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EP0289595
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Extract from the Register of European Patents
EP About this file: EP0289595
| EP0289595 - MULTILAYER RESIST STRUCTURE [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 21.03.1991 Database last updated on 15.07.2024 | Most recent event Tooltip | 21.03.1991 | Application deemed to be withdrawn | published on 08.05.1991 [1991/19] | Applicant(s) | For all designated states Hughes Aircraft Company 7200 Hughes Terrace P.O. Box 45066 Los Angeles, California 90045-0066 / US | [N/P] |
| Former [1990/33] | For all designated states Hughes Aircraft Company 7200 Hughes Terrace P.O. Box 45066 Los Angeles, California 90045-0066 / US | ||
| Former [1989/35] | For all designated states Hughes Aircraft Company 7200 Hughes Terrace P.O.Box 45066 Los Angeles California 90045-0066 / US | ||
| Former [1988/45] | For all designated states HUGHES AIRCRAFT COMPANY 7200 Hughes Terrace Los Angeles, California 90502 / US | Inventor(s) | 01 /
HENDERSON, Richard, C. 1121 Stoneshead Court Westlake Village, CA 91361 / US | 02 /
GARVIN, Hugh, L. 5540 Horizon Drive Malibu, CA 90265 / US | 03 /
BEAUBIEN, Randall, S. 31584-4 Agoura Road Westlake Village, CA 91361 / US | 04 /
RENSCH, David, B. 811 Capitan Thousand Oaks, CA 91320 / US | [1988/45] | Representative(s) | Winter, Brandl - Partnerschaft mbB Alois-Steinecker-Straße 22 85354 Freising / DE | [N/P] |
| Former [1989/35] | KUHNEN, WACKER & PARTNER Alois-Steinecker-Strasse 22 D-85354 Freising / DE | ||
| Former [1988/45] | KUHNEN, WACKER & PARTNER Patent- und Rechtsanwaltsbüro, Alois-Steineckerstrasse 22 D-85354 Freising / DE | Application number, filing date | 88900613.6 | 13.10.1987 | [1988/45] | WO1987US02611 | Priority number, date | US19860929683 | 12.11.1986 Original published format: US 929683 | [1988/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO8803703 | Date: | 19.05.1988 | Language: | EN | [1988/11] | Type: | A1 Application with search report | No.: | EP0289595 | Date: | 09.11.1988 | Language: | EN | The application published by WIPO in one of the EPO official languages on 19.05.1988 takes the place of the publication of the European patent application. | [1988/45] | Search report(s) | International search report - published on: | EP | 19.05.1988 | Classification | IPC: | H01L21/00, H01L21/312, G03F7/02 | [1988/45] | CPC: |
H01L21/0274 (EP,US);
H01L21/00 (KR);
G03F7/094 (EP);
H01L21/02118 (EP,KR);
H01L21/0277 (EP);
H01L21/31138 (EP)
| Designated contracting states | DE, FR, GB, IT, NL [1988/45] | Title | German: | MEHRSCHICHTIGE FOTOLACKSTRUKTUR | [1988/45] | English: | MULTILAYER RESIST STRUCTURE | [1988/45] | French: | STRUCTURE DE RESERVE MULTICOUCHE | [1988/45] | File destroyed: | 02.03.1998 | Entry into regional phase | 09.06.1988 | National basic fee paid | 09.06.1988 | Designation fee(s) paid | 09.06.1988 | Examination fee paid | Examination procedure | 09.06.1988 | Examination requested [1988/45] | 25.06.1990 | Despatch of a communication from the examining division (Time limit: M04) | 06.11.1990 | Application deemed to be withdrawn, date of legal effect [1991/19] | 07.12.1990 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [1991/19] | Fees paid | Renewal fee | 12.09.1989 | Renewal fee patent year 03 | 11.09.1990 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | EP0100736 [ ] (FAIRCHILD CAMERA INSTR CO [US]); | US4563241 [ ] (TANAKA TOSHIHIKO [JP], et al); | US4595649 [ ] (FERGUSON SUSAN A [US], et al) |