-
EP0550058
European procedure
Extract from the Register of European Patents
EP About this file: EP0550058
| EP0550058 - A programmable multizone gas injector for single-wafer semiconductor processing equipment [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 17.09.1999 Database last updated on 26.06.2024 | Most recent event Tooltip | 07.12.2007 | Lapse of the patent in a contracting state New state(s): IT | published on 09.01.2008 [2008/02] | Applicant(s) | For all designated states Texas Instruments Incorporated 13500 North Central Expressway Dallas, Texas 75265 / US | [N/P] |
| Former [1993/27] | For all designated states TEXAS INSTRUMENTS INCORPORATED 13500 North Central Expressway Dallas Texas 75265 / US | Inventor(s) | 01 /
Moslehi, Mehrdad M. 15350-B Segovia Drive Dallas, TX 75248 / US | 02 /
Matthews, Robert T. 2417 Parkhaven Drive Plano, TX 75075 / US | 03 /
Davis, Cecil J. Route No. 4, Box 113c Greenville, TX 75401 / US | [1993/27] | Representative(s) | Schwepfinger, Karl-Heinz, et al Prinz & Partner GbR Manzingerweg 7 81241 München / DE | [N/P] |
| Former [1993/27] | Schwepfinger, Karl-Heinz, Dipl.-Ing., et al Prinz & Partner, Manzingerweg 7 D-81241 München / DE | Application number, filing date | 92122099.2 | 29.12.1992 | [1993/27] | Priority number, date | US19910815718 | 30.12.1991 Original published format: US 815718 | [1993/27] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0550058 | Date: | 07.07.1993 | Language: | EN | [1993/27] | Type: | A3 Search report | No.: | EP0550058 | Date: | 01.09.1993 | Language: | EN | [1993/35] | Type: | B1 Patent specification | No.: | EP0550058 | Date: | 11.11.1998 | Language: | EN | [1998/46] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.07.1993 | Classification | IPC: | C23C16/44, H01L21/00, C23C16/52 | [1998/46] | CPC: |
C23C16/45574 (EP);
H01L21/223 (KR);
C23C16/45561 (EP);
C23C16/45565 (EP);
C23C16/52 (EP);
H01L21/67017 (EP)
|
| Former IPC [1993/27] | C23C16/44, H01L21/00 | Designated contracting states | DE, FR, GB, IT, NL [1993/27] | Title | German: | Programmierbarer Multizonen-Gasinjektor für eine Anlage zur Behandlung von einzelnen Halbleiterscheiben | [1998/46] | English: | A programmable multizone gas injector for single-wafer semiconductor processing equipment | [1993/27] | French: | Buse d'injection de gaz programmable multizone pour un dispositif de traitement de plaquettes semi-conductrices individuelles | [1998/46] |
| Former [1993/27] | Programmierbarer Gasinjektor für eine Anlage zur Behandlung von einzigen Halbleiterscheiben | ||
| Former [1993/27] | Injecteur de gas programmable pour un dispositif de traitement de tranches semi-conducteurs individuelles | Examination procedure | 16.02.1994 | Examination requested [1994/15] | 06.03.1995 | Despatch of a communication from the examining division (Time limit: M06) | 13.07.1995 | Reply to a communication from the examining division | 29.11.1995 | Despatch of a communication from the examining division (Time limit: M04) | 02.04.1996 | Reply to a communication from the examining division | 29.07.1996 | Despatch of a communication from the examining division (Time limit: M04) | 04.12.1996 | Reply to a communication from the examining division | 20.02.1998 | Despatch of communication of intention to grant (Approval: Yes) | 08.05.1998 | Communication of intention to grant the patent | 31.07.1998 | Fee for grant paid | 31.07.1998 | Fee for publishing/printing paid | Opposition(s) | 12.08.1999 | No opposition filed within time limit [1999/44] | Fees paid | Renewal fee | 16.12.1994 | Renewal fee patent year 03 | 20.12.1995 | Renewal fee patent year 04 | 20.12.1996 | Renewal fee patent year 05 | 18.12.1997 | Renewal fee patent year 06 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 11.11.1998 | NL | 11.11.1998 | [2008/02] |
| Former [2003/07] | NL | 11.11.1998 | Documents cited: | Search | [Y]JP1287277 ; | [X]US3854443 (BAERG W); | [X]EP0318395 (FUJITSU LTD [JP]); | [XP]DE4142877 (MITSUBISHI ELECTRIC CORP [JP]); | [XP]US5134965 (TOKUDA MITSUO [JP], et al) | [Y] - PATENT ABSTRACTS OF JAPAN vol. 14, no. 63 (C-685)(4006) 6 February 1990 & JP-A-1 287 277 ( NISSIN ELECTRIC CO LTD ) 17 November 1989, & JP1287277 A 19891117 |