01  03.06.1994   
Leybold Materials GmbH
Wilhelm-Rohn-Str. 25
D-63405 Hanau am Main / DE
 [1994/31]
22.09.1994Invitation to proprietor to file observations on the notice of opposition
11.05.1995Reply of patent proprietor to notice(s) of opposition
26.05.1995Communication of observations of patent proprietor (Time limit: M04)
14.06.1995Reply of parties involved to observations of patent proprietor
15.02.1996Date of oral proceedings
15.02.1996Legal effect of revocation of patent [1996/34]
25.03.1996Despatch of minutes of oral proceedings
25.03.1996Despatch of communication that the patent will be revoked
Fees paidRenewal fee
28.07.1989Renewal fee patent year 03
31.07.1990Renewal fee patent year 04
31.07.1991Renewal fee patent year 05
29.07.1992Renewal fee patent year 06
29.07.1993Renewal fee patent year 07
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipGB06.07.1995
BE31.07.1995
[2015/21]
Former [2000/52]CH06.10.1993
LI06.10.1993
GB06.07.1995
BE31.07.1995
Former [1996/31]GB06.07.1995
BE31.07.1995
Former [1996/30]GB06.07.1995
Documents cited:Search[A]JP60006219  ;
 [A]EP0054269  (TEIJIN LTD [JP]);
 [A]US4414087  (MECKEL BENJAMIN B [US]);
 [A]US3494807  (STUART ROBERT E, et al)
 [A]  - ZEITSCHRIFT FÜR METALLKUNDE, vol. 75, no. 11, November 1984, pages 847-854, Stuttgart, DE; J.A. THORNTON: "Hollow cathode magnetron sputtering of metallurgical coatings"
 [A]  - PATENT ABSTRACTS OF JAPAN, vol. 9, no. 121 (M-382)[1844], 25th May 1985; & JP-A-60 006 219 (MITSUI KINZOKU KOGYO K.K.) 12-01-1985, & JP60006219 A 00000000
ExaminationUS3626570
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.