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EP0513834
European procedure
Extract from the Register of European Patents
EP About this file: EP0513834
| EP0513834 - Method and apparatus for cooling wafers [Right-click to bookmark this link] | Status | Patent maintained as amended Status updated on 18.03.2005 Database last updated on 20.12.2024 | Most recent event Tooltip | 05.10.2005 | Change: Appeal number | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue M/S 2061 Santa Clara, California 95054-3299 / US | [N/P] |
| Former [2005/18] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue, M/S 2061 Santa Clara, California 95054-3299 / US | ||
| Former [1992/47] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue Santa Clara California 95054-3299 / US | Inventor(s) | 01 /
Bahng, Kenneth J. 21541 Regnart Road Cupertino, CA 95014-4818 / US | [1992/51] |
| Former [1992/47] | 01 /
Bahng, Kenneth J. 536 Castlerock Court Sunnyvale, CA 94087 / US | Representative(s) | Geissler, Bernhard, et al Bardehle Pagenberg Partnerschaft mbB Patentanwälte, Rechtsanwälte Prinzregentenplatz 7 81675 München / DE | [N/P] |
| Former [1999/33] | Geissler, Bernhard, Dr.jur., Dipl.-Phys., et al Patent- u. Rechtsanwälte Bardehle -Pagenberg-Dost-Altenburg- Geissler-Isenbruck Galileiplatz 1 81679 München / DE | ||
| Former [1999/32] | Hess, Peter K., Dipl.-Phys., et al Patent- und Rechtsanwälte Bardehle - Pagenberg - Dost Altenburg - Geissler -Isenbruck Galileiplatz 1 81679 München / DE | ||
| Former [1992/47] | Diehl, Hermann O. Th., Dr., et al Diehl, Glaeser, Hiltl & Partner Patentanwälte Postfach 19 03 65 D-80603 München / DE | Application number, filing date | 92108288.9 | 15.05.1992 | [1992/47] | Priority number, date | US19910701437 | 15.05.1991 Original published format: US 701437 | [1992/47] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0513834 | Date: | 19.11.1992 | Language: | EN | [1992/47] | Type: | B1 Patent specification | No.: | EP0513834 | Date: | 11.09.1996 | Language: | EN | [1996/37] | Type: | B2 New European patent specification | No.: | EP0513834 | Date: | 04.05.2005 | Language: | EN | [2005/18] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 27.08.1992 | Classification | IPC: | H01L21/00 | [1992/47] | CPC: |
H01L21/67109 (EP,US);
H01L21/30 (KR);
H01L21/68742 (EP,US);
Y10S269/903 (EP,US)
| Designated contracting states | DE, FR, GB, NL [1992/47] | Title | German: | Vorrichtung und Verfahren um Halbleiterscheiben zu Kühlen | [1992/47] | English: | Method and apparatus for cooling wafers | [1992/47] | French: | Procédé et appareil pour refroidir des disques semi-conducteurs | [1992/47] | Examination procedure | 19.05.1993 | Examination requested [1993/29] | 20.05.1994 | Despatch of a communication from the examining division (Time limit: M04) | 19.09.1994 | Reply to a communication from the examining division | 17.10.1994 | Despatch of a communication from the examining division (Time limit: M06) | 04.04.1995 | Reply to a communication from the examining division | 23.08.1995 | Despatch of communication of intention to grant (Approval: Yes) | 21.11.1995 | Communication of intention to grant the patent | 22.02.1996 | Fee for grant paid | 22.02.1996 | Fee for publishing/printing paid | Opposition(s) | Opponent(s) | 01
11.06.1997
ADMISSIBLE Institute of Technological Information, Inc. 2-2, Kitahara 2-chome Asaka-shi Saitama-ken 351 / JP Opponent's representative Füchsle, Klaus Hoffmann - Eitle ATTENTION : ADDRESS INACTIVE - USE ASS-NR - CDR / DE | [N/P] |
| Former [1997/33] | |||
| Opponent(s) | 01
11.06.1997
ADMISSIBLE Institute of Technological Information, Inc. 2-2, Kitahara 2-chome Asaka-shi Saitama-ken 351 / JP Opponent's representative Füchsle, Klaus Hoffmann Eitle, Patent- und Rechtsanwälte, Arabellastrasse 4 81925 München / DE | 22.07.1997 | Invitation to proprietor to file observations on the notice of opposition | 11.11.1997 | Reply of patent proprietor to notice(s) of opposition | 29.01.1999 | Date of oral proceedings | 29.03.1999 | Despatch of minutes of oral proceedings | 29.03.1999 | Despatch of communication that the patent will be revoked | 24.06.2003 | Despatch of a communication from the opposition division (Time limit: M04) | 01.10.2003 | Reply to a communication from the opposition division | 12.01.2004 | Despatch of interlocutory decision in opposition | 22.01.2004 | Legal effect of interlocutory decision in opposition | 28.04.2004 | Despatch of communication that the patent will be maintained as amended | 09.08.2004 | Fee for printing new specification paid | Appeal following opposition | 27.05.1999 | Appeal received No. T0598/99 | 06.08.1999 | Statement of grounds filed | 17.12.2002 | Result of appeal procedure: maintenance in amended form | 17.12.2002 | Date of oral proceedings | 27.12.2002 | Minutes of the oral proceedings despatched | Fees paid | Renewal fee | 30.05.1994 | Renewal fee patent year 03 | 26.05.1995 | Renewal fee patent year 04 | 30.05.1996 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | GB | 15.05.2004 | [2005/45] | Documents cited: | Search | [A]US4958061 (WAKABAYASHI TSUYOSHI [JP], et al); | [A]WO8904386 (KOPIN CORP [US]); | [A]US4955590 (NARUSHIMA MASAKI [JP], et al) |