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Extract from the Register of European Patents

EP About this file: EP0396239

EP0396239 - Apparatus for producing semiconductors by vapour phase deposition [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  15.07.1995
Database last updated on 03.09.2024
Most recent event   Tooltip15.07.1995No opposition filed within time limitpublished on 06.09.1995 [1995/36]
Applicant(s)For all designated states
DAIDOUSANSO CO., LTD.
20-16, Higashishinsaibashi 1-chome, Chuo-ku Osaka-shi
Osaka 542 / JP
[N/P]
Former [1990/45]For all designated states
DAIDOUSANSO CO., LTD.
20-16, Higashishinsaibashi 1-chome, Chuo-ku
Osaka-shi, Osaka 542 / JP
Inventor(s)01 / Yoshino, Akira
30-13, Nishiyamadai 2-chome
Osakasayama-shi, Osaka 589 / JP
02 / Ohmori, Yoshinori
Shomonoike Jutaku 13-109 545 Nagasonecho
Saika-shi, Osaka 591 / JP
03 / Okumura, Kenji
2-134-2 Aho
Matsubara-shi, Osaka 580 / JP
04 / Ohnishi, Toshiharu
3-20-504, Takabedai 3-chome
Tondabayashi-shi, Osaka 584 / JP
[1990/45]
Representative(s)Marlow, Nicholas Simon, et al
Reddie & Grose LLP The White Chapel Building
10 Whitechapel High Street
London E1 8QS / GB
[N/P]
Former [1990/45]Marlow, Nicholas Simon, et al
Reddie & Grose 16, Theobalds Road
London WC1X 8PL / GB
Application number, filing date90302831.416.03.1990
[1990/45]
Priority number, dateJP1989009165110.04.1989         Original published format: JP 9165189
JP19890039862U03.04.1989         Original published format: JP 3986289 U
[1990/45]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0396239
Date:07.11.1990
Language:EN
[1990/45]
Type: A3 Search report 
No.:EP0396239
Date:27.03.1991
Language:EN
[1991/13]
Type: B1 Patent specification 
No.:EP0396239
Date:14.09.1994
Language:EN
[1994/37]
Search report(s)(Supplementary) European search report - dispatched on:EP07.02.1991
ClassificationIPC:C30B25/14, C23C16/44
[1991/19]
CPC:
C23C16/45514 (EP,US); H01L21/205 (KR); C23C16/455 (EP,US);
C23C16/45591 (EP,US); C30B25/14 (EP,US)
Former IPC [1990/45]C30B25/14
Designated contracting statesDE,   FR,   GB,   NL [1990/45]
TitleGerman:Vorrichtung zur Herstellung von Halbleitern durch Abscheidung aus der Gasphase[1990/45]
English:Apparatus for producing semiconductors by vapour phase deposition[1990/45]
French:Appareillage pour la production de semi-conducteurs par dépôt à partir de la phase gazeuse[1990/45]
Examination procedure10.09.1991Examination requested  [1991/45]
08.11.1993Despatch of communication of intention to grant (Approval: No)
04.03.1994Despatch of communication of intention to grant (Approval: later approval)
09.03.1994Communication of intention to grant the patent
31.05.1994Fee for grant paid
31.05.1994Fee for publishing/printing paid
Opposition(s)15.06.1995No opposition filed within time limit [1995/36]
Fees paidRenewal fee
27.03.1992Renewal fee patent year 03
23.03.1993Renewal fee patent year 04
21.03.1994Renewal fee patent year 05
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Documents cited:Search[A]JP59104117  ;
 [A]US3916822  (ROBINSON MCDONALD)
 [A]  - PATENT ABSTRACTS OF JAPAN, vol. 8, no. 221 (E-271)[1658], 1st October 1984; & JP-A-59 104 117 (KOGYO GIJUTSUIN (JAPAN)) 15-06-1984, & JP59104117 A 00000000
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.