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Extract from the Register of European Patents

EP About this file: EP0447132

EP0447132 - Reflection-type photomask and reflection-type photolithography method [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  17.05.1996
Database last updated on 05.10.2024
Most recent event   Tooltip07.03.1997Lapse of the patent in a contracting state
New state(s): GB
published on 23.04.1997 [1997/17]
Applicant(s)For all designated states
FUJITSU LIMITED
1015, Kamikodanaka, Nakahara-ku Kawasaki-shi
Kanagawa 211 / JP
[N/P]
Former [1991/38]For all designated states
FUJITSU LIMITED
1015, Kamikodanaka, Nakahara-ku
Kawasaki-shi, Kanagawa 211 / JP
Inventor(s)01 / Nakagawa Kenji
3-9-5, Takamoridai
Isehara-shi, Kanagawa, 259-11 / JP
02 / Kawashima, Kenichi
1-28-11, Kaminagaya, Kounan-ku
Yokohama-shi, Kanagawa, 233 / JP
[1991/38]
Representative(s)Billington, Lawrence Emlyn, et al
Haseltine Lake LLP Lincoln House, 5th Floor 300 High Holborn
London WC1V 7JH / GB
[N/P]
Former [1991/38]Billington, Lawrence Emlyn, et al
HASELTINE LAKE & CO Hazlitt House 28 Southampton Buildings Chancery Lane
London WC2A 1AT / GB
Application number, filing date91301925.307.03.1991
[1991/38]
Priority number, dateJP1990006760116.03.1990         Original published format: JP 6760190
[1991/38]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0447132
Date:18.09.1991
Language:EN
[1991/38]
Type: B1 Patent specification 
No.:EP0447132
Date:05.07.1995
Language:EN
[1995/27]
Search report(s)(Supplementary) European search report - dispatched on:EP22.07.1991
ClassificationIPC:G03F1/14
[1991/38]
CPC:
G03F1/26 (EP,US)
Designated contracting statesDE,   FR,   GB [1991/38]
TitleGerman:Reflexionsphotomaske und photolithographisches Verfahren vom Reflexionstyp[1991/38]
English:Reflection-type photomask and reflection-type photolithography method[1991/38]
French:Photomasque du type à réflexion et méthode photolithographique du type à réflexion[1991/38]
Examination procedure09.12.1991Examination requested  [1992/06]
29.08.1994Despatch of communication of intention to grant (Approval: Yes)
05.01.1995Communication of intention to grant the patent
30.03.1995Fee for grant paid
30.03.1995Fee for publishing/printing paid
Opposition(s)10.04.1996No opposition filed within time limit [1996/27]
Fees paidRenewal fee
03.03.1993Renewal fee patent year 03
01.03.1994Renewal fee patent year 04
02.03.1995Renewal fee patent year 05
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Lapses during opposition  TooltipDE06.10.1995
GB07.03.1996
[1997/17]
Former [1996/14]DE06.10.1995
Documents cited:Search[A]EP0279670  (CANON KK [JP]);
 [AD]EP0395425  (FUJITSU LTD [JP]);
 [AP]EP0401795  (OKI ELECTRIC IND CO LTD [JP])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.