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EP About this file: EP0528995

EP0528995 - SEMICONDUCTOR PROCESSOR APPARATUS WITH DYNAMIC WAFER VAPOR TREATMENT AND PARTICLE VOLATILIZATION [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 28.05.1999 Database last updated on 24.04.2024
Most recent event Tooltip	07.12.2007	Lapse of the patent in a contracting state New state(s): IT	published on 09.01.2008 [2008/02]
Applicant(s)	For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell Montana 59901 / US
	[N/P]
Former [1993/09]	For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell, Montana 59901 / US
Inventor(s)	01 / BERGMAN, Eric, J. 120 Midale Kalispell, MT 59901 / US
	02 / REARDON, Timothy, J. 643 Granite View Drive Kalispell, MT 59901 / US
	03 / THOMPSON, Raymon, F. 275 Tamarack Terrace Post Office Box 241 Lakeside, MT 59922 / US
	04 / OWCZARZ, Aleksander 145 Northridge Drive Kalispell, MT 59901 / US
	[1993/09]
Representative(s)	Blatchford, William Michael, et al Withers & Rogers LLP 4 More London Riverside London SE1 2AU / GB
	[N/P]
Former [1998/30]	Blatchford, William Michael, et al Withers & Rogers 4 Dyer's Buildings Holborn London EC1N 2JT / GB
Former [1993/09]	Blatchford, William Charles, et al WITHERS & ROGERS 4 Dyers Buildings Holborn London, EC1N 2JT / GB
Application number, filing date	91911521.2	19.04.1991
	[1993/09]
	WO1991US02956
Priority number, date	US19900524239	15.05.1990 Original published format: US 524239
	US19900526052	21.05.1990 Original published format: US 526052
	US19900526057	21.05.1990 Original published format: US 526057
	US19900526243	18.05.1990 Original published format: US 526243
	US19910665942	06.03.1991 Original published format: US 665942
	US19910665609	06.03.1991 Original published format: US 665609
	[1993/09]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO9117897
	Date:	28.11.1991
	Language:	EN
	[1991/27]
	Type:	A1 Application with search report
	No.:	EP0528995
	Date:	03.03.1993
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 28.11.1991 takes the place of the publication of the European patent application.
	[1993/09]
	Type:	B1 Patent specification
	No.:	EP0528995
	Date:	22.07.1998
	Language:	EN
	[1998/30]
Search report(s)	International search report - published on:	US	28.11.1991
	(Supplementary) European search report - dispatched on:	EP	17.03.1993
Classification	IPC:	H01L21/00	[1993/18]
	CPC:	H01L21/68728 (EP); H01L21/67023 (EP); H01L21/67075 (EP); H01L21/6708 (EP); H01L21/67086 (EP); H01L21/68785 (EP); (+) G11B7/26 (EP) (-)
	Former IPC [1993/09]	B44C1/22, C03C15/00, C03C25/06
Designated contracting states	AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LI, LU, NL, SE [1993/09]
Title	German:	VORRICHTUNG ZUR HERSTELLUNG VON HALBLEITERSCHICHTEN MIT DYNAMISCHER DAMPFBEHANDLUNG UND TEILCHENVERFLÜCHTIGUNG	[1993/09]
	English:	SEMICONDUCTOR PROCESSOR APPARATUS WITH DYNAMIC WAFER VAPOR TREATMENT AND PARTICLE VOLATILIZATION	[1993/09]
	French:	APPAREIL DE TRAITEMENT DYNAMIQUE DE TRANCHES DE SEMICONDUCTEURS EN PHASE VAPEUR ET PAR VOLATILISATION DE PARTICULES	[1993/09]
Entry into regional phase	12.12.1992	National basic fee paid
	12.12.1992	Search fee paid
	12.12.1992	Designation fee(s) paid
	12.12.1992	Examination fee paid
Examination procedure	03.12.1991	Request for preliminary examination filed International Preliminary Examining Authority: DE
	12.12.1992	Examination requested [1993/09]
	18.03.1994	Despatch of a communication from the examining division (Time limit: M06)
	27.09.1994	Reply to a communication from the examining division
	28.10.1994	Despatch of a communication from the examining division (Time limit: M06)
	05.05.1995	Reply to a communication from the examining division
	05.03.1996	Despatch of a communication from the examining division (Time limit: M06)
	09.07.1996	Reply to a communication from the examining division
	20.02.1997	Despatch of communication of intention to grant (Approval: No)
	06.10.1997	Despatch of communication that the application is refused, reason: formalities examination {1}
	22.01.1998	Despatch of communication of intention to grant (Approval: later approval)
	29.01.1998	Communication of intention to grant the patent
	04.05.1998	Fee for grant paid
	04.05.1998	Fee for publishing/printing paid
Divisional application(s)	EP97122754.1 / EP0853332
Opposition(s)	23.04.1999	No opposition filed within time limit [1999/28]
Request for further processing for:	10.12.1997	Request for further processing filed
	10.12.1997	Full payment received (date of receipt of payment) Request granted
	12.01.1998	Decision despatched
Fees paid	Renewal fee
	26.04.1993	Renewal fee patent year 03
	18.04.1994	Renewal fee patent year 04
	31.03.1995	Renewal fee patent year 05
	25.04.1996	Renewal fee patent year 06
	17.03.1997	Renewal fee patent year 07
	04.03.1998	Renewal fee patent year 08
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	BE	22.07.1998
	ES	22.07.1998
	GR	22.07.1998
	IT	22.07.1998
	DK	22.10.1998
	SE	22.10.1998
	LU	19.04.1999
	[2008/02]
Former [2004/39]	BE	22.07.1998
	ES	22.07.1998
	GR	22.07.1998
	DK	22.10.1998
	SE	22.10.1998
	LU	19.04.1999
Former [2003/45]	BE	22.07.1998
	ES	22.07.1998
	GR	22.07.1998
	DK	22.10.1998
	SE	22.10.1998
Former [2002/25]	BE	22.07.1998
	ES	22.07.1998
	GR	22.07.1998
	SE	22.10.1998
Former [2001/23]	BE	22.07.1998
	GR	22.07.1998
	SE	22.10.1998
Former [1999/29]	BE	22.07.1998
	SE	22.10.1998
Former [1999/27]	BE	22.07.1998
Documents cited:	Search	[A]US4749440 (BLACKWOOD ROBERT S [US], et al);
		[A]EP0271958 (PHILIPS ELECTRONICS UK LTD [GB], et al);
		[A]WO8807263 (MONARCH TECHNOLOGIES CORP [US])
	International search	[A]US4749440 (BLACKWOOD ROBERT S [US], et al)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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