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Extract from the Register of European Patents

EP About this file: EP0689619

EP0689619 - APPARATUS AND METHOD FOR DELIVERING REAGENTS IN VAPOR FORM TO A CVD REACTOR [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.04.2002
Database last updated on 19.10.2024
Most recent event   Tooltip28.12.2007Lapse of the patent in a contracting state
New state(s): IT		published on 30.01.2008  [2008/05]
Applicant(s)For all designated states
ADVANCED TECHNOLOGY MATERIALS, INC.
7 Commerce Drive
Danbury, CT 06810 / US
[1996/01]
Inventor(s)01 / KIRLIN, Peter S.
11 Kingswood Drive 72
Bethel, CT 06801 / US
02 / GARDINER, Robin A.
23 Knollwood Drive
Bethel, CT 06801 / US
03 / VAN BUSKIRK, Peter
18 Poverty Hollow Road
Newton, CT 06470 / US
[1996/01]
Representative(s)Marchant, James Ian, et al
Elkington and Fife LLP Prospect House 8 Pembroke Road
Sevenoaks, Kent TN13 1XR / GB
[N/P]
Former [1997/23]Marchant, James Ian, et al
Elkington and Fife, Prospect House, 8 Pembroke Road
Sevenoaks, Kent TN13 1XR / GB
Former [1996/01]Everett, Susan Jane, et al
Elkington and Fife Prospect House 8 Pembroke Road
Sevenoaks, Kent TN13 1XR / GB
Application number, filing date94913894.507.03.1994
[1996/01]
WO1994US02512
Priority number, dateUS1993003298418.03.1993         Original published format: US 32984
US1994017893307.01.1994         Original published format: US 178933
[1996/01]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9421840
Date:29.09.1994
Language:EN
[1994/22]
Type: A1 Application with search report 
No.:EP0689619
Date:03.01.1996
Language:EN
The application published by WIPO in one of the EPO official languages on 29.09.1994 takes the place of the publication of the European patent application.
[1996/01]
Type: B1 Patent specification 
No.:EP0689619
Date:30.05.2001
Language:EN
[2001/22]
Search report(s)International search report - published on:US29.09.1994
(Supplementary) European search report - dispatched on:EP02.06.1998
ClassificationIPC:C23C16/00, B01F3/04, F01B31/00, C23C16/44
[1998/04]
CPC:
C23C16/4483 (EP,KR); B01F23/12 (EP); C23C16/40 (EP);
C23C16/408 (EP); C23C16/409 (EP); C23C16/4407 (KR);
C23C16/448 (EP); C23C16/4481 (EP); H10N60/0464 (EP,KR) (-)
Former IPC [1996/01]C23C16/00, B01F3/04, F01B31/00
Designated contracting statesAT,   BE,   CH,   DE,   DK,   ES,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [1996/01]
TitleGerman:VERFAHREN UND VORRICHTUNG ZUR ZUFÜHRUNG VON REAGENZIEN IN DAMPFFORM IN EINEN CVD-REAKTOR[1996/01]
English:APPARATUS AND METHOD FOR DELIVERING REAGENTS IN VAPOR FORM TO A CVD REACTOR[1996/01]
French:APPAREIL ET METHODE D'INTRODUCTION DE REACTIFS EN PHASE GAZEUSE DANS UN REACTEUR DE DEPOSITION EN PHASE GAZEUSE PAR PROCEDE CHIMIQUE (CVD)[1996/01]
Entry into regional phase09.10.1995National basic fee paid 
09.10.1995Search fee paid 
09.10.1995Designation fee(s) paid 
09.10.1995Examination fee paid 
Examination procedure05.10.1994Request for preliminary examination filed
International Preliminary Examining Authority: US
09.10.1995Examination requested  [1996/01]
23.10.1998Despatch of a communication from the examining division (Time limit: M06)
29.04.1999Reply to a communication from the examining division
10.06.1999Despatch of a communication from the examining division (Time limit: M06)
13.11.1999Reply to a communication from the examining division
19.07.2000Despatch of communication of intention to grant (Approval: Yes)
06.11.2000Communication of intention to grant the patent
31.01.2001Fee for grant paid
31.01.2001Fee for publishing/printing paid
Opposition(s)01.03.2002No opposition filed within time limit [2002/21]
Fees paidRenewal fee
08.03.1996Renewal fee patent year 03
12.03.1997Renewal fee patent year 04
10.03.1998Renewal fee patent year 05
11.03.1999Renewal fee patent year 06
13.03.2000Renewal fee patent year 07
16.03.2001Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT30.05.2001
BE30.05.2001
CH30.05.2001
IT30.05.2001
LI30.05.2001
DK30.08.2001
PT30.08.2001
SE30.08.2001
GR31.08.2001
ES30.11.2001
[2008/05]
Former [2004/51]AT30.05.2001
BE30.05.2001
CH30.05.2001
LI30.05.2001
DK30.08.2001
PT30.08.2001
SE30.08.2001
GR31.08.2001
ES30.11.2001
Former [2004/04]AT30.05.2001
BE30.05.2001
CH30.05.2001
LI30.05.2001
DK30.08.2001
PT30.08.2001
SE30.08.2001
ES30.11.2001
Former [2003/45]AT30.05.2001
BE30.05.2001
CH30.05.2001
LI30.05.2001
DK30.08.2001
PT30.08.2001
SE30.08.2001
Former [2002/26]AT30.05.2001
BE30.05.2001
CH30.05.2001
LI30.05.2001
PT30.08.2001
SE30.08.2001
Former [2002/15]AT30.05.2001
BE30.05.2001
CH30.05.2001
LI30.05.2001
SE30.08.2001
Former [2002/14]AT30.05.2001
BE30.05.2001
SE30.08.2001
Former [2002/12]BE30.05.2001
SE30.08.2001
Former [2002/05]SE30.08.2001
Documents cited:Search[XY]JPH0248001  ;
 [X]FR1097534  (BURCKHARDT AG MASCHF);
 [A]US4174929  (DUDIN JURY A [SU], et al);
 [A]US4212663  (ASLAMI MOHD A [SA]);
 [A]GB1584814  (CHAMPION CHEMICALS INC);
 [Y]EP0420596  (CANON KK [JP]);
 [A]WO9303196  (SHELL INT RESEARCH [NL]);
International search[Y]US4036915  (LUCERO DANIEL P, et al);
 [Y]US4288396  (OTTESTAD NILS T);
 [X]US4833976  (LOLAND MAGNUS [NO]);
 [PY]US5204314  (KIRLIN PETER S [US], et al);
 [Y]US5259995  (MATALIS THOMAS V [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.