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EP0359153
European procedure
Extract from the Register of European Patents
EP About this file: EP0359153
| EP0359153 - Split-phase driver for plasma etch system [Right-click to bookmark this link] | Status | Patent maintained as amended Status updated on 18.04.2003 Database last updated on 11.04.2026 | Most recent event Tooltip | 05.10.2005 | Change: Appeal number | Applicant(s) | For all designated states LAM RESEARCH CORPORATION 4650 Cushing Parkway Fremont, CA 94538-6401 / US | [1990/12] | Inventor(s) | 01 /
Ogle, John 1472 Pashote Court Milpitas, CA. 95035 / US | 02 /
Yin, Gerald 1126 Hyde Avenue San Jose, CA. 95129 / US | [1990/12] | Representative(s) | Browne, Robin Forsythe Urquhart-Dykes & Lord LLP Tower North Central Merrion Way Leeds LS2 8PA / GB | [N/P] |
| Former [1999/21] | Browne, Robin Forsythe, Dr. Urquhart-Dykes & Lord Tower House Merrion Way Leeds LS2 8PA West Yorkshire / GB | ||
| Former [1990/12] | Sparing - Röhl - Henseler Patentanwälte Postfach 14 04 43 D-40074 Düsseldorf / DE | Application number, filing date | 89116697.7 | 09.09.1989 | [1990/12] | Priority number, date | US19880245082 | 15.09.1988 Original published format: US 245082 | [1990/12] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0359153 | Date: | 21.03.1990 | Language: | EN | [1990/12] | Type: | A3 Search report | No.: | EP0359153 | Date: | 06.02.1991 | Language: | EN | [1991/06] | Type: | B1 Patent specification | No.: | EP0359153 | Date: | 24.05.1995 | Language: | EN | [1995/21] | Type: | B2 New European patent specification | No.: | EP0359153 | Date: | 04.06.2003 | Language: | EN | [2003/23] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 19.12.1990 | Classification | IPC: | H01J37/32 | [1990/12] | CPC: |
H01J37/32174 (EP,US);
H01J37/32532 (KR);
H01J37/32082 (EP,US);
H01J37/32183 (KR);
H10P50/242 (KR);
H10P72/0421 (KR);
H01J2237/334 (EP,US)
(-)
| Designated contracting states | DE, FR, GB, IT, NL [1990/12] | Title | German: | Phasengeteilter Treiber für ein Plasmaätzsystem | [1990/12] | English: | Split-phase driver for plasma etch system | [1990/12] | French: | Dispositif d'attaque à phase divisée pour système d'enlevage à plasma | [1990/12] | Examination procedure | 16.07.1991 | Examination requested [1991/37] | 05.08.1993 | Despatch of a communication from the examining division (Time limit: M06) | 08.02.1994 | Reply to a communication from the examining division | 08.07.1994 | Despatch of a communication from the examining division (Time limit: M02) | 14.07.1994 | Reply to a communication from the examining division | 29.08.1994 | Despatch of communication of intention to grant (Approval: No) | 21.11.1994 | Despatch of communication of intention to grant (Approval: later approval) | 28.11.1994 | Communication of intention to grant the patent | 10.02.1995 | Fee for grant paid | 10.02.1995 | Fee for publishing/printing paid | Opposition(s) | Opponent(s) | 01
26.02.1996
29.03.1996
ADMISSIBLE Institute of Technological Information Inc. 5-3, Kitahara 2-Chome, Asaka-shi, Saitama-ken 351-0036 / JP Opponent's representative von Fischern, Bernhard Hoffmann - Eitle Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | [N/P] |
| Former [1996/17] | |||
| Opponent(s) | 01
26.02.1996
29.03.1996
ADMISSIBLE Institute of Technical Information, Inc. 2-2, Kitahara 2-chome Asaka-shi, Saitama-ken, 351 / JP Opponent's representative von Fischern, Bernhard Hoffmann Eitle Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | 03.04.1996 | Invitation to proprietor to file observations on the notice of opposition | 25.09.1996 | Reply of patent proprietor to notice(s) of opposition | 08.10.1996 | Communication of observations of patent proprietor (Time limit: M04) | 10.02.1997 | Reply of parties involved to observations of patent proprietor | 08.06.1999 | Date of oral proceedings | 28.01.2000 | Despatch of interlocutory decision in opposition | 28.01.2000 | Despatch of minutes of oral proceedings | 07.02.2001 | Legal effect of interlocutory decision in opposition | 29.01.2003 | Despatch of communication that the patent will be maintained as amended | 12.02.2003 | Fee for printing new specification paid | Appeal following opposition | 28.03.2000 | Appeal received No. T0372/00 | 29.05.2000 | Statement of grounds filed | 27.06.2002 | Result of appeal procedure: maintenance in amended form | 27.06.2002 | Date of oral proceedings | 02.07.2002 | Minutes of the oral proceedings despatched | Fees paid | Renewal fee | 20.09.1991 | Renewal fee patent year 03 | 06.08.1992 | Renewal fee patent year 04 | 21.09.1993 | Renewal fee patent year 05 | 23.09.1994 | Renewal fee patent year 06 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | Opposition | ELEKTROTECHNIK-ELEKTRONIK, Buch und Zeit Verlag, Lindner et al, 1982, pages 147, 152, 153 |