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EP0263846
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EP About this file: EP0263846
| EP0263846 - METHOD AND APPARATUS FOR SPUTTERING A DIELECTRIC TARGET OR FOR REACTIVE SPUTTERING [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.07.1988 Database last updated on 22.05.2024 | Most recent event Tooltip | 19.07.1988 | Application deemed to be withdrawn | published on 07.09.1988 [1988/36] | Applicant(s) | For all designated states QUAZI, Fazle S 2031 Grandview Apartment No.F Boulder, CO 80302 / US | [1988/16] | Inventor(s) | 01 /
see applicant ... | [1988/16] | Application number, filing date | 87901886.9 | 17.02.1987 | [1988/16] | WO1987US00319 | Priority number, date | US19860829190 | 14.02.1986 Original published format: US 829190 | [1988/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO8705053 | Date: | 27.08.1987 | Language: | EN | [1987/19] | Type: | A1 Application with search report | No.: | EP0263846 | Date: | 20.04.1988 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.08.1987 takes the place of the publication of the European patent application. | [1988/16] | Search report(s) | International search report - published on: | US | 27.08.1987 | Classification | IPC: | C23C14/34 | [1988/16] | CPC: |
C23C14/0036 (EP,US);
C23C14/354 (EP,US);
H01J37/3408 (EP,US);
H01J37/3438 (EP,US)
| Designated contracting states | AT, BE, CH, DE, FR, GB, IT, LI, LU, NL, SE [1988/16] | Title | German: | VERFAHREN UND VORRICHTUNG ZUM BEDAMPFEN EINES DIELEKTRISCHEN GEGENSTANDES ODER ZUM AKTIVEN BEDAMPFEN | [1988/16] | English: | METHOD AND APPARATUS FOR SPUTTERING A DIELECTRIC TARGET OR FOR REACTIVE SPUTTERING | [1988/16] | French: | PROCEDE ET APPAREIL DE PULVERISATION SUR UNE CIBLE DIELECTRIQUE OU DE PULVERISATION REACTIVE | [1988/16] | File destroyed: | 30.08.1994 | Examination procedure | 17.11.1987 | Application deemed to be withdrawn, date of legal effect [1988/36] | 21.03.1988 | Despatch of communication that the application is deemed to be withdrawn, reason: filing fee / search fee not paid in time [1988/36] | Fees paid | Penalty fee | Penalty fee Rule 85a EPC 1973 | 16.11.1987 | AT M02 Not yet paid | 16.11.1987 | BE M02 Not yet paid | 16.11.1987 | CH M02 Not yet paid | 16.11.1987 | DE M02 Not yet paid | 16.11.1987 | FR M02 Not yet paid | 16.11.1987 | GB M02 Not yet paid | 16.11.1987 | IT M02 Not yet paid | 16.11.1987 | LU M02 Not yet paid | 16.11.1987 | NL M02 Not yet paid | 16.11.1987 | SE M02 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]US3464907 (FROEMEL JOHN G, et al); | [Y]US3594295 (MECKEL BENJAMIN B, et al); | [Y]US4046659 (CORMIA ROBERT L, et al); | [Y]US4131533 (BIALKO JOSEPH A, et al); | [YP]US4579618 (CELESTINO SALVATORE A [US], et al) |