-
EP0687956
European procedure
Extract from the Register of European Patents
EP About this file: EP0687956
| EP0687956 - Illumination device [Right-click to bookmark this link] | Status | Patent maintained as amended Status updated on 07.10.2005 Database last updated on 24.07.2024 | Most recent event Tooltip | 16.03.2007 | Lapse of the patent in a contracting state | published on 18.04.2007 [2007/16] | Applicant(s) | For all designated states Carl Zeiss SMT AG Carl-Zeiss-Strasse 22 73447 Oberkochen / DE | [2005/18] |
| Former [2004/31] | For:DE
FR
NL
Carl Zeiss 89518 Heidenheim (Brenz) / DE | ||
| For:GB
Carl-Zeiss-Stiftung trading as Carl Zeiss 89518 Heidenheim (Brenz) / DE | |||
| Former [1999/51] | For:DE
FR
NL
Carl Zeiss 89518 Heidenheim (Brenz) / DE | ||
| For:GB
CARL ZEISS-STIFTUNG HANDELND ALS CARL ZEISS D-89518 Heidenheim (Brenz) / DE | |||
| Former [1995/51] | For:DE
FR
NL
Carl Zeiss D-89518 Heidenheim (Brenz) / DE | ||
| For:GB
CARL ZEISS-STIFTUNG HANDELND ALS CARL ZEISS D-89518 Heidenheim (Brenz) / DE | Inventor(s) | 01 /
Wangler, Johannes An der Reute 5 D-89551 Königsbronn / DE | 02 /
Richter, Gerald Am Steg 9 D-73453 Abtsgmünd / DE | [1995/51] | Application number, filing date | 95107364.2 | 16.05.1995 | [1995/51] | Priority number, date | DE19944421053 | 17.06.1994 Original published format: DE 4421053 | DE19944441947 | 25.11.1994 Original published format: DE 4441947 | [1995/51] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | EP0687956 | Date: | 20.12.1995 | Language: | DE | [1995/51] | Type: | B1 Patent specification | No.: | EP0687956 | Date: | 22.12.1999 | Language: | DE | [1999/51] | Type: | B2 New European patent specification | No.: | EP0687956 | Date: | 23.11.2005 | Language: | DE | [2005/47] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 24.08.1995 | Classification | IPC: | G03F7/20 | [1995/51] | CPC: |
G03F7/70066 (EP,US);
G02B13/143 (EP,US);
G02B15/04 (EP,US);
G02B5/001 (EP,US);
G02B6/4206 (EP,US);
G02B6/4298 (EP,US);
G03F7/2002 (EP,US);
G03F7/70075 (EP,US);
G03F7/70108 (EP,US);
G03F7/70183 (EP,US)
(-)
| Designated contracting states | DE, FR, GB, NL [1995/51] | Title | German: | Beleuchtungseinrichtung | [1995/51] | English: | Illumination device | [1995/51] | French: | Dispositif d'illumination | [1995/51] | Examination procedure | 10.02.1996 | Examination requested [1996/15] | 05.01.1999 | Despatch of communication of intention to grant (Approval: Yes) | 29.04.1999 | Communication of intention to grant the patent | 21.07.1999 | Fee for grant paid | 21.07.1999 | Fee for publishing/printing paid | Opposition(s) | Opponent(s) | 01
22.09.2000
ADMISSIBLE NIKON CORPORATION Ohi Plant, 6-3 Nishi-ohi-chome Shinagawa-ku Tokyo 140 / JP Opponent's representative Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [N/P] |
| Former [2000/48] | |||
| Opponent(s) | 01
22.09.2000
ADMISSIBLE NIKON CORPORATION Ohi Plant, 6-3 Nishi-ohi-chome Shinagawa-ku, Tokyo 140 / JP Opponent's representative HOFFMANN - EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | 31.10.2000 | Invitation to proprietor to file observations on the notice of opposition | 06.03.2001 | Reply of patent proprietor to notice(s) of opposition | 27.01.2003 | Date of oral proceedings | 19.02.2003 | Despatch of interlocutory decision in opposition | 19.02.2003 | Despatch of minutes of oral proceedings | 01.03.2005 | Legal effect of interlocutory decision in opposition | 20.07.2005 | Despatch of communication that the patent will be maintained as amended | 12.09.2005 | Fee for printing new specification paid | Appeal following opposition | 09.04.2003 | Appeal received No. T0396/03 | 17.06.2003 | Statement of grounds filed | 03.06.2005 | Result of appeal procedure: maintenance in amended form | 25.03.2003 | Appeal received | Fees paid | Renewal fee | 19.04.1997 | Renewal fee patent year 03 | 22.04.1998 | Renewal fee patent year 04 | 21.04.1999 | Renewal fee patent year 05 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | GB | 22.12.1999 | [2007/16] | Documents cited: | Search | [DPX]US5357312 (TOUNAI KEIICHIRO [JP]) [DPX] 1,2,4 * abstract * * column 1, line 47 - line 57 * * column 4, line 47 - column 5, line 16 *; | [PX]WO9420883 (GEN SIGNAL CORP [US]) [PX] 1-4,13 * abstract * * page 5, line 6 - page 6, line 13 *; | [PX]EP0627643 (HAMAMATSU PHOTONICS KK [JP]) [PX] 1,13,14 * abstract * * column 12, line 48 - column 13, line 11 *; | [DA]EP0564264 (CANON KK [JP]) [DA] 1,5 * abstract *; | [A]EP0490291 (SUMITOMO ELECTRIC INDUSTRIES [JP]) [A] 1 * abstract * | by applicant | EP0564264 | JPH05251300 | EP0346844 | US5208629 | US5237367 | US5245384 | US5357312 | EP0297161 | - W.N. PARTLO ET AL., SPIE Vol. 1927. Optical/Laser Microlithography VI, (1993), pages 137 - 157 | Opposition | US4426696 | US5164584 | US4623776 | DE4219809 | EP0576297 | JPH05251308 | JPH06118657 | US5245384 | JPH05102003 | US5309198 | JPH01152411 | - Lexikon der Optik, Spektrum Akademischer Verlag, 1999, Seiten 59,60,356 | - RMS Dictionary of light microscopy, 1989, p.5,9,51,76,127,136 | - Ernst Wörterbuch der ind. technik, 1989, Seiten 172,1019 | - Naumann, Schröder: Bauelemente der Optik, 1983, Abschnitt 1.1 |