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EP0658917
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EP About this file: EP0658917
| EP0658917 - Fine-processing apparatus using low-energy neutral particle beam [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 16.05.1997 Database last updated on 26.06.2024 | Most recent event Tooltip | 11.07.2008 | Change - representative | published on 13.08.2008 [2008/33] | Applicant(s) | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo / JP | [N/P] |
| Former [1995/25] | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo / JP | Inventor(s) | 01 /
Nishimura, Tatsuya, c/o Ebara Res. Co., Ltd. 4-2-1, Honfujisawa Fujisawa-shi, Kanagawa-ken / JP | 02 /
Suzuki, Hidenao, c/o Ebara Res. Co., Ltd. 4-2-1, Honfujisawa Fujisawa-shi, Kanagawa-ken / JP | [1995/25] | Representative(s) | Wagner, Karl H., et al Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | [N/P] |
| Former [2008/33] | Wagner, Karl H., et al Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | ||
| Former [1995/25] | Wagner, Karl H., et al WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5 D-80538 München / DE | Application number, filing date | 94119595.0 | 12.12.1994 | [1995/25] | Priority number, date | JP19930342496 | 14.12.1993 Original published format: JP 34249693 | [1995/25] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0658917 | Date: | 21.06.1995 | Language: | EN | [1995/25] | Type: | A3 Search report | No.: | EP0658917 | Date: | 28.06.1995 | Language: | EN | [1995/26] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.05.1995 | Classification | IPC: | H01J37/305, H01L21/306 | [1995/25] | CPC: |
H01J37/3053 (EP);
H01L21/30 (KR);
H01J2237/0041 (EP);
H01J2237/3151 (EP)
| Designated contracting states | DE, FR, GB [1995/25] | Title | German: | Feinbearbeitungsgerät mittels eines Strahls niederenergetischer neutraler Partikeln | [1995/25] | English: | Fine-processing apparatus using low-energy neutral particle beam | [1995/25] | French: | Appareil de traitement pour utilisant un faisceau de particules neutres de basse énergie | [1995/25] | Examination procedure | 19.12.1995 | Examination requested [1996/09] | 03.07.1996 | Despatch of a communication from the examining division (Time limit: M06) | 14.01.1997 | Application deemed to be withdrawn, date of legal effect [1997/27] | 12.02.1997 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [1997/27] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.12.1996 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XA]EP0522296 (KAWASAKI STEEL CO [JP]) [X] 1-8,10 * page 3, line 29 - page 4, line 1 * * page 4, line 53 - page 5, line 3 * * page 7, line 6 - line 8 * * page 8, line 19 - line 48 * * page 9, line 21 - line 35 * * page 11, line 35 - line 50 * * page 13, line 58 - page 14, line 6 * * page 15, line 23 - line 37 * * figure - * [A] 9; | [A]EP0367568 (FUJITSU LTD [JP]) [A] 1,2,9 * column 5, line 35 - line 13 * * figure 1 *; | [A]GB2014500 (DOBSON C D) [A] 9 * abstract * * page 1, line 116 - page 2, line 24 * * figure 1 *; | [A]EP0132015 (UNIV TOKYO [JP]) [A] 1,2,4,5,8,9 * page 9, line 3 - page 11, line 3 * * page 13, line 3 - line 10 * * page 21, line 22 - page 23, line 9 * * figure 2 *; | [A]EP0531949 (EBARA CORP [JP]) |