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Extract from the Register of European Patents

EP About this file: EP0566574

EP0566574 - INTELLIGENT MASS FLOW CONTROLLER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.11.1995
Database last updated on 03.06.2024
Most recent event   Tooltip18.11.1995No opposition filed within time limitpublished on 10.01.1996 [1996/02]
Applicant(s)For all designated states
SEMATECH, INC.
2706 Montopolis Drive
Austin, TX 78741-6499 / US
[1993/43]
Inventor(s)01 / ANDERSON, Richard, L.
2002 Key West Cove
Austin, TX 78746 / US
[1993/43]
Representative(s)Grünecker Patent- und Rechtsanwälte PartG mbB
Leopoldstrasse 4
80802 München / DE
[N/P]
Former [1993/43]Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
Maximilianstrasse 58
D-80538 München / DE
Application number, filing date91918645.224.09.1991
[1993/43]
WO1991US06963
Priority number, dateUS1991063827907.01.1991         Original published format: US 638279
[1993/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9212474
Date:23.07.1992
Language:EN
[1992/19]
Type: A1 Application with search report 
No.:EP0566574
Date:27.10.1993
Language:EN
The application published by WIPO in one of the EPO official languages on 23.07.1992 takes the place of the publication of the European patent application.
[1993/43]
Type: B1 Patent specification 
No.:EP0566574
Date:18.01.1995
Language:EN
[1995/03]
Search report(s)International search report - published on:EP23.07.1992
ClassificationIPC:G05D7/06, G01F1/68
[1993/43]
CPC:
G05D7/0635 (EP,US); Y10T137/7737 (EP,US); Y10T137/7759 (EP,US);
Y10T137/7761 (EP,US)
Designated contracting statesDE,   FR,   GB [1993/43]
TitleGerman:INTELLIGENTE MASSENDURCHFLUSSVORRICHTUNG[1993/43]
English:INTELLIGENT MASS FLOW CONTROLLER[1993/43]
French:COMMANDE INTELLIGENTE DE FLUX MASSIQUE[1993/43]
Entry into regional phase05.07.1993National basic fee paid 
05.07.1993Designation fee(s) paid 
05.07.1993Examination fee paid 
Examination procedure07.08.1992Request for preliminary examination filed
International Preliminary Examining Authority: DE
05.07.1993Examination requested  [1993/43]
06.12.1993Despatch of a communication from the examining division (Time limit: M04)
25.01.1994Reply to a communication from the examining division
02.03.1994Despatch of communication of intention to grant (Approval: Yes)
20.07.1994Communication of intention to grant the patent
18.10.1994Fee for grant paid
18.10.1994Fee for publishing/printing paid
Opposition(s)19.10.1995No opposition filed within time limit [1996/02]
Fees paidRenewal fee
16.09.1993Renewal fee patent year 03
08.09.1994Renewal fee patent year 04
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Cited inInternational search[X]DE3432494  (BUERKERT GMBH [DE]);
 [X]EP0301568  (HOKYNAR JIRI);
 [X]EP0110325  (FUJI KINZOKU KOSAKU KK [JP]);
 [A]US4672997  (LANDIS DONALD [US], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.