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Extract from the Register of European Patents

EP About this file: EP0472970

EP0472970 - Process for growing crystalline thin film [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  16.05.1997
Database last updated on 24.07.2024
Most recent event   Tooltip07.12.2007Lapse of the patent in a contracting statepublished on 09.01.2008  [2008/02]
Applicant(s)For all designated states
CANON KABUSHIKI KAISHA
30-2, 3-chome, Shimomaruko, Ohta-ku
Tokyo / JP
[N/P]
Former [1992/10]For all designated states
CANON KABUSHIKI KAISHA
30-2, 3-chome, Shimomaruko, Ohta-ku
Tokyo / JP
Inventor(s)01 / Kumomi, Hideya, c/o Canon Kabushiki Kaisha
30-2, 3-chome, Shimomaruko
Ohta-ku, Tokyo / JP
[1992/10]
Representative(s)Bühling, Gerhard
Patentanwaltsbüro Tiedtke-Bühling-Kinne & Partner Bavariaring 4
80336 München / DE
[N/P]
Former [1992/10]Bühling, Gerhard, Dipl.-Chem.
Patentanwaltsbüro Tiedtke-Bühling-Kinne & Partner Bavariaring 4
D-80336 München / DE
Application number, filing date91113264.507.08.1991
[1992/10]
Priority number, dateJP1990020817408.08.1990         Original published format: JP 20817490
[1992/10]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0472970
Date:04.03.1992
Language:EN
[1992/10]
Type: A3 Search report 
No.:EP0472970
Date:08.04.1992
Language:EN
[1992/15]
Type: B1 Patent specification 
No.:EP0472970
Date:10.07.1996
Language:EN
[1996/28]
Search report(s)(Supplementary) European search report - dispatched on:EP20.02.1992
ClassificationIPC:C30B1/02, C30B29/06
[1992/10]
CPC:
C30B1/023 (EP,US); C30B29/06 (EP,US); Y10S117/913 (EP,US)
Designated contracting statesDE,   FR,   GB,   IT,   NL [1992/10]
TitleGerman:Verfahren zur Züchtung eines dünnen kristallinen Films[1992/10]
English:Process for growing crystalline thin film[1992/10]
French:Procédé pour la croissance d'un film mince cristallin[1992/10]
Examination procedure25.08.1992Examination requested  [1992/43]
29.04.1994Despatch of a communication from the examining division (Time limit: M06)
07.11.1994Reply to a communication from the examining division
31.01.1995Despatch of a communication from the examining division (Time limit: M06)
02.08.1995Reply to a communication from the examining division
04.09.1995Despatch of communication of intention to grant (Approval: Yes)
10.01.1996Communication of intention to grant the patent
10.04.1996Fee for grant paid
10.04.1996Fee for publishing/printing paid
Opposition(s)11.04.1997No opposition filed within time limit [1997/27]
Fees paidRenewal fee
26.08.1993Renewal fee patent year 03
30.08.1994Renewal fee patent year 04
29.08.1995Renewal fee patent year 05
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Lapses during opposition  TooltipFR10.07.1996
IT10.07.1996
[2008/02]
Former [2004/35]FR10.07.1996
IT10.07.1996
Former [1999/42]IT10.07.1996
FR06.12.1996
Former [1997/18]FR06.12.1996
Documents cited:Search[X]JP61261285  ;
 [A]JP62167295  ;
 [YD]JPS63253616  (SONY CORP);
 [A]EP0306154  (CANON KK [JP])
 [X]  - PATENT ABSTRACTS OF JAPAN, vol. 11, no. 124 (C-416)[2571], 17th April 1987; & JP-A-61 261 285 (NEC CORP.) 19-11-1986, & JP61261285 A 00000000
 [AD]  - J. APPL. PHYSICS, vol. 65, no. 10, 15th May 1989, pages 4036-4039, New York, US; I.-W. WU et al.: "Retardation of nucleation rate for grain size enhancement by deep silicon ion implantation of low-pressure chemical vapor deposited amorphous silicon films"
 [A]  - PATENT ABSTRACTS OF JAPAN, vol. 12, no. 11 (C-468)[2858], 13th january 1988; & JP-A-62 167 295 (NEC CORP.) 23-07-1987, & JP62167295 A 00000000
 [AD]  - ELECTRONIC LETTERS, vol. 17, no. 17, 20th August 1981, pages 586-588; R. REIF et al.: "Low-temperature process to increase the grain size in polysilicon films"
Examination   - J. APPL. PHYSICS, vol. 65, no. 10, 15th May 1989, pages 4036-4039, New York, US; Summary page 4039
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.