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EP0513684
European procedure
Extract from the Register of European Patents
EP About this file: EP0513684
| EP0513684 - Method of improving the manufaturing of SOI devices by forming position alignment marks [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 27.06.1997 Database last updated on 28.03.2026 | Most recent event Tooltip | 27.06.1997 | No opposition filed within time limit | published on 13.08.1997 [1997/33] | Applicant(s) | For all designated states Sony Corporation 7-35, Kitashinagawa 6-chome Shinagawa-ku Tokyo / JP | [N/P] |
| Former [1992/47] | For all designated states SONY CORPORATION 7-35, Kitashinagawa 6-chome Shinagawa-ku Tokyo / JP | Inventor(s) | 01 /
Nishihara, Toshiyuki c/o Sony Corporation, 7-35 Kitashinagawa 6-chome Shinagawa-ku, Tokyo / JP | [1992/47] | Representative(s) | Müller, Frithjof E. Müller Hoffmann & Partner Patentanwälte Innere Wiener Strasse 17 81667 München / DE | [N/P] |
| Former [1997/12] | Müller, Frithjof E., Dipl.-Ing. Patentanwälte MÜLLER & HOFFMANN, Innere Wiener Strasse 17 81667 München / DE | ||
| Former [1992/47] | TER MEER - MÜLLER - STEINMEISTER & PARTNER Mauerkircherstrasse 45 D-81679 München / DE | Application number, filing date | 92107798.8 | 08.05.1992 | [1992/47] | Priority number, date | JP19910105602 | 10.05.1991 Original published format: JP 10560291 | [1992/47] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0513684 | Date: | 19.11.1992 | Language: | EN | [1992/47] | Type: | A3 Search report | No.: | EP0513684 | Date: | 09.12.1992 | Language: | EN | [1992/50] | Type: | B1 Patent specification | No.: | EP0513684 | Date: | 21.08.1996 | Language: | EN | [1996/34] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 23.10.1992 | Classification | IPC: | H01L23/544 | [1992/47] | CPC: |
H10W20/089 (EP,US);
H10W20/069 (EP,US);
H10W46/00 (EP,US);
H10W46/501 (EP,US);
Y10S438/928 (EP,US);
Y10S438/975 (EP,US)
| Designated contracting states | DE, FR, GB, NL [1992/47] | Title | German: | Verfahren zum Verbessern der Herstellung von SOI-Anordnungen mittels Positions-Ausrichtungsmarken | [1996/34] | English: | Method of improving the manufaturing of SOI devices by forming position alignment marks | [1992/47] | French: | Procédé pour l'amélioration de la fabrication de dispositifs SOI au moyen de la formation de marques d'alignement de position | [1992/47] |
| Former [1992/47] | Verfahren zum Verbessern der Herstellung von SOI-Anordnungen mittels Aurichtungsmarken der Position | Examination procedure | 06.05.1993 | Examination requested [1993/26] | 12.10.1994 | Despatch of a communication from the examining division (Time limit: M04) | 14.02.1995 | Reply to a communication from the examining division | 04.10.1995 | Despatch of communication of intention to grant (Approval: Yes) | 01.02.1996 | Communication of intention to grant the patent | 30.04.1996 | Fee for grant paid | 30.04.1996 | Fee for publishing/printing paid | Opposition(s) | 22.05.1997 | No opposition filed within time limit [1997/33] | Fees paid | Renewal fee | 09.05.1994 | Renewal fee patent year 03 | 12.04.1995 | Renewal fee patent year 04 | 09.05.1996 | Renewal fee patent year 05 |
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