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Extract from the Register of European Patents

EP About this file: EP0427910

EP0427910 - A boron source for silicon molecular beam epitaxy [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  24.12.1994
Database last updated on 19.10.2024
Most recent event   Tooltip26.07.1995Lapse of the patent in a contracting statepublished on 13.09.1995 [1995/37]
Applicant(s)For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
[N/P]
Former [1991/21]For all designated states
International Business Machines Corporation
Old Orchard Road
Armonk, N.Y. 10504 / US
Inventor(s)01 / Delage, Sylvain Laurent
49 rue de Dantzig
F-75015 Paris / FR
02 / Ek, Bruce Allen
15 Shore Road
Pelham Manor, New York 10803 / US
03 / Iyer, Subramanian Sirkanteswara
3172 Cedar Road
Yorktown Heights, New York 10598 / US
[1991/21]
Representative(s)Schäfer, Wolfgang
IBM Deutschland
Informationssysteme GmbH
Patentwesen und Urheberrecht
70548 Stuttgart / DE
[N/P]
Former [1994/38]Schäfer, Wolfgang, Dipl.-Ing.
IBM Deutschland Informationssysteme GmbH Patentwesen und Urheberrecht
D-70548 Stuttgart / DE
Former [1994/08]Mönig, Anton, Dipl.-Ing.
IBM Deutschland Informationssysteme GmbH, Patentwesen und Urheberrecht
D-70548 Stuttgart / DE
Former [1991/21]Klocke, Peter, Dipl.-Ing.
IBM Deutschland Informationssysteme GmbH Patentwesen und Urheberrecht Pascalstrasse 100
D-70569 Stuttgart / DE
Application number, filing date90111167.413.06.1990
[1991/21]
Priority number, dateUS1989041918810.10.1989         Original published format: US 419188
[1991/21]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0427910
Date:22.05.1991
Language:EN
[1991/21]
Type: B1 Patent specification 
No.:EP0427910
Date:23.02.1994
Language:EN
[1994/08]
Search report(s)(Supplementary) European search report - dispatched on:EP22.03.1991
ClassificationIPC:C30B23/02, C30B29/06, C22C1/02
[1991/21]
CPC:
C30B29/06 (EP,US); C30B23/002 (EP,US)
Designated contracting statesDE,   FR,   GB [1991/21]
TitleGerman:Borquelle für Molekularstrahlepitaxie[1991/21]
English:A boron source for silicon molecular beam epitaxy[1991/21]
French:Source de bore pour l'épitaxie par jets moléculaires[1991/21]
File destroyed:03.03.2001
Examination procedure13.12.1990Examination requested  [1991/21]
26.04.1993Despatch of communication of intention to grant (Approval: Yes)
03.08.1993Communication of intention to grant the patent
23.10.1993Fee for grant paid
23.10.1993Fee for publishing/printing paid
Opposition(s)24.11.1994No opposition filed within time limit [1995/07]
Fees paidRenewal fee
19.06.1992Renewal fee patent year 03
24.06.1993Renewal fee patent year 04
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Lapses during opposition  TooltipGB13.06.1994
[1995/37]
Documents cited:Search[AD]US3949119  (SHEWCHUN JOHN, et al)
 [A]  - APPLIED PHYSICS LETTERS, vol. 48, no. 3, January 1986, pages 221-223, New York, NY, US; R. OSTROM et al.: "Boron doping in Si-molecular beam epitaxy by co-evaporation of B2O3 or doped silicon"
 [AD]  - J. ELECTROCHEM. SOC., vol. 124, no. 11, November 1977, pages 1795-1802, Manchester, MH, US; Y. OTA: "Si molecular beam epitaxy (n in n+) with wide range doping control"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.