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EP0648575
European procedure
Extract from the Register of European Patents
EP About this file: EP0648575
| EP0648575 - Polishing apparatus [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 16.02.2001 Database last updated on 29.06.2024 | Most recent event Tooltip | 11.07.2008 | Change - representative | published on 13.08.2008 [2008/33] | Applicant(s) | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo / JP | [N/P] |
| Former [2000/16] | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku, Tokyo / JP | ||
| Former [1995/16] | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo / JP | Inventor(s) | 01 /
Okumura, Katsuya 2 Argent Drive Poughkeepsie N.Y. 12603 / US | 02 /
Aoki, Riichirou 15-20, Adachi 4-chome Adachi-ku, Tokyo / JP | 03 /
Yajima, Hiromi Haimu Suwasaka No. 201, 3-17 Suwa-cho, Tsurumi-ku Yokohama-shi, Kanagawa-ken / JP | 04 /
Kodera, Masako Toshiba-kannon-So 2025, 19-4, Kannon 2-chome Kawasaki-shi, Kanagawa-ken / JP | 05 /
Mishima, Shirou Toshiba-Gumyoji-Ryo, 4-12, Nakazato 1-chome Minami-ku, Yokohama-shi, Kanagawa-ken / JP | 06 /
Shigeta, Atsushi Katorea No. 202, 8-17, Minami-Rinkan 7-chome Yamato-shi, Kanagawa-ken / JP | 07 /
Hirose, Masayoshi c/o Ebara Corporation, 11-1, Haneda Asahi-cho Ohta-ku, Tokyo / JP | 08 /
Kimura, Norio c/o Ebara Corporation, 11-1, Haneda Asahi-cho Ohta-ku, Tokyo / JP | 09 /
Ishikawa, Seiji c/o Ebara Corporation, 11-1, Haneda Asahi-cho Ohta-ku, Tokyo / JP | [1995/16] | Representative(s) | Wagner, Karl H., et al Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | [N/P] |
| Former [2008/33] | Wagner, Karl H., et al Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | ||
| Former [1995/16] | Wagner, Karl H., et al WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5 D-80538 München / DE | Application number, filing date | 94114828.0 | 20.09.1994 | [1995/16] | Priority number, date | JP19930259396 | 21.09.1993 Original published format: JP 25939693 | [1995/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0648575 | Date: | 19.04.1995 | Language: | EN | [1995/16] | Type: | B1 Patent specification | No.: | EP0648575 | Date: | 19.04.2000 | Language: | EN | [2000/16] | Type: | B9 Corrected patent specification | No.: | EP0648575 | Date: | 05.12.2001 | [2001/49] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 16.02.1995 | Classification | IPC: | B24B37/04 | [1995/16] | CPC: |
H01L21/67167 (EP,US);
H01L21/302 (KR);
B08B1/32 (EP,US);
B08B13/00 (EP,US);
B24B27/0023 (EP,US);
B24B37/04 (EP,US);
B24B37/345 (EP,US);
B24B51/00 (EP,US);
B24B55/12 (EP,US);
H01L21/67028 (EP,US);
H01L21/67046 (EP,US);
H01L21/67057 (EP,US);
| Designated contracting states | DE, FR, GB, NL [1995/16] | Title | German: | Poliergerät | [1995/16] | English: | Polishing apparatus | [1995/16] | French: | Appareil de polissage | [1995/16] | Examination procedure | 25.08.1995 | Examination requested [1995/43] | 15.07.1998 | Despatch of a communication from the examining division (Time limit: M07) | 10.02.1999 | Reply to a communication from the examining division | 31.05.1999 | Despatch of communication of intention to grant (Approval: Yes) | 19.10.1999 | Communication of intention to grant the patent | 28.01.2000 | Fee for grant paid | 28.01.2000 | Fee for publishing/printing paid | Divisional application(s) | EP03011138.9 / EP1338384 | EP05027667.4 / EP1642679 | EP99120263.1 / EP0982098 | Opposition(s) | 20.01.2001 | No opposition filed within time limit [2001/14] | Fees paid | Renewal fee | 26.09.1996 | Renewal fee patent year 03 | 29.09.1997 | Renewal fee patent year 04 | 30.09.1998 | Renewal fee patent year 05 | 28.09.1999 | Renewal fee patent year 06 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPS63207559 ; | [A]JPS58223561 ; | [A]US4653231 (CRONKHITE PAUL W [US], et al) [A] 1-12 * column W * | [A] - PATENT ABSTRACTS OF JAPAN, (19881219), vol. 12, no. 485, Database accession no. (M - 777), & JP63207559 A 19880826 (DISCO ABRASIVE SYST LTD) [A] 1,4,5,8,9,11,12 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19840412), vol. 8, no. 80, Database accession no. (M - 289), & JP58223561 A 19831226 (DEISUKO : KK) [A] 1-7 * abstract * |