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EP0429081
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EP About this file: EP0429081
| EP0429081 - Silicon wafer temperature measurement by optical transmission monitoring [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 23.08.1993 Database last updated on 03.06.2024 | Most recent event Tooltip | 23.08.1993 | Withdrawal of application | published on 13.10.1993 [1993/41] | Applicant(s) | For all designated states RESEARCH CORPORATION TECHNOLOGIES, INC. 6840 East Broadway Boulevard Tucson Arizona 85710-2815 / US | [N/P] |
| Former [1991/22] | For all designated states RESEARCH CORPORATION TECHNOLOGIES, INC. 6840 East Broadway Boulevard Tucson Arizona 85710-2815 / US | Inventor(s) | 01 /
Sturm, James C. 96 Spring Hill Road Skillman, New Jersey / US | 02 /
Schwartz, Peter V. 1102 Lawrence Apt. Princeton, New Jersey / US | 03 /
Garone, Peter M. E1 Lawrence Apt. Princeton, New Jersey / US | [1991/22] | Representative(s) | Körber, Wolfhart, et al Mitscherlich & Partner Patentanwälte Postfach 33 06 09 80066 München / DE | [N/P] |
| Former [1993/19] | Körber, Wolfhart, Dr.rer.nat., et al Patentanwälte Mitscherlich & Partner Postfach 33 06 09 D-80066 München / DE | ||
| Former [1991/22] | Körber, Wolfhart, Dr.rer.nat. Patentanwälte Mitscherlich & Partner, Sonnenstrasse 33, Postfach 33 06 09 W-8000 München 33 / DE | Application number, filing date | 90122337.0 | 22.11.1990 | [1991/22] | Priority number, date | US19890440540 | 22.11.1989 Original published format: US 440540 | [1991/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0429081 | Date: | 29.05.1991 | Language: | EN | [1991/22] | Type: | A3 Search report | No.: | EP0429081 | Date: | 21.08.1991 | Language: | EN | [1991/34] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.07.1991 | Classification | IPC: | G01K11/12 | [1991/22] | CPC: |
G01K11/12 (EP)
| Designated contracting states | DE [1991/22] | Title | German: | Temperaturmessung an einer Siliciumplaquette durch Erfassung der optischen Transmission | [1991/22] | English: | Silicon wafer temperature measurement by optical transmission monitoring | [1991/22] | French: | Mesure de la température d'une plaquette en silice par transmission optique | [1991/22] | File destroyed: | 12.06.1999 | Examination procedure | 16.12.1991 | Examination requested [1992/09] | 16.08.1993 | Application withdrawn by applicant [1993/41] | Fees paid | Renewal fee | 09.10.1992 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US4823291 ; | [XP]US4890245 ; | [A]EP0111853 |