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EP0332140
European procedure
Extract from the Register of European Patents
EP About this file: EP0332140
| EP0332140 - Focusing apparatus of electron microscope [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 11.07.1997 Database last updated on 14.06.2024 | Most recent event Tooltip | 11.07.1997 | No opposition filed within time limit | published on 27.08.1997 [1997/35] | Applicant(s) | For all designated states Hitachi, Ltd. 6, Kanda Surugadai 4-chome Chiyoda-ku Tokyo 101 / JP | For all designated states HITACHI NAKA SEIKI, LTD. 1040, Ichige Katsuta-shi Ibaraki 312 / JP | [N/P] |
| Former [1989/37] | For all designated states HITACHI, LTD. 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 / JP | ||
| For all designated states HITACHI NAKA SEIKI, LTD. 1040, Ichige Katsuta-shi Ibaraki 312 / JP | Inventor(s) | 01 /
Tomizawa, Junichiro Daini Yuuwa-ryo B208 23-1, Ishikawa-cho Katsuta-shi Ibaraki 312 / JP | 02 /
Ozasa, Susumu 663-6-206, Ichige Katsuta-shi Ibaraki 312 / JP | [1989/37] | Representative(s) | Strehl Schübel-Hopf & Partner Maximilianstrasse 54 80538 München / DE | [N/P] |
| Former [1989/37] | Strehl Schübel-Hopf Groening & Partner Maximilianstrasse 54 D-80538 München / DE | Application number, filing date | 89104003.2 | 07.03.1989 | [1989/37] | Priority number, date | JP19880053823 | 09.03.1988 Original published format: JP 5382388 | [1989/37] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0332140 | Date: | 13.09.1989 | Language: | EN | [1989/37] | Type: | A3 Search report | No.: | EP0332140 | Date: | 20.06.1990 | Language: | EN | [1990/25] | Type: | B1 Patent specification | No.: | EP0332140 | Date: | 04.09.1996 | Language: | EN | [1996/36] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 02.05.1990 | Classification | IPC: | H01J37/21 | [1989/37] | CPC: |
H01J37/21 (EP,US);
H01J37/153 (EP,US)
| Designated contracting states | DE, GB [1989/37] | Title | German: | Fokussierungseinrichtung für Elektronenmikroskop | [1989/37] | English: | Focusing apparatus of electron microscope | [1989/37] | French: | Dispositif de focalisation pour microscope électronique | [1989/37] | Examination procedure | 30.07.1990 | Examination requested [1990/39] | 24.08.1992 | Despatch of a communication from the examining division (Time limit: M04) | 04.01.1993 | Reply to a communication from the examining division | 26.02.1993 | Despatch of a communication from the examining division (Time limit: M02) | 03.05.1993 | Reply to a communication from the examining division | 26.07.1993 | Despatch of a communication from the examining division (Time limit: M06) | 18.03.1994 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 30.05.1994 | Reply to a communication from the examining division | 06.07.1994 | Despatch of a communication from the examining division (Time limit: M02) | 16.09.1994 | Reply to a communication from the examining division | 10.02.1995 | Despatch of a communication from the examining division (Time limit: M02) | 20.04.1995 | Reply to a communication from the examining division | 11.09.1995 | Despatch of communication of intention to grant (Approval: Yes) | 07.02.1996 | Communication of intention to grant the patent | 08.05.1996 | Fee for grant paid | 08.05.1996 | Fee for publishing/printing paid | Opposition(s) | 05.06.1997 | No opposition filed within time limit [1997/35] | Request for further processing for: | 30.05.1994 | Request for further processing filed | 30.05.1994 | Full payment received (date of receipt of payment) Request granted | 22.06.1994 | Decision despatched | Fees paid | Renewal fee | 28.12.1990 | Renewal fee patent year 03 | 19.03.1992 | Renewal fee patent year 04 | 29.03.1993 | Renewal fee patent year 05 | 28.03.1994 | Renewal fee patent year 06 | 27.03.1995 | Renewal fee patent year 07 | 28.03.1996 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JP60241633 ; | [AD]GB2011656 (JEOL LTD) | [X] - JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS, vol. 20, no. 1, January 1987, pages 67-73, Bristol, GB; T. SUGANUMA: "A novel method for automatic measurement and correction of astigmatism in the SEM" | [A] - PATENT ABSTRACTS OF JAPAN, vol. 10, no. 99 (E-396)[2156], 16th April 1986; & JP-A-60 241 633 (HITACHI) 30-11-1985, & JP60241633 A 00000000 |