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Extract from the Register of European Patents

EP About this file: EP0254128

EP0254128 - Method and arrangement for charge-free examination of a sample [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  05.06.1990
Database last updated on 07.10.2024
Most recent event   Tooltip07.07.2007Change - inventorpublished on 08.08.2007  [2007/32]
Applicant(s)For all designated states
SIEMENS AKTIENGESELLSCHAFT
Werner-von-Siemens-Str. 1
DE-80333 München / DE
[N/P]
Former [1988/04]For all designated states
SIEMENS AKTIENGESELLSCHAFT
Wittelsbacherplatz 2
D-80333 München / DE
Inventor(s)01 / Plies, Erich, Dr.
Deisenhofener Strasse 79 c
D-8000 München 90 / DE
[1988/04]
Application number, filing date87109817.407.07.1987
[1988/04]
Priority number, dateDE1986362519825.07.1986         Original published format: DE 3625198
[1988/04]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report 
No.:EP0254128
Date:27.01.1988
Language:DE
[1988/04]
Type: A3 Search report 
No.:EP0254128
Date:03.01.1990
Language:DE
[1990/01]
Search report(s)(Supplementary) European search report - dispatched on:EP14.11.1989
ClassificationIPC:G01N23/225, H01J37/02
[1990/03]
CPC:
G01N23/2251 (EP); H01J37/026 (EP)
Former IPC [1988/04]G01N23/225
Designated contracting statesDE,   FR,   GB,   IT,   NL [1988/04]
TitleGerman:Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe[1988/04]
English:Method and arrangement for charge-free examination of a sample[1988/04]
French:Procédé et dispositif pour examiner un échantillon sans charge[1988/04]
File destroyed:28.01.1999
Examination procedure01.02.1990Application deemed to be withdrawn, date of legal effect  [1990/30]
23.02.1990Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [1990/30]
Fees paidPenalty fee
Additional fee for renewal fee
31.07.198903   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]FR2173436  ;
 [A]DE3332248  ;
 [A]US4249077  ;
 [A]EP0114765
 [AD]  - IBM TECHNICAL DISCLOSURE BULLETIN, Band 27, nr. 11, April 1985, Seiten 5682-5697, New YorkUSA; "Wafer decharging during electron-beam exposure"
 [A]  - PHYSICAL REVIEW B. CONDENSED MATTER, Band 33, nr 8, April 1986, Seiten 5682-5697, New YorkUSA; M. LIEHR et al.: "Characterization of insulators by high-resolution electron-energy-loss spectroscopy: Application of a surface-potential stabilization technique"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.