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EP0714121
European procedure
Extract from the Register of European Patents
EP About this file: EP0714121
| EP0714121 - Corrosion protection for micromechanical metallic layers [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 27.04.2001 Database last updated on 21.05.2024 | Most recent event Tooltip | 27.04.2001 | No opposition filed within time limit | published on 13.06.2001 [2001/24] | Applicant(s) | For all designated states SIEMENS AKTIENGESELLSCHAFT Werner-von-Siemens-Str. 1 DE-80333 München / DE | [N/P] |
| Former [2000/26] | For all designated states SIEMENS AKTIENGESELLSCHAFT Wittelsbacherplatz 2 80333 München / DE | ||
| Former [1996/22] | For all designated states SIEMENS AKTIENGESELLSCHAFT Wittelsbacherplatz 2 D-80333 München / DE | Inventor(s) | 01 /
Näher, Ulrich, Dr. Rheinstr. 23 D-80803 München / DE | 02 /
Bertagnolli, Emmerich, Dr. Nordendstr. 5 D-80799 München / DE | [1996/22] | Application number, filing date | 95118213.8 | 17.11.1995 | [1996/22] | Priority number, date | DE19944441900 | 24.11.1994 Original published format: DE 4441900 | [1996/22] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | EP0714121 | Date: | 29.05.1996 | Language: | DE | [1996/22] | Type: | A3 Search report | No.: | EP0714121 | Date: | 21.05.1997 | [1997/21] | Type: | B1 Patent specification | No.: | EP0714121 | Date: | 28.06.2000 | Language: | DE | [2000/26] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.04.1997 | Classification | IPC: | H01L21/3205 | [1996/22] | CPC: |
B81C1/00801 (EP,US);
H01L21/3081 (EP,US)
| Designated contracting states | DE, FR, GB, IE, IT [1996/22] | Title | German: | Korrosionsschutz für mikromechanische Metallschichten | [1996/22] | English: | Corrosion protection for micromechanical metallic layers | [1996/22] | French: | Protection contre la corrosion pour couches métalliques micromécaniques | [1996/22] | Examination procedure | 17.06.1997 | Examination requested [1997/34] | 26.03.1999 | Despatch of communication of intention to grant (Approval: Yes) | 21.04.1999 | Communication of intention to grant the patent | 20.07.1999 | Fee for grant paid | 20.07.1999 | Fee for publishing/printing paid | Opposition(s) | 29.03.2001 | No opposition filed within time limit [2001/24] | Fees paid | Renewal fee | 20.11.1997 | Renewal fee patent year 03 | 17.11.1998 | Renewal fee patent year 04 | 18.11.1999 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]WO9105284 (BRITISH TELECOMM [GB]) [Y] 1 * page 7, paragraph 2 - page 9, paragraph 2 *; | [Y] - SHAW K A ET AL, "SCREAM I: A SINGLE MASK, SINGLE-CRYSTAL SILICON PROCESS FOR MICROELECTROMECHANICAL STRUCTURES", PROCEEDINGS OF THE WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS (ME, FORT LAUDERDALE, FEB. 7 - 10, 1993, INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, (19930207), no. WORKSHOP 6, pages 155 - 159, XP000366873 [Y] 1 * page 156, column L, paragraph 8 - column R, paragraph 2 * DOI: http://dx.doi.org/10.1109/MEMSYS.1993.296930 |